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1. 发明申请

US20140225679A1 POWER COMBINER/DIVIDER 有权
标题翻译：动力组合机/分岔机
公开(公告)号：US20140225679A1
公开(公告)日：2014-08-14
申请号：US14347387
申请日：2013-01-09
申请人： Nihon Koshuha Co., Ltd.
发明人： Kibatsu Shinohara , Yutaka Arizumi
IPC分类号： H01P5/18
CPC分类号： H01P5/12 , H01P5/183
摘要： A power combiner/divider W1 which includes: a body portion in which a cavity is formed; a center coaxial connector which is formed on an approximately center portion of the body portion; a plurality of peripheral coaxial connectors 14 which are arranged concentrically about the center coaxial connector 11 and are formed on the body portion; a radial line which is formed in the cavity formed in the body portion; a center coaxial line which has one end thereof connected to the center coaxial connector and the other end thereof connected to a center portion of the radial line; and a peripheral coaxial line which has one end thereof connected to the peripheral coaxial connector and the other end thereof connected to an outer peripheral portion of the radial line, an impedance conversion part is provided to the radial line in one or plural stages.
摘要翻译：一种功率合成器/分压器W1，其包括：形成空腔的主体部分; 中心同轴连接器，其形成在所述主体部分的大致中心部分上; 多个外围同轴连接器14，其围绕中心同轴连接器11同心地布置并形成在主体部分上; 形成在形成在主体部分中的空腔中的径向线; 中心同轴线，其一端连接到中心同轴连接器，另一端连接到径向线的中心部分; 以及外周同轴线，其一端与周边同轴连接器连接，另一端与径向线的外周部连接，阻抗转换部以一级或多级提供给径向线。

2. 发明申请

US20120280764A1 FERRITE PHASE SHIFTER AND AUTOMATIC MATCHING APPARATUS 有权
标题翻译：飞轮相移和自动匹配装置
公开(公告)号：US20120280764A1
公开(公告)日：2012-11-08
申请号：US13552786
申请日：2012-07-19
申请人： Kibatsu SHINOHARA , Shigetsugu TSURUOKA
发明人： Kibatsu SHINOHARA , Shigetsugu TSURUOKA
IPC分类号： H01P1/19
CPC分类号： H01P1/19 , H01P1/182 , H01P1/195
摘要： In a ferrite phase shifter, a temperature rise at ferrites can be suppressed to maintain the characteristics of the frites even when used at high power. Thus, the phase shifter can stably demonstrate high performance. The ferrite phase shifter includes a rectangular waveguide, substantially sheet-like ferrites disposed to face each other with respective mounting surfaces kept in tight contact with inner walls of wide surfaces of the rectangular waveguide facing each other, and a coil which is wound around the periphery of the rectangular waveguide in a position substantially corresponding to the position of the ferrites and through which a current is passed.
摘要翻译：在铁素体移相器中，即使在高功率下使用时，也可以抑制铁氧体的温度上升，以保持玻璃粉的特性。因此，移相器可以稳定地显示出高性能。铁氧体移相器包括：矩形波导，基本上为片状的铁氧体，彼此相对地设置，各个安装表面与彼此面对的矩形波导的宽表面的内壁保持紧密接触;以及缠绕在周边的线圈在大致对应于铁氧体的位置的位置上的矩形波导的电流通过。

3. 发明授权

US5565738A Plasma processing apparatus which uses a uniquely shaped antenna to reduce the overall size of the apparatus with respect to the plasma chamber 失效
标题翻译：等离子体处理装置，其使用独特形状的天线来减小装置相对于等离子体室的整体尺寸
公开(公告)号：US5565738A
公开(公告)日：1996-10-15
申请号：US440453
申请日：1995-05-12
申请人： Seiji Samukawa , Kibatsu Shinohara , Hirobumi Matsumoto , Tsutomu Tsukada , Yukito Nakagawa
发明人： Seiji Samukawa , Kibatsu Shinohara , Hirobumi Matsumoto , Tsutomu Tsukada , Yukito Nakagawa
IPC分类号： H05H1/46 , C23F4/00 , H01J37/32 , H01L21/302 , H01L21/3065 , H05B37/00
CPC分类号： H01J37/3211 , H01J37/32669
摘要： A plasma processing apparatus comprises a plasma chamber having a gas inlet opening and a gas outlet opening. A first high-frequency energy source supplies accelerating energy to a holder that supports a semiconductor specimen within the chamber to produce a high-frequency accelerating electric field. Gas is introduced to the chamber through the inlet opening and accelerated by the electric field toward the specimen. An antenna structure is connected to a second high-frequency energy source which supplies exciting energy at a frequency in the range between 100 MHz and 1 GHz which is higher than the frequency of the accelerating energy. The antenna structure has radially outwardly extending, circumferentially equally spaced apart elements of length equal to the quarter wavelength of the exciting energy so that there is a phase difference of 180 degrees between adjacent ones of the antenna elements. The accelerated gas is uniformly excited and converted to high-density plasma.
摘要翻译：等离子体处理装置包括具有气体入口和气体出口的等离子体室。第一高频能源将加速能量提供给支撑室内的半导体样品以产生高频加速电场。通过入口将气体引入腔室，并通过电场向样品加速。天线结构连接到第二高频能源，其在比加速能量的频率高的100MHz和1GHz之间的频率处提供激励能量。天线结构具有长度等于激发能量的四分之一波长的径向向外延伸的周向等间隔的元件，使得相邻天线元件之间存在180度的相位差。加速气体被均匀地激发并转化为高密度等离子体。

