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1. 发明授权

US08663754B2 Pulsed laser micro-deposition pattern formation 有权
标题翻译：脉冲激光微沉积图案形成
公开(公告)号：US08663754B2
公开(公告)日：2014-03-04
申请号：US12400438
申请日：2009-03-09
申请人： Bing Liu , Zhendong Hu , Makoto Murakami , Jingzhou Xu , Yong Che
发明人： Bing Liu , Zhendong Hu , Makoto Murakami , Jingzhou Xu , Yong Che
IPC分类号： C23C14/28 , C08J7/04 , B05D5/06 , B05D5/12 , B23K26/00
CPC分类号： C23C20/04 , B41M5/262 , B41M5/267 , B44F1/10 , C23C14/28 , C23C14/3435 , G02B26/101 , Y10T428/24802 , Y10T428/24917
摘要： A method of forming patterns on transparent substrates using a pulsed laser is disclosed. Various embodiments include an ultrashort pulsed laser, a substrate that is transparent to the laser wavelength, and a target plate. The laser beam is guided through the transparent substrate and focused on the target surface. The target material is ablated by the laser and is deposited on the opposite substrate surface. A pattern, for example a gray scale image, is formed by scanning the laser beam relative to the target. Variations of the laser beam scan speed and scan line density control the material deposition and change the optical properties of the deposited patterns, creating a visual effect of gray scale. In some embodiments patterns may be formed on a portion of a microelectronic device during a fabrication process. In some embodiments high repetition rate picoseconds and nanosecond sources are configured to produce the patterns.
摘要翻译：公开了使用脉冲激光在透明基板上形成图案的方法。各种实施例包括超短脉冲激光器，对激光波长透明的衬底和靶板。激光束被引导通过透明基板并聚焦在目标表面上。目标材料被激光烧蚀并沉积在相对的基板表面上。通过相对于目标扫描激光束来形成例如灰度图像的图案。激光束扫描速度和扫描线密度的变化控制材料沉积并改变沉积图案的光学性质，产生灰度的视觉效果。在一些实施例中，可以在制造过程期间在微电子器件的一部分上形成图案。在一些实施例中，高重复率皮秒和纳秒源被配置为产生图案。

2. 发明授权

US08609205B2 Method for depositing crystalline titania nanoparticles and films 有权
标题翻译：沉积结晶二氧化钛纳米粒子和薄膜的方法
公开(公告)号：US08609205B2
公开(公告)日：2013-12-17
申请号：US12497205
申请日：2009-07-02
申请人： Zhendong Hu , Yong Che , Bing Liu
发明人： Zhendong Hu , Yong Che , Bing Liu
IPC分类号： H05B7/00 , C23C14/14
CPC分类号： C30B23/08 , C23C14/083 , C23C14/28 , C30B29/16
摘要： A one-step and room-temperature process for depositing nanoparticles or nanocomposite (nanoparticle-assembled) films of metal oxides such as crystalline titanium dioxide (TiO2) onto a substrate surface using ultrafast pulsed laser ablation of Titania or metal titanium target. The system includes a pulsed laser with a pulse duration ranging from a few femtoseconds to a few tens of picoseconds, an optical setup for processing the laser beam such that the beam is focused onto the target surface with an appropriate average energy density and an appropriate energy density distribution, and a vacuum chamber in which the target and the substrate are installed and background gases and their pressures are appropriately adjusted.
摘要翻译：使用二氧化钛或金属钛靶的超快速脉冲激光烧蚀将金属氧化物如结晶二氧化钛（TiO 2）的纳米颗粒或纳米复合材料（纳米颗粒组装的）膜沉积到基底表面上的一步和室温方法。该系统包括脉冲激光，其脉冲持续时间范围从几飞秒到几十皮秒，用于处理激光束的光学设置，使得光束以适当的平均能量密度和适当的能量聚焦到目标表面上密度分布，以及真空室，其中安装了目标物和基质，背景气体及其压力被适当调节。

