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1. 发明申请

US20170350787A1 THREE-DIMENSIONAL STANDARD VIBRATOR BASED ON AEROSTATIC GAS-FLOATING DECOUPLING DEVICE 有权
公开(公告)号：US20170350787A1
公开(公告)日：2017-12-07
申请号：US15535059
申请日：2015-08-18
申请人： ZHEJIANG UNIVERSITY
发明人： Wen HE , Xufei ZHANG , ShuShi JIA , Jie ZHOU
IPC分类号： G01M7/06
摘要： The three-dimensional standard vibrator based on the aerostatic gas-floating decoupling device contains a base. The base is installed with a X axis vibrator, a X axis return mechanism, a Y axis vibrator, a Y axis return mechanism, a Z axis vibrator, and a three-dimensional vibration platform. The X axis vibrator and the X axis return mechanism are both installed along X axis but separated by the three-dimensional vibration platform. The Y axis vibrator and the Y axis return mechanism are both installed along Y axis but also separated by the three-dimensional vibration platform. There are two aerostatic gas-floating plates corresponding to the vibrator and connecting to the X axis and Y axis vibrators, respectively. Two intervals used to generate gas films are formed between the two aerostatic gas-floating plates and the three-dimensional vibrator, respectively. The X axis and Y axis return mechanisms both consist of a reset spring and an aerostatic gas-floating plate corresponding to the spring. The Z axis vibrator is connected with the Z axis aerostatic gas-floating decoupling device. There are intervals used to form gas films between the Z axis aerostatic gas-floating decoupling device and the three-dimensional vibration platform. The present invention contains the advantages of high loading capacity, supporting stability and uniformity.

2. 发明申请

US20180106699A1 THREE-DIMENSIONAL STANDARD VIBRATOR BASED ON LEAF-SPRING-TYPE DECOUPLING DEVICE 审中-公开
公开(公告)号：US20180106699A1
公开(公告)日：2018-04-19
申请号：US15542639
申请日：2015-08-18
申请人： ZHEJIANG UNIVERSITY
发明人： Wen HE , Xufei ZHANG , ShuShi JIA , Jie ZHOU
IPC分类号： G01M7/06
CPC分类号： G01M7/06
摘要： The three-dimensional standard vibrator based on leaf-spring-type decoupling device contains a base set with three single-dimensional vibrators (along X, Y and Z axes, respectively) and a three-dimensional vibration platform. The X axis vibrator is connected with the three-dimensional vibration platform through X axis decoupling device, the Y axis vibrator is connected with the three-dimensional vibration platform through Y axis decoupling device, and the Z axis vibrator is connected with the three-dimensional vibration platform through Z axis decoupling device. The properties of the three-dimensional vibrator are as follow. X axis decoupling device, Y axis decoupling device and Z axis decoupling device are all comprised of supporting-spring units. Each of the supporting-spring units contains a pair of leaf springs mounted parallel with each other and the first and second connecting components mounted on the two edges of the leaf springs.

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