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1. 发明申请

US20100072562A1 FUNCTIONAL ELEMENT PACKAGE AND FABRICATION METHOD THEREFOR 失效
标题翻译：功能元件包装及其制造方法
公开(公告)号：US20100072562A1
公开(公告)日：2010-03-25
申请号：US12531552
申请日：2008-03-17
申请人： Yukito Sato , Joerg Froemel
发明人： Yukito Sato , Joerg Froemel
IPC分类号： H01L29/84 , H01L21/50
CPC分类号： B81C1/00301 , B81B2207/095 , B81B2207/097 , B81B2207/098 , B81C2203/019 , H01L23/04 , H01L23/10 , H01L2224/48091 , H01L2924/01079 , H01L2924/1461 , H01L2924/3011 , H01L2924/00014 , H01L2924/00
摘要： A functional element package includes a silicon substrate with a functional element having one of a mobile portion and a sensor thereon; a seal member being bonded with the silicon substrate to form an airtightly sealed space therein, and including a step portion in its height direction; a first wiring portion being connected with the functional element and extending from the airtightly sealed space to an outside thereof; a second wiring portion being different from the first wiring portion and extending from the step portion to an upper surface of the seal member; and a bump on the second wiring portion, in which the first wiring portion is bent towards the airtightly sealed space and connected via a photoconductive member with the second wiring portion on the step portion.
摘要翻译：功能元件封装包括具有功能元件的硅衬底，功能元件具有可移动部分和传感器之一; 密封构件与硅衬底结合以在其中形成气密密封的空间，并且在其高度方向上包括台阶部分; 第一布线部分与功能元件连接并从气密密封的空间延伸到其外部; 第二布线部分，其不同于第一布线部分并且从台阶部分延伸到密封构件的上表面; 以及第二布线部分上的凸起，其中第一布线部分朝向气密密封的空间弯曲并且经由感光体与台阶部分上的第二布线部分连接。

2. 发明授权

US08164180B2 Functional element package and fabrication method therefor 失效
标题翻译：功能元件封装及其制造方法
公开(公告)号：US08164180B2
公开(公告)日：2012-04-24
申请号：US12531552
申请日：2008-03-17
申请人： Yukito Sato , Joerg Froemel
发明人： Yukito Sato , Joerg Froemel
IPC分类号： H01L29/84
CPC分类号： B81C1/00301 , B81B2207/095 , B81B2207/097 , B81B2207/098 , B81C2203/019 , H01L23/04 , H01L23/10 , H01L2224/48091 , H01L2924/01079 , H01L2924/1461 , H01L2924/3011 , H01L2924/00014 , H01L2924/00
摘要： A functional element package includes a silicon substrate with a functional element having one of a mobile portion and a sensor thereon; a seal member being bonded with the silicon substrate to form an airtightly sealed space therein, and including a step portion in its height direction; a first wiring portion being connected with the functional element and extending from the airtightly sealed space to an outside thereof; a second wiring portion being different from the first wiring portion and extending from the step portion to an upper surface of the seal member; and a bump on the second wiring portion, in which the first wiring portion is bent towards the airtightly sealed space and connected via a photoconductive member with the second wiring portion on the step portion.
摘要翻译：功能元件封装包括具有功能元件的硅衬底，功能元件具有可移动部分和传感器之一; 密封构件与硅衬底结合以在其中形成气密密封的空间，并且在其高度方向上包括台阶部分; 第一布线部分与功能元件连接并从气密密封的空间延伸到其外部; 第二布线部分，其不同于第一布线部分并且从台阶部分延伸到密封构件的上表面; 以及第二布线部分上的凸起，其中第一布线部分朝向气密密封的空间弯曲并且经由感光体与台阶部分上的第二布线部分连接。

