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    • 7. 发明申请
    • IN-LIQUID PLASMA FILM-FORMING APPARATUS, ELECTRODE FOR IN-LIQUID PLASMA, AND FILM-FORMING METHOD USING IN-LIQUID PLASMA
    • 液体等离子体成膜装置,液体等离子体电极和使用液体等离子体的成膜方法
    • US20110229656A1
    • 2011-09-22
    • US12671773
    • 2009-03-02
    • Kenji ShibataToshihisa ShimoKyoko KumagaiHidetaka HayashiShinya OkudaShinfuku NomuraHiromichi Toyota
    • Kenji ShibataToshihisa ShimoKyoko KumagaiHidetaka HayashiShinya OkudaShinfuku NomuraHiromichi Toyota
    • H05H1/48
    • C23C16/509C23C16/26C23C16/4485H01J37/32357
    • In an in-liquid plasma film-forming apparatus having: a vessel 1 being capable of accommodating a substrate “S” and a liquid “L” including raw material therein; an electrode 2 for in-liquid plasma, electrode 2 which is disposed in the vessel 1; an electric power device 3 for supplying electricity to the electrode 2 for in-liquid plasma; the electrode 2 for in-liquid plasma is equipped with: a main electrode 21 having a discharging end 22; an auxiliary electrode 26 not only facing the discharging end 22 but also being disposed between the discharging end 22 and the substrate “S” that face each other; and a plasma generating unit 29 having a space that is demarcated by a surface 22a of the discharging end 22 and a surface 26a of the auxiliary electrode 26 facing the surface 22a, and being for generating plasma by means of electricity being supplied to the main electrode 21. And, a decomposed component of the raw material is deposited onto a surface of the substrate “S” by contacting the plasma, which has generated at the plasma generating unit 29, with the substrate “S.”By means of the present construction, it becomes feasible to generate plasma in liquid without ever using a second electrode that serves as a substrate.
    • 在液体等离子体成膜装置中,具有容纳基材“S”的容器1和包含原料的液体“L” 用于液体内等离子体的电极2,设置在容器1中的电极2; 用于向用于液体内等离子体的电极2供电的电力装置3; 用于液体内等离子体的电极2装备有:具有放电端22的主电极21; 辅助电极26不仅面向放电端22,而且还设置在放电端22和彼此相对的衬底“S”之间; 以及等离子体产生单元29,其具有由排放端22的表面22a和辅助电极26的面向表面22a的表面26a划分的空间,并且用于通过向主电极供电的方式产生等离子体 并且,通过使在等离子体产生单元29产生的等离子体与基板“S”接触,将原料的分解成分沉积在基板“S”的表面上。借助于本构造 在不用使用作为基板的第二电极的情况下,可以在液体中产生等离子体。