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1. 发明授权

US07126100B1 System and method for sensing using adjustable modulation transfer function (MTF) 有权
标题翻译：使用可调调制传递函数（MTF）进行感测的系统和方法
公开(公告)号：US07126100B1
公开(公告)日：2006-10-24
申请号：US10850818
申请日：2004-05-21
申请人： Yung-Ho Chuang , J. Joseph Armstrong , David Lee Brown , Bin-Ming Benjamin Tsai
发明人： Yung-Ho Chuang , J. Joseph Armstrong , David Lee Brown , Bin-Ming Benjamin Tsai
IPC分类号： H01L27/00
CPC分类号： H01L27/14625 , H04N5/3559 , H04N5/357
摘要： A variable modulated transfer function (MTF) design employing a variable gate voltage source for use in inspecting specimens is disclosed. The design applies a variable gate voltage to each pixel of a sensor, wherein applying the variable gate voltage to each pixel adjusts the MTF of the pixel. MTF adjustment improves adverse effects encountered during inspection, such as aliasing and maintaining contrast.
摘要翻译：公开了一种使用可变栅极电压源的可变调制传递函数（MTF）设计，用于检查样本。该设计将可变栅极电压施加到传感器的每个像素，其中将可变栅极电压施加到每个像素来调整像素的MTF。 MTF调整改善了检查过程中遇到的不良影响，如混叠和维持对比度。

2. 发明授权

US07728968B2 Excimer laser inspection system 有权
标题翻译：准分子激光检查系统
公开(公告)号：US07728968B2
公开(公告)日：2010-06-01
申请号：US11594625
申请日：2006-11-08
申请人： Bin-Ming Benjamin Tsai , Yung-Ho Chuang , J. Joseph Armstrong , David Lee Brown
发明人： Bin-Ming Benjamin Tsai , Yung-Ho Chuang , J. Joseph Armstrong , David Lee Brown
IPC分类号： G01N21/00
CPC分类号： G02B17/0808 , G01N21/8806 , G01N21/9501 , G01N21/95607 , G01N2021/479 , G01N2021/8825 , G01N2021/95676 , G01N2201/06113 , G02B17/0856 , G02B17/0892 , G02B21/04 , G03F7/70225
摘要： A system and method for inspecting a specimen, such as a semiconductor wafer, including illuminating at least a portion of the specimen using an excimer source using at least one relatively intense wavelength from the source, detecting radiation received from the illuminated portion of the specimen, analyzing the detected radiation for potential defects present in the specimen portion.
摘要翻译：一种用于检查诸如半导体晶片的样本的系统和方法，包括使用来自所述源的至少一个相对较强的波长的准分子源照射所述样本的至少一部分，检测从所述被照射部分接收的辐射，分析检测到的辐射对于存在于样品部分中的潜在缺陷。

3. 发明授权

US07136159B2 Excimer laser inspection system 有权
标题翻译：准分子激光检查系统
公开(公告)号：US07136159B2
公开(公告)日：2006-11-14
申请号：US10096318
申请日：2002-03-12
申请人： Bin-Ming Benjamin Tsai , Yung-Ho Chuang , J. Joseph Armstrong , David Lee Brown
发明人： Bin-Ming Benjamin Tsai , Yung-Ho Chuang , J. Joseph Armstrong , David Lee Brown
IPC分类号： G01N21/00
CPC分类号： G02B17/0808 , G01N21/8806 , G01N21/9501 , G01N21/95607 , G01N2021/479 , G01N2021/8825 , G01N2021/95676 , G01N2201/06113 , G02B17/0856 , G02B17/0892 , G02B21/04 , G03F7/70225
摘要： A system and method for inspecting a specimen, such as a semiconductor wafer, including illuminating at least a portion of the specimen using an excimer source using at least one relatively intense wavelength from the source, detecting radiation received from the illuminated portion of the specimen, analyzing the detected radiation for potential defects present in the specimen portion.
摘要翻译：一种用于检查诸如半导体晶片的样本的系统和方法，包括使用来自所述源的至少一个相对较强的波长的准分子源照射所述样本的至少一部分，检测从所述被照射部分接收的辐射，分析检测到的辐射对于存在于样品部分中的潜在缺陷。