3. 发明申请

US20080225363A1 OPTICAL DEFLECTOR AND OPTICAL DEVICE 有权
标题翻译：光学偏转器和光学器件
公开(公告)号：US20080225363A1
公开(公告)日：2008-09-18
申请号：US12048694
申请日：2008-03-14
申请人： Tetsurou SAITOH , Eiji Mochizuki , Yukito Sato , Yoshiaki Yasuda , Masahiro Akamatsu , Masanao Tani
发明人： Tetsurou SAITOH , Eiji Mochizuki , Yukito Sato , Yoshiaki Yasuda , Masahiro Akamatsu , Masanao Tani
IPC分类号： G02B26/10
CPC分类号： G02B26/0858
摘要： An optical deflector includes a plurality of piezoelectric unimorph oscillating bodies (210a to 210d) that cause a reflecting plate (1) to oscillate rotationally, centering upon a pair of flexible support units (2a and 2b). The optical deflector forms a single structure of the oscillating plates (23a to 23b), the reflecting plate (1), the flexible support units (2a and 2b), and a support body (9), by connecting one set of the terminals of the oscillating plates (23a to 23d) of the suite of piezoelectric unimorph oscillating bodies (210a to 210d) to the flexible support units (2a and 2b), and connecting the other set of terminals to the support body (9). Furthermore, the plurality of piezoelectric unimorph oscillating bodies (210a to 210d) each respectively comprise a plurality of parallel oscillating bodies (23a1 to 23a-3, 23b-1 to 23b-3, 23c-1 to 23c-3), and (23d-1 to 23d-3), and a suite of parallel actuators (28a-1 to 28a-3, 28c-1 to 28c-3, and 28d-1 to 28d-3).
摘要翻译：光学偏转器包括使得反射板（1）以一对柔性支撑单元（2a和2b）为中心旋转地摆动的多个压电单晶振荡体（210a至210d）。光学偏转器通过连接一组振动板（23a至23b），反射板（1），柔性支撑单元（2a和2b）和支撑体（9）形成单一结构将压电单晶振荡体（210a至210d）的振动板（23a至23d）的端子连接到柔性支撑单元（2a和2b），并将另一组端子连接到支撑体（9）。此外，多个压电单晶体振荡体（210a〜210d）各自分别包括多个平行的振荡体（23a，1〜23a-3,23b-1〜23b-3,23c-1〜 23c-3）和（23d-1至23d-3）以及一组平行致动器（28a-1至28a-3,28c-1至28c-3和28d- 1〜28d-3）。

4. 发明授权

US07190507B2 Deflection mirror, a deflection mirror manufacturing method, an optical writing apparatus, and an image formation apparatus 有权
标题翻译：偏转镜，偏转镜制造方法，光学写入装置和图像形成装置
公开(公告)号：US07190507B2
公开(公告)日：2007-03-13
申请号：US11082765
申请日：2005-03-18
申请人： Yukito Sato
发明人： Yukito Sato
IPC分类号： G02B26/00
CPC分类号： G02B26/0841
摘要： The present invention provides a deflection mirror including a mirror substrate having a mirror face that reflects a light, a beam, and a supporting member that supports the mirror substrate through the beam. A movable electrode is formed at a free side of the mirror substrate. A fixed electrode is operably linked through the movable electrode at a gap that is formed in the supporting member. The mirror substrate is driven by electrostatic force between the movable electrode and the fixed electrode and vibrates centering of the beam. An end of at least one of the fixed electrode and the movable electrode is smaller in the thickness direction than the other end.
摘要翻译：本发明提供了一种偏转镜，其包括具有反射光的镜面的反射镜基板，光束和通过光束支撑镜面基板的支撑部件。可动电极形成在镜基板的自由侧。固定电极通过可动电极以形成在支撑构件中的间隙可操作地连接。反射镜基板由可动电极和固定电极之间的静电力驱动，并振动光束的中心。固定电极和可动电极中的至少一个的端部的厚度方向比另一端小。

5. 发明授权

US06450618B2 Ink jet head and method of producing the same 失效
标题翻译：喷墨头及其制造方法
公开(公告)号：US06450618B2
公开(公告)日：2002-09-17
申请号：US09113638
申请日：1998-07-10
申请人： Seiichi Kato , Yukito Sato , Masayoshi Esashi
发明人： Seiichi Kato , Yukito Sato , Masayoshi Esashi
IPC分类号： B41J204
CPC分类号： B41J2/14314 , B41J2/16 , B41J2/1623 , B41J2/1628 , B41J2/1629 , B41J2/1631 , B41J2/1632 , B41J2202/03 , Y10T29/49401
摘要： An ink jet head and a method of producing the same are disclosed. Use is made of a sufficiently thick single crystal at the time of anodic bonding, so that a vibration plate is free from deformation without resorting to any special short-circuit electrode.
摘要翻译：公开了一种喷墨头及其制造方法。在阳极接合时使用足够厚的单晶，使得振动板不会变形而不需要使用任何特殊的短路电极。