3. 发明授权

US07608308B2 P-type semiconductor zinc oxide films process for preparation thereof, and pulsed laser deposition method using transparent substrates 失效
标题翻译： P型半导体氧化锌膜的制造方法以及使用透明基板的脉冲激光沉积法
公开(公告)号：US07608308B2
公开(公告)日：2009-10-27
申请号：US11405020
申请日：2006-04-17
申请人： Bing Liu , Zhendong Hu , Yong Che , Yuzuru Uehara
发明人： Bing Liu , Zhendong Hu , Yong Che , Yuzuru Uehara
IPC分类号： C23C14/30 , H05B7/00 , C23C8/00
CPC分类号： C23C14/22 , C23C14/083 , C23C14/28
摘要： A p-type semiconductor zinc oxide (ZnO) film and a process for preparing the film are disclosed. The film is co-doped with phosphorous (P) and lithium (Li). A pulsed laser deposition scheme is described for use in growing the film. Further described is a process of pulsed laser deposition using transparent substrates which includes a pulsed laser source, a substrate that is transparent at the wavelength of the pulsed laser, and a multi-target system. The optical path of the pulsed laser is arranged in such a way that the pulsed laser is incident from the back of the substrate, passes through the substrate, and then focuses on the target. By translating the substrate towards the target, this geometric arrangement enables deposition of small features utilizing the root of the ablation plume, which can exist in a one-dimensional transition stage along the target surface normal, before the angular width of the plume is broadened by three-dimensional adiabatic expansion. This can provide small deposition feature sizes, which can be similar in size to the laser focal spot, and provides a novel method for direct deposition of patterned materials.
摘要翻译：公开了一种p型半导体氧化锌（ZnO）膜及其制备方法。该膜与磷（P）和锂（Li）共掺杂。描述脉冲激光沉积方案用于生长膜。进一步描述的是使用透明衬底的脉冲激光沉积过程，其包括脉冲激光源，在脉冲激光的波长处是透明的衬底和多目标系统。脉冲激光器的光路布置成使得脉冲激光从衬底的背面入射，穿过衬底，然后聚焦在靶上。通过将基板朝向目标平移，这种几何布置可以在羽流的角宽度扩大之前利用消融羽流的根部沉积小特征，其可以沿着目标表面法线存在于一维过渡阶段中三维绝热膨胀。这可以提供小的沉积特征尺寸，其尺寸可以与激光焦点类似，并且提供用于直接沉积图案化材料的新颖方法。

4. 发明申请

US20070243328A1 P-type semiconductor zinc oxide films process for preparation thereof, and pulsed laser deposition method using transparent substrates 失效
标题翻译： P型半导体氧化锌膜的制造方法以及使用透明基板的脉冲激光沉积法
公开(公告)号：US20070243328A1
公开(公告)日：2007-10-18
申请号：US11405020
申请日：2006-04-17
申请人： Bing Liu , Zhendong Hu , Yong Che , Yuzuru Uehara
发明人： Bing Liu , Zhendong Hu , Yong Che , Yuzuru Uehara
IPC分类号： C23C16/00 , C23C14/30
CPC分类号： C23C14/22 , C23C14/083 , C23C14/28
摘要： A p-type semiconductor zinc oxide (ZnO) film and a process for preparing the film are disclosed. The film is co-doped with phosphorous (P) and lithium (Li). A pulsed laser deposition scheme is described for use in growing the film. Further described is a process of pulsed laser deposition using transparent substrates which includes a pulsed laser source, a substrate that is transparent at the wavelength of the pulsed laser, and a multi-target system. The optical path of the pulsed laser is arranged in such a way that the pulsed laser is incident from the back of the substrate, passes through the substrate, and then focuses on the target. By translating the substrate towards the target, this geometric arrangement enables deposition of small features utilizing the root of the ablation plume, which can exist in a one-dimensional transition stage along the target surface normal, before the angular width of the plume is broadened by three-dimensional adiabatic expansion. This can provide small deposition feature sizes, which can be similar in size to the laser focal spot, and provides a novel method for direct deposition of patterned materials.
摘要翻译：公开了一种p型半导体氧化锌（ZnO）膜及其制备方法。该膜与磷（P）和锂（Li）共掺杂。描述脉冲激光沉积方案用于生长膜。进一步描述的是使用透明衬底的脉冲激光沉积过程，其包括脉冲激光源，在脉冲激光的波长处是透明的衬底和多目标系统。脉冲激光器的光路布置成使得脉冲激光从衬底的背面入射，穿过衬底，然后聚焦在靶上。通过将基板朝向目标平移，这种几何布置可以在羽流的角宽度扩大之前利用消融羽流的根部沉积小特征，其可以沿着目标表面法线存在于一维过渡阶段中三维绝热膨胀。这可以提供小的沉积特征尺寸，其尺寸可以与激光焦点类似，并且提供用于直接沉积图案化材料的新颖方法。

