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1. 发明授权

US12063745B2 Method for processing substrates, in particular wafers, masks or flat panel displays, with a semi-conductor industry machine 有权
公开(公告)号：US12063745B2
公开(公告)日：2024-08-13
申请号：US17306570
申请日：2021-05-03
申请人： Integrated Dynamics Engineering GmbH
发明人： Andreas Birkner
IPC分类号： H05K13/08 , G06N3/08 , H05K13/00
CPC分类号： H05K13/0818 , G06N3/08 , H05K13/0015 , H05K13/0812
摘要： A method for processing substrates, in particular wafers, masks or flat panel displays, with a semi-conductor industry machine, wherein a computer-supported process is used to determine the presence and/or position and/or orientation of the substrate. Further, a system designed to execute the method. The computer-supported process includes an artificial neural network.

2. 发明公开

US20230395417A1 DEVICE AND METHOD FOR IMAGING AN OBJECT IN AT LEAST TWO VIEWS 审中-公开
公开(公告)号：US20230395417A1
公开(公告)日：2023-12-07
申请号：US18032665
申请日：2021-10-19
申请人： Integrated Dynamics Engineering GMBH
发明人： Andreas Birkner , Ralf Langenbach
IPC分类号： H01L21/68 , H01L21/67 , H04N23/55
CPC分类号： H01L21/681 , H01L21/67259 , H04N23/55 , H01L21/68707
摘要： The present disclosure relates to a device and to a method for imaging an object in at least two views. The device and the method can be used, for example, for teaching-in or monitoring a robot or for monitoring handling systems or, more generally, with devices which require imaging of an object for an analysis or a monitoring process. The device allows an object to be imaged in at least two different views simultaneously, comprising at least one imaging optical element and at least one reflective element, wherein the reflective element is at least partly arranged within object space of the imaging optical element, optical axis of the imaging optical element being associated with first view of the object, and wherein the reflective element is operable to image a second view of the object, which is different from the first view.

3. 发明申请

US20220186808A1 VIBRATION ISOLATION SYSTEM WITH ONE OR MORE MAGNETIC ACTUATORS 有权
公开(公告)号：US20220186808A1
公开(公告)日：2022-06-16
申请号：US17440047
申请日：2020-03-18
申请人： Integrated Dynamics Engineering GmbH
发明人： Han HARTGERS , Arndt EVERS , Simon SCHADT
IPC分类号： F16F15/03 , F16M5/00 , H01J37/22 , H02K11/01
摘要： An active vibration isolation system with a magnetic actuator where the magnetic actuator includes a coil carrier with at least one coil which engages in a magnetic actuator without touching it so that it takes the form of a linear motor. The magnetic actuator has a magnetic shield with an opening through which the coil carrier extends into the magnet carrier.

4. 发明授权

US10941833B2 Vibration isolator with a vertically effective pneumatic spring 有权
公开(公告)号：US10941833B2
公开(公告)日：2021-03-09
申请号：US15333641
申请日：2016-10-25
申请人： Integrated Dynamics Engineering GmbH
发明人： Arndt Evers , Frank Hofmann
IPC分类号： F16F15/023 , G03F7/20 , F16F15/03 , F16F15/027 , F16F9/02 , F16F15/02
摘要： A vibration isolator with a pneumatic spring that is effective only in vertical direction, the pneumatic spring including a working space in which a vertically effective actuator is disposed.

5. 发明授权

US09869364B2 Vibration isolator with pneumatic spring 有权
公开(公告)号：US09869364B2
公开(公告)日：2018-01-16
申请号：US14829880
申请日：2015-08-19
申请人： Integrated Dynamics Engineering GmbH
发明人： Arndt Evers
IPC分类号： F16F1/18 , F16F15/023 , F16F13/00 , F16F15/027 , F16F15/04 , F16M1/00
CPC分类号： F16F15/0232 , F16F13/002 , F16F15/0275 , F16F15/046
摘要： The invention relates to a vibration isolator with a pneumatic spring. The vibration isolator comprises a leaf spring assembly for vertical isolation and a flexible rod or a buckling pendulum for horizontal isolation.

6. 发明授权

US08894052B2 Active oscillation isolation system by means of a hysteresis-free pneumatic bearing 有权
标题翻译：主动振荡隔离系统采用无滞后气动轴承
公开(公告)号：US08894052B2
公开(公告)日：2014-11-25
申请号：US11839383
申请日：2007-08-15
申请人： Peter Heiland
发明人： Peter Heiland
IPC分类号： F16F15/00 , F16F15/027 , G03F7/20
CPC分类号： F16F15/0275 , F16F15/002 , G03F7/709
摘要： Method and arrangement for oscillation isolation by means of an air bearing. The electropneumatic valves (4) for the compressed-air supply to the air bearing are subjected to a dither signal. This causes additional vibration of the mass 1 to be isolated. A compensation signal transmitter (12) ensures that additional vibration of the mass (1) is suppressed, by controlling actuators (10). Overall, hysteresis effects are avoided in the control of the compressed-air flow.
摘要翻译：通过空气轴承进行振动隔离的方法和装置。用于向空气轴承供应的压缩空气的电动气动阀（4）经受抖动信号。这导致质量块1的额外振动被隔离。补偿信号发送器（12）通过控制致动器（10）来确保质量（1）的附加振动被抑制。总之，在压缩空气流的控制中避免了滞后效应。