4. 发明授权

US06910440B2 Apparatus for plasma processing 失效
标题翻译：等离子体处理装置
公开(公告)号：US06910440B2
公开(公告)日：2005-06-28
申请号：US09979719
申请日：2001-01-18
申请人： Nobuo Ishii , Yasuyoshi Yasaka , Kibatsu Shinohara
发明人： Nobuo Ishii , Yasuyoshi Yasaka , Kibatsu Shinohara
IPC分类号： H01J37/32 , C23C16/00 , H05H1/00
摘要： A plasma processing apparatus that generates a uniform plasma, thus allowing uniform processing of large-diameter wafers. The cylindrical apparatus includes a wafer mounting table, a silica plate providing an airtight seal, a microwave supplier for propagating a microwave in TE11 mode, and a cylindrical waveguide connected at one end to the microwave supplier. A radial waveguide box is connected between the other end of the cylindrical waveguide and the silica plate. The radial waveguide box extends radially outward from the cylindrical waveguide, forming a flange and defining an interior waveguide space. A disc-shaped slot antenna is located at the lower end of the radial waveguide box, above the silica plate. A circularly-polarized wave converter disposed in the cylindrical waveguide rotates the TE11-mode microwave about the axis of the cylindrical waveguide, and sends the rotating microwave to the radial waveguide box.
摘要翻译：一种等离子体处理装置，其产生均匀的等离子体，从而允许大直径晶片的均匀加工。圆筒形装置包括晶片安装台，提供气密密封的石英板，用于以TE11模式传播微波的微波供应器，以及一端连接到微波供应器的圆柱形波导。径向波导盒连接在圆柱形波导的另一端和石英板之间。径向波导盒从圆柱形波导径向向外延伸，形成凸缘并限定内部波导空间。盘状槽天线位于径向波导盒的下端，位于石英板上方。设置在圆筒形波导管内的圆偏振波转换器围绕圆柱形波导的轴线旋转TE11模式微波，并将旋转的微波发送到径向波导盒。

5. 发明授权

US6043608A Plasma processing apparatus 失效
标题翻译：等离子体处理装置
公开(公告)号：US6043608A
公开(公告)日：2000-03-28
申请号：US962390
申请日：1997-10-31
申请人： Seiji Samukawa , Yukito Nakagawa , Hisaaki Sato , Tsutomu Tsukada , Kibatsu Shinohara , Yasuo Niimura
发明人： Seiji Samukawa , Yukito Nakagawa , Hisaaki Sato , Tsutomu Tsukada , Kibatsu Shinohara , Yasuo Niimura
IPC分类号： H05H1/46 , C23F4/00 , H01J37/32 , H01L21/205 , H01L21/302 , H01L21/3065 , H05B37/00
CPC分类号： H01J37/32082
摘要： This invention discloses a plasma processing apparatus for carrying out a process onto a substrate utilizing a plasma generated by supplying RF energy with a plasma generation gas. This apparatus comprises a vacuum chamber having a pumping system, a substrate holder for placing the substrate to be processed in the vacuum chamber, a gas introduction means for introducing the plasma generation gas into a plasma generation space, an energy supply means for supplying the RF energy with the plasma generation gas. The antenna has multiple antenna elements provided symmetrically to the center on the axis of the substrate and an end shorting member shorting each end of the antenna elements so that an RF current path symmetrical to the center is applied. Multiple circuits resonant at a frequency of the RF energy are formed symmetrically of the antenna elements and the end shorting member. Length obtained by adding total length of neighboring two of the antenna elements and length of the RF current path between ends of neighboring two of the antenna elements corresponds to one second of wavelength of the RF energy.
摘要翻译：本发明公开了一种等离子体处理装置，其使用通过向等离子体发生气体提供RF能量而产生的等离子体，在基板上进行处理。该设备包括具有泵送系统的真空室，用于将要处理的基板放置在真空室中的基板保持器，用于将等离子体产生气体引入等离子体产生空间的气体引入装置，用于提供RF 能量与等离子体产生气体。天线具有对称地设置在基板的轴线上的中心的多个天线元件和端部短路构件，使天线元件的每一端短路，从而施加与中心对称的RF电流路径。在RF能量的频率处共振的多个电路对称地形成在天线元件和端部短路部件上。通过相邻两个天线元件的总长度相加而获得的长度和相邻两个天线元件的端部之间的RF电流路径的长度对应于RF能量的波长的一秒。