6. 发明授权

US6118166A Thin-film microstructure sensor having a temperature-sensitive resistor to provide a large TCR with little variation 失效
标题翻译：具有温度敏感电阻器的薄膜微结构传感器，以提供很小变化的大TCR
公开(公告)号：US6118166A
公开(公告)日：2000-09-12
申请号：US13900
申请日：1998-01-27
申请人： Hiroyoshi Shoji , Takayuki Yamaguchi , Junichi Azumi , Yukito Sato , Morimasa Kaminishi
发明人： Hiroyoshi Shoji , Takayuki Yamaguchi , Junichi Azumi , Yukito Sato , Morimasa Kaminishi
IPC分类号： G01P5/12 , B81B7/00 , G01F1/68 , G01F1/692 , G01J5/20 , G01K7/18 , G01N27/12 , G01W1/11 , H01C7/00 , H01L27/14 , H01L23/48 , H01L23/52 , H01L29/40 , H01L29/82
CPC分类号： B81B7/0087 , G01J5/20 , G01K7/186 , H01L2224/48091
摘要： A thin-film microstructure sensor includes a substrate having an insulation layer. A thin-film platinum temperature-sensitive resistor is provided on the insulation layer of the substrate, the thin-film platinum temperature-sensitive resistor comprising a platinum layer, the platinum layer having a maximum crystal grain size above a reference grain size of 800 .ANG.. The thin-film platinum temperature-sensitive resistor is formed by a sputtering process to provide a temperature coefficient of resistance TCR above a reference TCR level of 3200 ppm.
摘要翻译：薄膜微结构传感器包括具有绝缘层的基板。薄膜铂温敏电阻器设置在基板的绝缘层上，薄膜铂温敏电阻器包括铂层，铂层的最大晶粒尺寸高于参考晶粒尺寸800安培。通过溅射工艺形成薄膜铂温敏电阻器，以提供高于3200ppm的参考TCR水平的电阻TCR的温度系数。

7. 发明授权

US5983700A Calibration method of a flow sensor output 失效
标题翻译：流量传感器输出的校准方法
公开(公告)号：US5983700A
公开(公告)日：1999-11-16
申请号：US65726
申请日：1998-04-24
申请人： Takayuki Yamaguchi , Yukito Sato , Hiroyoshi Shoji , Junichi Azumi , Morimasa Kaminishi
发明人： Takayuki Yamaguchi , Yukito Sato , Hiroyoshi Shoji , Junichi Azumi , Morimasa Kaminishi
IPC分类号： G01F1/20 , G01F1/00 , G01F1/68 , G01F7/00 , G01F25/00
CPC分类号： G01F7/00 , G01F25/0007 , G01F25/0053
摘要： A method of calibrating a zero point of a flow sensor includes the steps of detecting a transition of output of the flow sensor caused in response to a shut down of a fluid, and adjusting the zero point of a characteristic curve representing the output of the flow sensor and a flow rate, such that the indicated flow rate is zero immediately after the transition of the flow sensor output.
摘要翻译：校准流量传感器的零点的方法包括以下步骤：检测响应于流体关闭而引起的流量传感器的输出的转变，以及调整表示流量的输出的特性曲线的零点传感器和流量，使得在流量传感器输出转换之后，指示的流量为零。

8. 发明申请

US20140231995A1 SEMICONDUCTOR DEVICE, AND METHOD OF MANUFACTURING DEVICE 审中-公开
标题翻译：半导体器件及其制造方法
公开(公告)号：US20140231995A1
公开(公告)日：2014-08-21
申请号：US14169213
申请日：2014-01-31
申请人： Yuichi ANDO , Yukito Sato , Katsunori Mae
发明人： Yuichi ANDO , Yukito Sato , Katsunori Mae
IPC分类号： H01L23/00
CPC分类号： B81C1/00301 , B81B7/007 , B81B2201/0235 , B81B2201/0264 , B81B2201/0292 , B81B2201/047 , B81B2207/095 , B81C2203/031 , B81C2203/0707 , H01L24/03 , H01L24/09 , H01L2924/1461 , H01L2924/15788 , H01L2924/00
摘要： A device including a first substrate in which a functional element and an electrode are formed; a second substrate in which a through electrode is formed; a joining material that joins the first substrate and the second substrate while reserving a predetermined space between the functional element and the second substrate; and a conductive material that electrically connects the electrode to the through electrode. Here, the joining material is harder than the conductive material, and the joining material is electrically less conductive than the conductive material.
摘要翻译：一种包括形成功能元件和电极的第一基板的装置; 形成通孔的第二基板; 连接材料，其在所述功能元件和所述第二基板之间保留预定空间的同时连接所述第一基板和所述第二基板; 以及将电极与贯通电极电连接的导电材料。这里，接合材料比导电材料硬，并且接合材料比导电材料导电性更差。

