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    • 3. 发明授权
    • Methods for manufacturing an electrostatic actuator
    • 静电致动器的制造方法
    • US06410107B2
    • 2002-06-25
    • US09727090
    • 2000-11-30
    • Kazuhiko SatoHiroyuki MaruyamaMasahiro FujiiTadaaki HagataKoji KitaharaKeiichi Mukaiyama
    • Kazuhiko SatoHiroyuki MaruyamaMasahiro FujiiTadaaki HagataKoji KitaharaKeiichi Mukaiyama
    • B05D512
    • B41J2/1632B41J2/14314B41J2/16B41J2/1623B41J2/1626B41J2/1642B41J2/1646B41J2202/03
    • Methods for manufacturing an electrostatic actuator that comprises electrode members having opposing surfaces with a gap disposed therebetween. In an ink jet head, a bottom surface of a diaphragm may be one of the electrodes (common electrode) of an eletrostatic actuator, the diaphragm forming a wall of an ink chamber in the ink jet head that is displaced relatively by an electrostatic force. A hydrophobic film, preferably hexamethyldisilazane (HMDS), is formed on at least one of the opposing electrode surfaces to improve the durability of the electrostatic actuator so that electrostatic attraction between opposing electrode members does not decrease and the opposing electrode members do not stick together. HMDS molecules are smaller than PFDA molecules, and a uniform, variation-free hydrophobic film can therefore be formed even when the gap between opposing electrodes is narrow. Durability and film stability of a HMDS hydrophobic film are also high. An electrostatic actuator with high durability and operating stability can thus be achieved.
    • 一种制造静电致动器的方法,该静电致动器包括具有设置在其间的间隙的具有相对表面的电极构件。 在喷墨头中,隔膜的底表面可以是静电致动器的电极(公共电极)之一,隔膜形成喷墨头中相对于静电力移动的墨室的壁。 在至少一个相对电极表面上形成疏水膜,优选六甲基二硅氮烷(HMDS),以提高静电致动器的耐久性,使得相对电极部件之间的静电吸引力不会降低,并且相对的电极部件不会粘在一起。 HMDS分子小于PFDA分子,因此即使在相对电极之间的间隙窄的情况下也可形成均匀的,无变化的疏水膜。 HMDS疏水膜的耐久性和膜稳定性也很高。 因此,可以实现具有高耐久性和操作稳定性的静电致动器。