5. 发明授权

US07767272B2 Method of producing compound nanorods and thin films 有权
标题翻译：复合纳米棒和薄膜的制备方法
公开(公告)号：US07767272B2
公开(公告)日：2010-08-03
申请号：US11754031
申请日：2007-05-25
申请人： Bing Liu , Zhendong Hu , Yong Che
发明人： Bing Liu , Zhendong Hu , Yong Che
IPC分类号： B05D3/00 , C08J7/18 , G21H5/00
CPC分类号： C23C14/086 , C23C14/28 , C30B23/00 , C30B29/16 , C30B29/60 , Y10T428/25
摘要： A method of producing compound nanorods and thin films under a controlled growth mode is described. The method involves ablating compound targets using an ultrafast pulsed laser and depositing the ablated materials onto a substrate. When producing compound nanorods, external catalysts such as pre-deposited metal nanoparticles are not involved. Instead, at the beginning of deposition, simply by varying the fluence at the focal spot on the target, a self-formed seed layer can be introduced for nanorods growth. This provides a simple method of producing high purity nanorods and controlling the growth mode. Three growth modes are covered by the present invention, including nanorod growth, thin film growth, and nano-porous film growth.
摘要翻译：描述了在受控生长模式下制备复合纳米棒和薄膜的方法。该方法包括使用超快速脉冲激光烧蚀化合物靶，并将消融材料沉积在基底上。当制备复合纳米棒时，不涉及外部催化剂如预沉积的金属纳米颗粒。相反，在沉积开始时，简单地通过改变目标上焦点处的注量，可以引入自形晶种层用于纳米棒生长。这提供了生产高纯度纳米棒并控制生长模式的简单方法。本发明涵盖三种生长方式，包括纳米棒生长，薄膜生长和纳米多孔膜生长。

6. 发明申请

US20080006524A1 Method for producing and depositing nanoparticles 审中-公开
标题翻译：生产和沉积纳米颗粒的方法
公开(公告)号：US20080006524A1
公开(公告)日：2008-01-10
申请号：US11712924
申请日：2007-03-02
申请人： Bing Liu , Zhendong Hu , Yong Che
发明人： Bing Liu , Zhendong Hu , Yong Che
IPC分类号： C23C14/00
CPC分类号： C23C14/28 , B22F9/12 , B22F2998/00 , B22F2999/00 , C01G53/04 , C01P2004/04 , C01P2004/51 , B22F1/0018 , B22F2202/11
摘要： The present invention provides a one-step process for producing and depositing size-selected nanoparticles onto a substrate surface using ultrafast pulsed laser ablation of solid target materials. The system includes a pulsed laser with a pulse duration ranging from a few femtoseconds to a few tens of picoseconds, an optical setup for processing the laser beam such that the beam is focused onto the target surface with an appropriate average energy density and an appropriate energy density distribution, and a vacuum chamber in which the target and the substrate are installed and the background gases and their pressures are appropriately adjusted.
摘要翻译：本发明提供一种用于使用固体靶材料的超快脉冲激光烧蚀来将大小选定的纳米颗粒生产并沉积到衬底表面上的一步法。该系统包括脉冲激光，其脉冲持续时间范围从几飞秒到几十皮秒，用于处理激光束的光学设置，使得光束以适当的平均能量密度和适当的能量聚焦到目标表面上密度分布，以及真空室，其中安装了靶和基底，并适当地调节背景气体及其压力。

