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1. 发明授权

US06759255B2 Method and system for detecting metal contamination on a semiconductor wafer 失效
标题翻译：用于检测半导体晶片上的金属污染的方法和系统
公开(公告)号：US06759255B2
公开(公告)日：2004-07-06
申请号：US09854177
申请日：2001-05-10
申请人： Zhiwei Xu , Arun Srivatsa , Amin Samsavar , Thomas G Miller , Greg Horner , Steven Weinzierl
发明人： Zhiwei Xu , Arun Srivatsa , Amin Samsavar , Thomas G Miller , Greg Horner , Steven Weinzierl
IPC分类号： H01I2166
CPC分类号： G01N27/60 , G01N27/002 , H01L22/12 , H01L2924/0002 , H01L2924/00
摘要： A method to detect metal contamination on a semiconductor topography is provided. The semiconductor topography may include a semiconductor substrate or a dielectric material disposed upon a semiconductor substrate. The metal contamination may be driven into the semiconductor substrate by an annealing process. Alternatively, the annealing process may drive the metal contamination into the dielectric material. Subsequent to the annealing process, a charge may be deposited upon an upper surface of the semiconductor topography. An electrical property of the semiconductor topography may be measured. A characteristic of at least one type of metal contamination may be determined as a function of the electrical property of the semiconductor topography. The method may be used to determine a characteristic of one or more types of metal contamination on a portion of the semiconductor topography or the entire semiconductor topography. A system configured to detect metal contamination on a semiconductor topography is also provided. An oven may be incorporated into the system and may be used to anneal the semiconductor topography. The system may also include a device that may be configured to deposit a charge on an upper surface of the semiconductor topography. A sensor may also be included in the system. The sensor may use a non-contact work function technique to measure an electrical property of the semiconductor topography.
摘要翻译：提供了一种在半导体形貌上检测金属污染的方法。半导体形貌可以包括设置在半导体衬底上的半导体衬底或电介质材料。金属污染物可以通过退火工艺被驱入半导体衬底。或者，退火过程可以将金属污染物驱动到电介质材料中。在退火处理之后，可以在半导体形貌的上表面上沉积电荷。可以测量半导体形貌的电性质。至少一种类型的金属污染的特征可以被确定为半导体形貌的电性能的函数。该方法可以用于确定半导体形貌的一部分或整个半导体形貌上的一种或多种类型的金属污染的特性。还提供了一种用于检测半导体形貌上的金属污染的系统。烘箱可以并入系统中，并且可以用于退火半导体形貌。该系统还可以包括可被配置为在半导体形貌的上表面上沉积电荷的装置。传感器也可以包括在系统中。传感器可以使用非接触功函数技术来测量半导体形貌的电性质。

2. 发明申请

US20090000589A1 Recreational vehicle engine design 审中-公开
标题翻译：休闲汽车发动机设计
公开(公告)号：US20090000589A1
公开(公告)日：2009-01-01
申请号：US11823480
申请日：2007-06-27
申请人： Steven Weinzierl , Michael J. Fuchs
发明人： Steven Weinzierl , Michael J. Fuchs
IPC分类号： F02B75/06
CPC分类号： F02B75/06 , F16F15/145 , F16F15/283
摘要： A device for damping torsional vibrations in internal combustion piston engines having three or fewer cylinders is provided. The device includes a crankshaft having at least one detachable counterweight. The counterweight is a shiftable, torsional pendulum de-tuner. The pendulum de-tuner is configured to balance at least one order of acceleration of the crankshaft.
摘要翻译：提供了具有三个或更少气缸的内燃活塞式发动机的扭转振动装置。该装置包括具有至少一个可拆卸配重的曲轴。配重是一个可移动的扭转摆锤去调谐器。摆式去调谐器被配置成平衡曲轴加速度的至少一个顺序。

3. 发明申请

US20080022963A1 Engine with hybrid crankcase 有权
标题翻译：带混合曲轴箱的发动机
公开(公告)号：US20080022963A1
公开(公告)日：2008-01-31
申请号：US11879011
申请日：2007-07-13
申请人： Steven Weinzierl , Michael Fuchs
发明人： Steven Weinzierl , Michael Fuchs
IPC分类号： F02F7/00
CPC分类号： F02F7/0021 , F02F7/0085
摘要： An engine with a hybrid crankcase includes the crankcase being a composite construction having an exoskeleton formed of a non-ferrite material having no defined endurance limit as a material, the non-ferrite exoskeleton encapsulating a load bearing skeleton formed of a ferrite material, the ferrite material having a well defined endurance limit, whereby the skeleton acts to carry the highest engine loadings. A method of forming such an engine is further included.
摘要翻译：具有混合曲轴箱的发动机包括曲轴箱，该曲轴箱是具有由不具有限定的耐久极限的非铁氧体材料形成的外骨骼的复合结构材料，所述非铁氧体外骨骼包封由铁氧体材料形成的承载骨架，所述铁氧体材料具有明确的耐久性极限，从而骨架用于承载最高的发动机负荷。进一步包括形成这种发动机的方法。

4. 发明申请

US20070028867A1 DIESEL AIRCRAFT ENGINE 有权
标题翻译：柴油机发动机
公开(公告)号：US20070028867A1
公开(公告)日：2007-02-08
申请号：US11072624
申请日：2005-03-04
申请人： Michael Fuchs , Steven Weinzierl
发明人： Michael Fuchs , Steven Weinzierl
IPC分类号： F02B75/22 , F02B75/06
CPC分类号： F02B75/24 , F02B61/04 , F02B75/246 , Y10T74/2183
摘要： The present invention is an engine, including two banks of cylinders in a flat, opposed cylinder arrangement and a crankshaft having a plurality of paired throws, the two throws of each respective pair of throws being disposed adjacent to each other and coplanar with respect to each other.
摘要翻译：本发明是一种发动机，其包括在平坦的相对的气缸装置中的两组气缸和具有多个成对的投掷的曲轴，每个相应的一对投针的两个投影相对于彼此相邻并且共面设置其他。

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