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    • 3. 发明授权
    • Shape-intrinsic watermarks for 3-D solids
    • 3-D固体的形状固有水印
    • US06956568B2
    • 2005-10-18
    • US10042636
    • 2002-01-09
    • Takashi MaekawaNicholas M. PatrikalakisFranz-Erich WolterHiroshi Masuda
    • Takashi MaekawaNicholas M. PatrikalakisFranz-Erich WolterHiroshi Masuda
    • G06T1/00G06T17/00
    • G06T1/0064G06T2201/0051
    • Umbilics of two surfaces are compared and it is determined from this comparison whether the suspect surface is a copy of the original surface based on the comparison. Comparing umbilics includes determining whether locations of the umbilics of the suspect surface match within a specified margin umbilics of the original surface, and determining whether pattern types of umbilics of the suspect surface match pattern types of corresponding umbilics of the original surface. A “weak” test may be performed, in which corresponding points on the two surfaces are compared, wherein the comparison of umbilics is performed if corresponding points of the two surfaces are located within a specified margin of each other. The points may be gridpoints on wireframes, which in turn may be based on lines of curvature of the surfaces. Comparing umbilics is performed if it is determined that each surface has at least one umbilic. Further still, an “intermediate” test may be performed which includes, for each surface, computing the principal directions of lines of curvature at each grid point. The computed directions of lines of curvature for corresponding gridpoints on the surfaces are compared. A determination is made as to whether the suspect surface is a copy of the original surface, based on the comparison.
    • 比较两个表面的脐部,并根据该比较确定可疑表面是否是基于比较的原始表面的副本。 比较脐带包括确定可疑表面的脐带的位置是否在原始表面的指定边缘脐带内匹配,以及确定可疑表面的脐带的图案类型是否匹配原始表面的相应脐带的图案类型。 可以执行“弱”测试,其中比较两个表面上的对应点,其中如果两个表面的对应点位于彼此的指定边距内,则执行脐带的比较。 点可以是线框上的网格点,其又可以基于曲面的曲线。 如果确定每个表面具有至少一个脐带,则进行比较脐带。 此外,可以执行“中间”测试,其包括对于每个表面,计算每个网格点处的曲率线的主方向。 比较表面上相应网格点的计算曲率线方向。 基于比较,确定可疑表面是否是原始表面的副本。
    • 9. 发明授权
    • Back to front alignment of elements on a substrate
    • 在衬底上的元件的背对前排列
    • US5361132A
    • 1994-11-01
    • US980679
    • 1992-11-24
    • Michael W. Farn
    • Michael W. Farn
    • G03F9/00H01L21/68G01B9/02
    • G03F9/7084H01L21/682
    • A technique for aligning corresponding features on opposite surfaces of a transparent substrate. In one embodiment thereof a laser beam is applied to a pair of grating elements on one surface of the substrate to produce an interference fringe pattern on the opposite surface, the centerline between the grating elements being at a known distance from the features on the one surface and corresponding to the center bright space of the fringe pattern. A reference mark on a movable mask, which reference mark is at the same known distance from feature locations on the mask, is aligned with the center bright space of the interference fringe pattern and the feature locations on the mask can then be used to position features on the opposite surface which are aligned with the features on the one surface of the substrate.
    • 用于对准透明基板的相对表面上的相应特征的技术。 在其一个实施例中,激光束被施加到衬底的一个表面上的一对光栅元件,以在相对表面上产生干涉条纹图案,光栅元件之间的中心线距离一个表面上的特征已知距离 并对应于边缘图案的中心明亮空间。 可移动掩模上的参考标记与掩模上的特征位置相同的已知距离与干涉条纹图案的中心明亮空间对准,然后掩模上的特征位置可用于定位特征 在与衬底的一个表面上的特征对准的相对表面上。