7. 发明申请

US20100227133A1 PULSED LASER MICRO-DEPOSITION PATTERN FORMATION 有权
标题翻译：脉冲激光微沉积图形成
公开(公告)号：US20100227133A1
公开(公告)日：2010-09-09
申请号：US12400438
申请日：2009-03-09
申请人： Bing Liu , Zhendong Hu , Makoto Murakami , Jingzhou Xu , Yong Che
发明人： Bing Liu , Zhendong Hu , Makoto Murakami , Jingzhou Xu , Yong Che
IPC分类号： B32B3/00 , C23C14/34 , C23C14/00
CPC分类号： C23C20/04 , B41M5/262 , B41M5/267 , B44F1/10 , C23C14/28 , C23C14/3435 , G02B26/101 , Y10T428/24802 , Y10T428/24917
摘要： A method of forming patterns on transparent substrates using a pulsed laser is disclosed. Various embodiments include an ultrashort pulsed laser, a substrate that is transparent to the laser wavelength, and a target plate. The laser beam is guided through the transparent substrate and focused on the target surface. The target material is ablated by the laser and is deposited on the opposite substrate surface. A pattern, for example a gray scale image, is formed by scanning the laser beam relative to the target. Variations of the laser beam scan speed and scan line density control the material deposition and change the optical properties of the deposited patterns, creating a visual effect of gray scale. In some embodiments patterns may be formed on a portion of a microelectronic device during a fabrication process. In some embodiments high repetition rate picoseconds and nanosecond sources are configured to produce the patterns.
摘要翻译：公开了使用脉冲激光在透明基板上形成图案的方法。各种实施例包括超短脉冲激光器，对激光波长透明的衬底和靶板。激光束被引导通过透明基板并聚焦在目标表面上。目标材料被激光烧蚀并沉积在相对的基板表面上。通过相对于目标扫描激光束来形成例如灰度图像的图案。激光束扫描速度和扫描线密度的变化控制材料沉积并改变沉积图案的光学性质，产生灰度的视觉效果。在一些实施例中，可以在制造过程期间在微电子器件的一部分上形成图案。在一些实施例中，高重复率皮秒和纳秒源被配置为产生图案。

8. 发明授权

US08246714B2 Production of metal and metal-alloy nanoparticles with high repetition rate ultrafast pulsed laser ablation in liquids 有权
标题翻译：在液体中生产金属和金属合金纳米粒子，具有高重复率超快脉冲激光烧蚀
公开(公告)号：US08246714B2
公开(公告)日：2012-08-21
申请号：US12320617
申请日：2009-01-30
申请人： Bing Liu , Zhendong Hu , Makoto Murakami , Yong Che
发明人： Bing Liu , Zhendong Hu , Makoto Murakami , Yong Che
IPC分类号： B22F9/02 , B22F9/04
CPC分类号： B02C19/18 , B01J13/0043 , B01J19/121 , B22F1/0022 , B22F9/04 , B22F2999/00 , B82Y30/00 , B22F2202/11
摘要： Various embodiments include a method of producing chemically pure and stably dispersed metal and metal-alloy nanoparticle colloids with ultrafast pulsed laser ablation. A method comprises irradiating a metal or metal alloy target submerged in a liquid with ultrashort laser pulses at a high repetition rate, cooling a portion of the liquid that includes an irradiated region, and collecting nanoparticles produced with the laser irradiation and liquid cooling. The method may be implemented with a high repetition rate ultrafast pulsed laser source, an optical system for focusing and moving the pulsed laser beams, a metal or metal alloy target submerged in a liquid, and a liquid circulating system to cool the laser focal volume and collect the nanoparticle products. By controlling various laser parameters, and with optional liquid flow movement, the method provides stable colloids of dispersed metal and metal-alloy nanoparticles. In various embodiments additional stabilizing chemical agents are not required.
摘要翻译：各种实施方案包括用超快速脉冲激光烧蚀制备化学纯的和稳定分散的金属和金属合金纳米颗粒胶体的方法。一种方法包括以高重复率以超短激光脉冲辐射淹没在液体中的金属或金属合金靶，冷却包括辐射区域的液体的一部分，以及收集通过激光照射和液体冷却产生的纳米颗粒。该方法可以用高重复率超快脉冲激光源，用于聚焦和移动脉冲激光束的光学系统，浸没在液体中的金属或金属合金靶和液体循环系统来实现，以冷却激光聚焦体积，收集纳米颗粒产品。通过控制各种激光参数，并具有可选的液流运动，该方法提供分散金属和金属合金纳米粒子的稳定胶体。在各种实施方案中，不需要另外的稳定化学试剂。