6. 发明授权

US09419323B2 Power combiner/divider of a radial line type impedance matched between a center connector and peripheral outer connectors 有权
标题翻译：在中心连接器和外围外部连接器之间匹配的径向线型阻抗的功率组合器/分压器
公开(公告)号：US09419323B2
公开(公告)日：2016-08-16
申请号：US14347387
申请日：2013-01-09
申请人： Nihon Koshuha Co., Ltd.
发明人： Kibatsu Shinohara , Yutaka Arizumi
IPC分类号： H01P5/12 , H01P5/18
CPC分类号： H01P5/12 , H01P5/183
摘要： A power combiner/divider W1 which includes: a body portion in which a cavity is formed; a center coaxial connector which is formed on an approximately center portion of the body portion; a plurality of peripheral coaxial connectors 14 which are arranged concentrically about the center coaxial connector 11 and are formed on the body portion; a radial line which is formed in the cavity formed in the body portion; a center coaxial line which has one end thereof connected to the center coaxial connector and the other end thereof connected to a center portion of the radial line; and a peripheral coaxial line which has one end thereof connected to the peripheral coaxial connector and the other end thereof connected to an outer peripheral portion of the radial line, an impedance conversion part is provided to the radial line in one or plural stages.
摘要翻译：一种功率合成器/分压器W1，其包括：形成空腔的主体部分; 中心同轴连接器，其形成在所述主体部分的大致中心部分上; 多个外围同轴连接器14，其围绕中心同轴连接器11同心地布置并形成在主体部分上; 形成在形成在主体部分中的空腔中的径向线; 中心同轴线，其一端连接到中心同轴连接器，另一端连接到径向线的中心部分; 以及外周同轴线，其一端与周边同轴连接器连接，另一端与径向线的外周部连接，阻抗转换部以一级或多级提供给径向线。

7. 发明授权

US07186314B2 Plasma processor and plasma processing method 有权
标题翻译：等离子处理器和等离子体处理方法
公开(公告)号：US07186314B2
公开(公告)日：2007-03-06
申请号：US10543857
申请日：2004-01-26
申请人： Nobuo Ishii , Kibatsu Shinohara
发明人： Nobuo Ishii , Kibatsu Shinohara
IPC分类号： C23F1/00 , H01L21/306
CPC分类号： H01J37/32211 , H01J37/32192 , H01P5/1022
摘要： A plasma processor includes a table on which a target object is to be placed, a vessel which accommodates the table and in which a plasma is to be generated by a high-frequency electromagnetic field, a high-frequency oscillator (30) which generates a high-frequency electromagnetic field, and a reference oscillator (34) which is lower in output power than the high-frequency oscillator (30) and stable in oscillation frequency. A reference signal generated by the reference oscillator (34) is injected into the high-frequency oscillator (30) to fix an oscillation frequency of the high-frequency oscillator (30) at a frequency of a reference signal. Therefore, accurate load matching is performed to improve an energy efficiency when an automatic matching device provided between the high-frequency oscillator (30) and vessel is designed based on the frequency of the reference signal.
摘要翻译：等离子体处理器包括：待放置目标物体的台，容纳台的容器，高频电磁场要产生等离子体;高频振荡器，高频电磁场以及输出功率比高频振荡器（30）低的基准振荡器（34），振荡频率稳定。由基准振荡器（34）产生的参考信号被注入到高频振荡器（30）中，以将高频振荡器（30）的振荡频率固定在参考信号的频率上。因此，当基于参考信号的频率设计在高频振荡器（30）和容器之间提供的自动匹配装置时，执行精确的负载匹配以提高能量效率。

