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    • 1. 发明申请
    • SELF ALIGNED AND SCALABLE NANOGAP POST PROCESSING FOR DNA SEQUENCING
    • 自定义和可扩展的NANOGAP后处理用于DNA测序
    • US20170074819A1
    • 2017-03-16
    • US15122111
    • 2014-03-28
    • Intel Corporation
    • Oguz H. ELIBOL
    • G01N27/327G01N33/487C23C18/16C12Q1/68C23C14/34C23C16/455
    • G01N27/3278C12Q1/6869C23C14/34C23C16/45525C23C18/1633G01N33/48721
    • An apparatus including a circuit substrate including a contact in a metal layer; and a transducer including a first electrode deposited on and coupled to a sidewall of the contact and a second electrode coupled to a conductor through which voltage can be applied, wherein the second electrode includes a profile aligned to the sidewall of the contact and separated from the first electrode by a gap. A method including forming a transducer adjacent a contact in a metal layer on a substrate, the transducer including a first electrode disposed on a sidewall of the contact and a second electrode coupled to a conductor through which voltage can be applied, wherein the second electrode includes a profile aligned to the sidewall of the contact and separated from the first electrode by a gap.
    • 一种包括在金属层中包括接触的电路基板的设备; 以及换能器,其包括沉积在所述接触件的侧壁上并且耦合到所述接触件的侧壁的第一电极和耦合到可以施加电压的导体的第二电极,其中所述第二电极包括与所述接触件的侧壁对准的轮廓并与所述接触件分离 第一电极间隙。 一种方法,包括在衬底上的金属层中形成与接触件相邻的换能器,所述换能器包括设置在所述触点的侧壁上的第一电极和耦合到可以施加电压的导体的第二电极,其中所述第二电极包括 该轮廓与该接触件的侧壁对齐并且与该第一电极分开一间隙。