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1. 发明申请

US20130012022A1 METHOD FOR FABRICATING SILICON NANOWIRE ARRAYS 审中-公开
标题翻译：制备硅纳米阵列的方法
公开(公告)号：US20130012022A1
公开(公告)日：2013-01-10
申请号：US13343706
申请日：2012-01-04
申请人： Yung-Jr Hung , San-liang Lee , Kai-Chung Wu
发明人： Yung-Jr Hung , San-liang Lee , Kai-Chung Wu
IPC分类号： H01L21/28 , B82Y40/00
CPC分类号： H01L31/02363 , B82Y20/00 , B82Y30/00 , B82Y40/00 , H01L29/0669 , H01L31/035227 , Y02E10/50
摘要： A method for larger-area fabrication of uniform silicon nanowire arrays is disclosed. The method includes forming a metal layer with a predetermined thickness on a substrate whose surface has a silicon material by a coating process, the metal layer selected from the group consisting of Ag, Au and Pt; and performing a metal-induced chemical etching for the silicon material by using an etching solution. Accordingly, a drawback that Ag nanoparticles are utilized to perform the metal-induced chemical etching in prior art is solved.
摘要翻译：公开了一种用于大面积制造均匀硅纳米线阵列的方法。该方法包括通过涂覆工艺在表面具有硅材料的基板上形成具有预定厚度的金属层，所述金属层选自Ag，Au和Pt; 并通过使用蚀刻溶液对硅材料进行金属诱导的化学蚀刻。因此，解决了现有技术中使用Ag纳米粒子进行金属诱导化学蚀刻的缺陷。

2. 发明申请

US20120083128A1 METHOD FOR ETCHING HIGH-ASPECT-RATIO FEATURES 审中-公开
标题翻译：用于蚀刻高比特征特征的方法
公开(公告)号：US20120083128A1
公开(公告)日：2012-04-05
申请号：US13079790
申请日：2011-04-04
申请人： Yung-jr Hung , San-liang Lee
发明人： Yung-jr Hung , San-liang Lee
IPC分类号： H01L21/3065
CPC分类号： H01L21/3065
摘要： A method for etching high-aspect-ratio features is disclosed. The method is applicable in forming a nanoscale deep trench having a smooth and angle-adjustable sidewall. The method includes: forming a patterned photoresist layer on a surface of a silicon substrate for exposing a part of the silicon substrate; and supplying a process gas simultaneously containing sulfur hexafluoride (SF6) and fluorinated carbon composition into a chamber in which the substrate in positioned for carrying out a deep reactive ion etching operation to etch the part of the silicon substrate for forming the deep trench. The method forms a nanoscale deep trench with a high silicon-to-photoresist etching selectivity.
摘要翻译：公开了一种用于蚀刻高纵横比特征的方法。该方法可用于形成具有光滑和角度可调侧壁的纳米级深沟槽。该方法包括：在硅衬底的表面上形成图案化的光致抗蚀剂层，用于暴露一部分硅衬底; 以及将同时含有六氟化硫（SF 6）和氟化碳组合物的工艺气体供应到其中定位用于进行深反应离子蚀刻操作的衬底以蚀刻用于形成深沟槽的硅衬底的一部分的室中。该方法形成具有高硅到光致抗蚀剂蚀刻选择性的纳米级深沟槽。

3. 发明申请

US20100135653A1 OPTICAL NETWORK MONITORING SYSTEM AND METHOD THEREOF 审中-公开
标题翻译：光网络监控系统及其方法
公开(公告)号：US20100135653A1
公开(公告)日：2010-06-03
申请号：US12502672
申请日：2009-07-14
申请人： San-liang Lee , Chun-hung Cheng , Shuen-te Ji
发明人： San-liang Lee , Chun-hung Cheng , Shuen-te Ji
IPC分类号： H04B17/00
CPC分类号： H04B10/071 , H04B10/272
摘要： An optical network monitoring system and method thereof are proposed. An optical line terminal (OLT) transmits a first optical signal to a plurality of optical interference devices. After the first optical signal passes the optical interference devices, the optical interference devices reflect back a plurality of second optical signals corresponding to the optical interference devices respectively to the optical line terminal. The second optical signals have different optical path differences. An optical/electrical converter unit converts each of the second optical signals into an electrical signal. A spectrum analyzing unit analyzes the electrical signal to extract a frequency component of the electrical signal, thus the fiber connection status to each optical network unit in the optical network system could be obtained. Therefore, the purpose of monitoring the optical network system is achieved.
摘要翻译：提出了一种光网络监控系统及其方法。光线路终端（OLT）将第一光信号发送到多个光干扰设备。在第一光信号通过光干涉装置之后，光干涉装置将对应于光干涉装置的多个第二光信号分别反射到光线路终端。第二光信号具有不同的光程差。光/电转换器单元将每个第二光信号转换成电信号。频谱分析单元分析电信号以提取电信号的频率分量，从而可以获得光网络系统中每个光网络单元的光纤连接状态。因此，实现了光网络系统监控的目的。

4. 发明申请

US20130223841A1 TIME/WAVELENGTH-DIVISION MULTIPLEXED PASSIVE OPTICAL NETWORK (TWPON) 审中-公开
标题翻译：时间/波长多路复用被动光网络（TWPON）
公开(公告)号：US20130223841A1
公开(公告)日：2013-08-29
申请号：US13527573
申请日：2012-06-19
申请人： San-liang Lee
发明人： San-liang Lee
IPC分类号： H04J14/02 , H04J14/08
CPC分类号： H04J14/08 , H04J14/02 , H04J14/0227 , H04J14/0232 , H04J14/0235 , H04J14/0246 , H04J14/0247 , H04J14/025 , H04J14/0252 , H04J14/0265 , H04J14/0282
摘要： The present invention discloses a time/wavelength-division multiplexed passive optical network (TWPON), which has an optical splitter (21) and a waveguide grating router (WGR) (22) disposed at a remote node (RN) (20). The optical splitter (21) and the WGR (22) can be connected in a cascade or in a parallel such that the present invention can use less number of wavelengths to increase transmission capacity or increase the number of users. The TWPON of the present invention can provide TDM-PON, WDM-PON, and Hybrid PON co-existing platform with less wavelengths channel fault monitoring mechanism.
摘要翻译：本发明公开了一种时分波分复用无源光网络（TWPON），其具有设置在远程节点（RN）（20）处的光分路器（21）和波导光栅路由器（WGR）（22）。光分路器（21）和WGR（22）可以级联或并联连接，使得本发明可以使用较少数量的波长来增加传输容量或增加用户数量。本发明的TWPON可以提供具有较少波长信道故障监测机制的TDM-PON，WDM-PON和Hybrid PON共存平台。

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