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    • 1. 发明申请
    • CHARGED PARTICLE DETECTION DEVICES
    • 充电颗粒检测装置
    • US20090090866A1
    • 2009-04-09
    • US11668846
    • 2007-01-30
    • Xu ZHANGJoe WANGZhong-Wei CHEN
    • Xu ZHANGJoe WANGZhong-Wei CHEN
    • G01T1/20G01N23/00H01J3/14
    • H01J37/244H01J37/28H01J2237/2443H01J2237/24435H01J2237/2445H01J2237/24465
    • A charged particle detector consists of four independent light guide modules assembled together to form a segmented on-axis annular detector, with a center opening for allowing the primary charged particle beam to pass through. One side of the assembly facing the specimen is coated with or bonded to scintillator material as the charged particle detection surface. Each light guide module is coupled to a photomultiplier tube to allow light signals transmitted through each light guide module to be amplified and processed separately. A charged particle detector is made from a single block of light guide material processed to have a cone shaped circular cutout from one face, terminating on the opposite face to an opening to allow the primary charged particle beam to pass through. The opposite face is coated with or bonded to scintillator material as the charged particle detection surface. The outer region of the light guide block is shaped into four separate light guide output channels and each light guide output channel is coupled to a photomultiplier tube to allow light signal output from each channel to be amplified and processed separately.
    • 带电粒子检测器由四个独立的光导模块组成,组合在一起以形成分段的轴上环形探测器,其中心开口允许初级带电粒子束通过。 面向样品的组件的一侧作为带电粒子检测表面涂覆或结合到闪烁体材料。 每个光导模块耦合到光电倍增管,以允许通过每个光导模块传输的光信号被单独放大和处理。 带电粒子检测器由一块光导材料制成,被处理成具有从一个面的锥形圆形切口,终止在与开口相对的面上以允许初级带电粒子束通过。 相反的面被涂覆或与闪烁体材料结合,作为带电粒子检测表面。 导光块的外部区域被成形为四个分开的光导输出通道,并且每个光导输出通道耦合到光电倍增管,以允许来自每个通道的光信号输出被单独放大和处理。