7. 发明申请

US20140209779A1 Stationary vibration isolation system and method for controlling a vibration isolation system 有权
标题翻译：固定式隔振系统及控制隔振系统的方法
公开(公告)号：US20140209779A1
公开(公告)日：2014-07-31
申请号：US14165091
申请日：2014-01-27
申请人： Integrated Dynamics Engineering GmbH
发明人： Peter A. Kropp , Peter Kluth
IPC分类号： F16F15/00 , F16F9/53 , F16F15/02
CPC分类号： F16F15/005 , F16F9/532 , F16F9/535 , F16F15/022 , F16F15/027 , F16F2224/041 , F16F2224/043 , F16F2224/045
摘要： The invention relates to a stationary vibration isolation system and to a method for controlling such a system which comprises a damper effective in a horizontal direction which includes a fluid of variable viscosity.
摘要翻译：本发明涉及一种固定式隔振系统和一种控制这种系统的方法，该系统包括在水平方向上有效的阻尼器，其包括可变粘度的流体。

8. 发明授权

US08598869B2 Magnetic field compensation 有权
标题翻译：磁场补偿
公开(公告)号：US08598869B2
公开(公告)日：2013-12-03
申请号：US12792862
申请日：2010-06-03
申请人： Steffen Wallauer
发明人： Steffen Wallauer
IPC分类号： G01N27/72 , G01N27/90
CPC分类号： G01N27/9053 , G01R33/0029 , G01R33/0206 , G01R33/025
摘要： A device for compensating magnetic fields, comprising a single magneto resistive sensor to which at least two parallel measuring amplifier loops are connected in series, one being an analogue broadband controller loop and the other being a digital broadband controller loop.
摘要翻译：一种用于补偿磁场的装置，包括单个磁阻传感器，至少两个并联的测量放大器回路串联连接，一个是模拟宽带控制器回路，另一个是数字宽带控制器回路。

9. 发明申请

US20130009056A1 Integrable magnetic field compensation for use in scanning and transmission electron microscopes 有权
公开(公告)号：US20130009056A1
公开(公告)日：2013-01-10
申请号：US13540783
申请日：2012-07-03
申请人： Peter A. Kropp
发明人： Peter A. Kropp
IPC分类号： H01J37/04 , G21K5/04
CPC分类号： H01J37/1475 , H01J37/09 , H01J37/1471 , H01J37/26
摘要： An arrangement and a method for imaging, examining and processing a sample using electrons. The arrangement comprises an electron microscope for providing electrons, a chamber with a sample holder on which a sample is positionable such that it can be imaged, examined and processed using the electrons. A system for magnetic field compensation in at least one spatial direction, including a compensation coil, wherein a wall of the chamber has an accommodation area, in sections thereof, for a portion of the compensation coil. Generally, only the chamber in which the sample is arranged is considered as a compensation volume. It suffice to reduce the compensation volume to the sensitive region of the electron microscope, since it is in the chamber, shortly following a final focusing and filtering, where the electron beam is most sensitive in terms of image quality when subjected to external electromagnetic interference.

10. 发明授权

US08073571B2 Method and device for frequency-response correction in vibration isolation systems 有权
标题翻译：振动隔离系统中频率响应校正的方法和装置
公开(公告)号：US08073571B2
公开(公告)日：2011-12-06
申请号：US12108974
申请日：2008-04-24
申请人： Peter Heiland
发明人： Peter Heiland
IPC分类号： G05B21/00 , G05B19/18 , G01F17/00 , G01H1/00
CPC分类号： F16F15/02
摘要： To achieve improved frequency-response correction of a vibration-signal transmitter in a vibration isolation system, the invention proposes a method in which an analog sensor signal representing vibrations is generated through the use of a vibration-signal transmitter, this sensor signal is amplified for correcting frequency-dependent sensitivity of the vibration-signal transmitter, an actuator control signal is generated by processing the amplified sensor signal, and an actuator is controlled with the actuator control signal for counteracting the vibrations, wherein the amplification of the sensor signal includes first amplification through the use of an analog amplification stage and second amplification through the use of a digital amplification stage. The invention further proposes a correction device and also a vibration isolation system for carrying out the method.
摘要翻译：为了在振动隔离系统中实现振动信号发射机的改进的频率响应校正，本发明提出了一种通过使用振动信号发射器产生表示振动的模拟传感器信号的方法，该传感器信号被放大校正振动信号发射器的频率相关灵敏度，通过处理放大的传感器信号来产生致动器控制信号，并且用致动器控制信号控制致动器以抵消振动，其中传感器信号的放大包括第一放大通过使用模拟放大级和通过使用数字放大级的第二次放大。本发明还提出了一种校正装置以及用于执行该方法的隔振系统。

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