4. 发明授权

US07465913B2 System and method for sensing using adjustable modulation transfer function (MTF) with voltage variations relative to depletion depth at a pixel 有权
标题翻译：使用具有相对于像素的耗尽深度的电压变化的可调节调制传递函数（MTF）进行感测的系统和方法
公开(公告)号：US07465913B2
公开(公告)日：2008-12-16
申请号：US11500232
申请日：2006-08-04
申请人： Yung-Ho Chuang , J. Joseph Armstrong , David Lee Brown , Bin-Ming B. Tsai
发明人： Yung-Ho Chuang , J. Joseph Armstrong , David Lee Brown , Bin-Ming B. Tsai
IPC分类号： H01L31/00
CPC分类号： H01L27/14625 , H04N5/3559 , H04N5/357
摘要： A variable modulated transfer function (MTF) design employing a variable gate voltage source for use in inspecting specimens is disclosed. The design applies a variable gate voltage to each pixel of a sensor, wherein applying the variable gate voltage to each pixel adjusts the MTF of the pixel. MTF adjustment improves adverse effects encountered during inspection, such as aliasing and maintaining contrast.
摘要翻译：公开了一种使用可变栅极电压源的可变调制传递函数（MTF）设计，用于检查样本。该设计将可变栅极电压施加到传感器的每个像素，其中将可变栅极电压施加到每个像素来调整像素的MTF。 MTF调整改善了检查过程中遇到的不良影响，如混叠和维持对比度。

5. 发明授权

US07609309B2 Continuous clocking of TDI sensors 有权
标题翻译：连续计时TDI传感器
公开(公告)号：US07609309B2
公开(公告)日：2009-10-27
申请号：US10992063
申请日：2004-11-18
申请人： David Lee Brown , Yung-Ho Chuang
发明人： David Lee Brown , Yung-Ho Chuang
IPC分类号： H04N3/14 , H04N5/335
CPC分类号： H04N5/37206 , H04N5/372
摘要： A method and apparatus for propagating charge through a time division and integration (TDI) sensor is provided. The method and apparatus may be used with the TDI sensor to inspect specimens, the TDI sensor operating to advance an accumulated charge between gates of the TDI sensor. The design comprises controlling voltage waveform shapes for waveforms advancing the accumulated charge between gates in a substantially nonsquare waveform, such as a composite, sinusoidal, or other shaped waveform. Controlling voltage waveform shapes operates at different voltage phases in adjacent gates to provide a substantially de minimis net voltage.
摘要翻译：提供了一种通过时分和积分（TDI）传感器传播电荷的方法和装置。该方法和装置可以与TDI传感器一起使用，以检查样品，TDI传感器操作以提前TDI传感器的门之间的累积电荷。该设计包括控制电压波形形状，用于在基本上非正方形波形（例如复合，正弦波形或其它形状波形）中推进门之间的累积电荷的波形。控制电压波形形状在相邻门中的不同电压相位下工作，以提供基本上最小的净电压。

6. 发明授权

US07952633B2 Apparatus for continuous clocking of TDI sensors 有权
标题翻译：用于连续计时TDI传感器的装置
公开(公告)号：US07952633B2
公开(公告)日：2011-05-31
申请号：US11292754
申请日：2005-12-01
申请人： David Lee Brown , Kai Cao , Yung-Ho Chuang
发明人： David Lee Brown , Kai Cao , Yung-Ho Chuang
IPC分类号： H04N3/14 , H04N5/335 , H01L27/148 , H01L29/66
CPC分类号： H04N5/3765 , H04N5/37206
摘要： A method and apparatus for propagating charge through a sensor and implementation thereof is provided. The method and apparatus may be used to inspect specimens, the sensor operating to advance an accumulated charge between gates of the TDI sensor. The design implementation provides a set of values representing a plurality of out of phase signals, such as sinusoidal or trapezoidal signals. These out of phase signals are converted and transmitted to the sensor. The converted signals cause the sensor to transfer charges in the sensor toward an end of the sensor. Aspects such as feed through correction and correction of nonlinearities are addressed.
摘要翻译：提供了一种通过传感器传播电荷的方法和装置及其实现。该方法和装置可用于检查样品，传感器操作以提前TDI传感器的门之间的累积电荷。设计实现提供了一组表示多个异相信号的值，例如正弦或梯形信号。这些异相信号被转换并传输到传感器。转换的信号使传感器将传感器中的电荷传送到传感器的一端。解决馈线通过校正和校正非线性等方面。

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