9. 发明授权

US08553306B2 Optical deflector and optical device 有权
标题翻译：光学偏转器和光学装置
公开(公告)号：US08553306B2
公开(公告)日：2013-10-08
申请号：US12048694
申请日：2008-03-14
申请人： Tetsurou Saitoh , Eiji Mochizuki , Yukito Sato , Yoshiaki Yasuda , Masahiro Akamatsu , Masanao Tani
发明人： Tetsurou Saitoh , Eiji Mochizuki , Yukito Sato , Yoshiaki Yasuda , Masahiro Akamatsu , Masanao Tani
IPC分类号： G02B26/08
CPC分类号： G02B26/0858
摘要： An optical deflector includes a plurality of piezoelectric unimorph oscillating bodies (210a to 210d) that cause a reflecting plate (1) to oscillate rotationally, centering upon a pair of flexible support units (2a and 2b). The optical deflector forms a single structure of the oscillating plates (23a to 23b), the reflecting plate (1), the flexible support units (2a and 2b), and a support body (9), by connecting one set of the terminals of the oscillating plates (23a to 23d) of the suite of piezoelectric unimorph oscillating bodies (210a to 210d) to the flexible support units (2a and 2b), and connecting the other set of terminals to the support body (9). Furthermore, the plurality of piezoelectric unimorph oscillating bodies (210a to 210d) each respectively comprise a plurality of parallel oscillating bodies (23a1 to 23a-3, 23b-1 to 23b-3, 23c-1 to 23c-3), and (23d-1 to 23d-3), and a suite of parallel actuators (28a-1 to 28a-3, 28c-1 to 28c-3, and 28d-1 to 28d-3).
摘要翻译：光学偏转器包括使反射板（1）以一对柔性支撑单元（2a和2b）为中心旋转摆动的多个压电单晶振荡体（210a至210d）。光学偏转器通过将一组端子连接在一起，形成振荡板（23a至23b），反射板（1），柔性支撑单元（2a和2b）和支撑体（9）的单一结构压电单晶振荡体（210a〜210d）组合到柔性支撑单元（2a和2b）的振动板（23a至23d），并将另一组端子连接到支撑体（9）上。此外，多个压电单晶振荡体（210a〜210d）分别分别包括多个并联振荡体（23a1〜23a-3,23b-1〜23b-3，23c-1〜23c-3），（23d -1〜23d-3）和一组平行的致动器（28a-1〜28a-3,28c-1〜28c-3，以及28d-1〜28d-3）。

10. 发明申请

US20050231793A1 Deflection mirror, a deflection mirror manufacturing method, an optical writing apparatus, and an image formation apparatus 有权
标题翻译：偏转镜，偏转镜制造方法，光学写入装置和图像形成装置
公开(公告)号：US20050231793A1
公开(公告)日：2005-10-20
申请号：US11082765
申请日：2005-03-18
申请人： Yukito Sato
发明人： Yukito Sato
IPC分类号： B41J2/44 , B81B3/00 , B81C1/00 , G02B26/00 , G02B26/08 , G02B26/10 , H04N1/036 , H04N1/113
CPC分类号： G02B26/0841
摘要： A deflection mirror and a manufacturing method thereof are disclosed. A mirror substrate, beams, and a supporting member are formed in one body; movable electrodes are formed in the shape of comb-teeth at free sides of the mirror substrate; and fixed electrodes are formed in the shape of comb-teeth on the supporting member. The movable electrodes and the fixed electrodes gear through at a minute gap when the mirror substrate is driven by electrostatic force between the movable electrodes and the fixed electrodes. The cross-sectional shape of the movable electrodes and the fixed electrodes is like a trapezoid, or alternatively, the thickness of the fixed electrodes is greater than the movable electrodes. In a region of the fixed electrodes, the region not countering the movable electrodes when the mirror substrate is stopped, the portion having a width greater than a portion of a region that counters the movable electrodes, is provided. The movable electrodes may be structured thicker than the fixed electrodes.
摘要翻译：公开了偏转镜及其制造方法。镜体基板，梁和支撑构件形成在一体中; 可动电极在镜基板的自由侧形成为梳齿形状; 并且固定电极在支撑构件上形成为梳齿形状。当可动电极和固定电极之间的静电力驱动反射镜基板时，可移动电极和固定电极以微小间隙齿轮穿过。可动电极和固定电极的截面形状类似梯形，或者固定电极的厚度大于可动电极。在固定电极的区域中，设置当反射镜基板停止时不与可移动电极相抵的区域，具有大于与可动电极对置的区域的一部分的宽度的部分。可动电极的结构可以比固定电极厚。

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