8. 发明授权

US5041803A Automatic load matching circuit for microwaves using multi-element matching device 失效
标题翻译：使用多元件匹配装置的微波自动负载匹配电路
公开(公告)号：US5041803A
公开(公告)日：1991-08-20
申请号：US497001
申请日：1990-03-21
申请人： Kibatsu Shinohara , Hiroshi Hasunuma
发明人： Kibatsu Shinohara , Hiroshi Hasunuma
IPC分类号： H01P1/00 , H01P5/04 , H03H7/40
CPC分类号： H03H7/40
摘要： An automatic load-matching circuit for microwaves, disposed on a transmission line between a signal source and a load. Signal detection means for detecting a travelling wave component and a reflected wave component and for producing outputs corresponding to the absolute value of reflection coefficient .GAMMA., the cosine products .vertline..GAMMA..vertline. cos .theta., and the sine product .vertline..GAMMA..vertline. sin .theta. for controlling an automatic matching means, which includes three matching elements, each having an adjustable short-circuit length, disposed on the transmission line with a separation of odd number multiples of 1/8 of a wavelength along the transmission line. The first and third matching elements are connected such that in response to a change in the short-circulating length of one of the first and third matching elements, the short-circuiting length of the other of the first and third matching elements changes in a corresponding opposite manner. The first and third matching elements are both driven by either the cosine product output or the sine product output, and the second matching element is driven with the one of the cosine and sine product outputs which is not driving the first and third matching elements.
摘要翻译：一种用于微波的自动负载匹配电路，设置在信号源和负载之间的传输线上。用于检测行波分量和反射波分量并产生与反射系数GAMMA，余弦乘积| GAMMA |cosθ和正弦乘积| GAMMA |sinθ的绝对值相对应的输出的信号检测装置，用于控制自动匹配装置，其包括三个匹配元件，每个匹配元件具有可调节的短路长度，沿着传输线设置在传输线上，其中奇数倍数为1/8的奇数倍。第一和第三匹配元件被连接成使得响应于第一和第三匹配元件中的一个的短循环长度的变化，第一和第三匹配元件中的另一个的短路长度在相应的相反的方式。第一和第三匹配元件都由余弦乘积输出或正弦乘积输出驱动，第二匹配元件由没有驱动第一和第三匹配元件的余弦和正弦乘积输出之一驱动。

9. 发明授权

US10056671B2 Waveguide type power combining/dividing unit 有权
公开(公告)号：US10056671B2
公开(公告)日：2018-08-21
申请号：US15501285
申请日：2014-09-10
申请人： Nihon Koshuha Co., Ltd.
发明人： Kibatsu Shinohara , Shuichi Aizawa , Yutaka Arisumi
IPC分类号： H01P5/12 , H01P5/08 , H01P5/19 , H01P3/123
CPC分类号： H01P5/082 , H01P3/123 , H01P5/19
摘要： A waveguide type power combining/dividing unit W includes a plurality of rectangular waveguides 1 for TE10 mode disposed in a radial pattern, a circular waveguide 2 for TM01 mode disposed at a center of the radial pattern, in which one ends of the plurality of the rectangular waveguides 1 are connected to a side surface of one end of the circular waveguide.

10. 发明授权

US07545226B2 Magnetron oscillator 有权
标题翻译：磁控管振荡器
公开(公告)号：US07545226B2
公开(公告)日：2009-06-09
申请号：US10572532
申请日：2005-09-15
申请人： Kibatsu Shinohara
发明人： Kibatsu Shinohara
IPC分类号： H03B9/10 , H03L7/24
CPC分类号： H03B9/10 , H01J23/34 , H01J37/32192 , H01J37/32201 , H05H1/46
摘要： A magnetron (2), a launcher (4) which extracts the output power of the magnetron (2), an impedance generator (5) having one terminal connected to the output terminal of the launcher (4), and a reference signal supplier (6) connected to the other terminal of the impedance generator (5) are included. The reference signal supplier (6) supplies, to the magnetron (2), a reference signal lower in electric power and stabler in frequency than the output from the magnetron (2). The oscillation frequency of the magnetron (2) is locked to the frequency of the reference signal by injection of the reference signal. The impedance generator (5) can reduce the change width of the oscillation frequency of the magnetron (2) by adjusting the load impedance of the magnetron (2). This implements a magnetron oscillator (1) which has high frequency stability and does not fluctuate the frequency even when the output power is changed.
摘要翻译：磁控管（2），提取磁控管（2）的输出功率的发射器（4），具有连接到发射器（4）的输出端子的一个端子的阻抗发生器（5）和参考信号供应器包括连接到阻抗发生器（5）的另一端的6）。参考信号供应器（6）向磁控管（2）提供电力较低的参考信号并且频率比来自磁控管（2）的输出更稳定。通过注入参考信号，磁控管（2）的振荡频率被锁定到参考信号的频率上。阻抗发生器（5）可以通过调整磁控管（2）的负载阻抗来减小磁控管（2）的振荡频率的变化宽度。这实现了具有高频稳定性的磁控管振荡器（1），即使当输出功率改变时也不会使频率波动。

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