9. 发明申请

US20100196192A1 Production of metal and metal-alloy nanoparticles with high repetition rate ultrafast pulsed laser ablation in liquids 有权
标题翻译：在液体中生产金属和金属合金纳米粒子，具有高重复率超快脉冲激光烧蚀
公开(公告)号：US20100196192A1
公开(公告)日：2010-08-05
申请号：US12320617
申请日：2009-01-30
申请人： Bing Liu , Zhendong Hu , Makoto Murakami , Yong Che
发明人： Bing Liu , Zhendong Hu , Makoto Murakami , Yong Che
IPC分类号： C22C5/04 , B22F9/04 , B23K26/08 , C22C5/02 , C22C5/06 , C22C9/00 , B01F3/12
CPC分类号： B02C19/18 , B01J13/0043 , B01J19/121 , B22F1/0022 , B22F9/04 , B22F2999/00 , B82Y30/00 , B22F2202/11
摘要： Various embodiments include a method of producing chemically pure and stably dispersed metal and metal-alloy nanoparticle colloids with ultrafast pulsed laser ablation. A method comprises irradiating a metal or metal alloy target submerged in a liquid with ultrashort laser pulses at a high repetition rate, cooling a portion of the liquid that includes an irradiated region, and collecting nanoparticles produced with the laser irradiation and liquid cooling. The method may be implemented with a high repetition rate ultrafast pulsed laser source, an optical system for focusing and moving the pulsed laser beams, a metal or metal alloy target submerged in a liquid, and a liquid circulating system to cool the laser focal volume and collect the nanoparticle products. By controlling various laser parameters, and with optional liquid flow movement, the method provides stable colloids of dispersed metal and metal-alloy nanoparticles. In various embodiments additional stabilizing chemical agents are not required.
摘要翻译：各种实施方案包括用超快速脉冲激光烧蚀制备化学纯的和稳定分散的金属和金属合金纳米颗粒胶体的方法。一种方法包括以高重复率以超短激光脉冲辐射淹没在液体中的金属或金属合金靶，冷却包括辐射区域的液体的一部分，以及收集通过激光照射和液体冷却产生的纳米颗粒。该方法可以用高重复率超快脉冲激光源，用于聚焦和移动脉冲激光束的光学系统，浸没在液体中的金属或金属合金靶和液体循环系统来实现，以冷却激光聚焦体积，收集纳米颗粒产品。通过控制各种激光参数，并具有可选的液流运动，该方法提供分散金属和金属合金纳米粒子的稳定胶体。在各种实施方案中，不需要另外的稳定化学试剂。

10. 发明申请

US20090311513A1 METHOD FOR DEPOSITING CRYSTALLINE TITANIA NANOPARTICLES AND FILMS 有权
标题翻译：沉积钛铁氧体纳米颗粒和膜的方法
公开(公告)号：US20090311513A1
公开(公告)日：2009-12-17
申请号：US12497205
申请日：2009-07-02
申请人： Zhendong Hu , Yong Che , Bing Liu
发明人： Zhendong Hu , Yong Che , Bing Liu
IPC分类号： B32B5/16 , C23C14/28
CPC分类号： C30B23/08 , C23C14/083 , C23C14/28 , C30B29/16
摘要： A one-step and room-temperature process for depositing nanoparticles or nanocomposite (nanoparticle-assembled) films of metal oxides such as crystalline titanium dioxide (TiO2) onto a substrate surface using ultrafast pulsed laser ablation of Titania or metal titanium target. The system includes a pulsed laser with a pulse duration ranging from a few femtoseconds to a few tens of picoseconds, an optical setup for processing the laser beam such that the beam is focused onto the target surface with an appropriate average energy density and an appropriate energy density distribution, and a vacuum chamber in which the target and the substrate are installed and background gases and their pressures are appropriately adjusted.
摘要翻译：使用二氧化钛或金属钛靶的超快速脉冲激光烧蚀将金属氧化物如结晶二氧化钛（TiO 2）的纳米颗粒或纳米复合材料（纳米颗粒组装的）膜沉积到基底表面上的一步和室温方法。该系统包括脉冲激光，其脉冲持续时间范围从几飞秒到几十皮秒，用于处理激光束的光学设置，使得光束以适当的平均能量密度和适当的能量聚焦到目标表面上密度分布，以及真空室，其中安装了目标物和基质，背景气体及其压力被适当调节。

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