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    • 6. 发明授权
    • Piezoelectric/electrostrictive device
    • 压电/电致伸缩器件
    • US06476539B1
    • 2002-11-05
    • US09642861
    • 2000-08-21
    • Yukihisa TakeuchiTsutomu NanatakiMasato KomazawaKoji Kimura
    • Yukihisa TakeuchiTsutomu NanatakiMasato KomazawaKoji Kimura
    • H01L4108
    • H01L41/43H01L41/0946
    • Provided is a piezoelectric/electrostrictive device comprising a driving portion to be driven by a displacement of a piezoelectric/electrostrictive element, a movable portion to be operated based on a drive of the driving portion, and a fixing portion for holding the driving portion and the movable portion, the fixing portion and the movable portions being coupled via the driving portion, and a hole being formed by an inner wall of the driving portion, inner wall of the movable portion, and inner walls of the fixing portion. The driving portion comprises a pair of mutually opposing thin plate portions and at least two piezoelectric/electrostrictive elements each comprising at least one or more pairs of electrodes and a piezoelectric/electrostrictive layer provided on the thin plate portions.
    • 本发明提供一种压电/电致伸缩器件,其特征在于,包括:驱动部,其通过压电/电致伸缩元件的位移驱动;基于所述驱动部的驱动而被驱动的可动部,以及用于保持所述驱动部和 可动部分,固定部分和可动部分经由驱动部分联接,以及由驱动部分的内壁,可移动部分的内壁和固定部分的内壁形成的孔。 驱动部分包括一对相互相对的薄板部分和至少两个压电/电致伸缩元件,每个压电/电致伸缩元件包括至少一对或多对电极和设置在薄板部分上的压电/电致伸缩层。
    • 7. 发明授权
    • Mass sensor and mass sensing method
    • 质量传感器和质量感测方法
    • US06457361B1
    • 2002-10-01
    • US09387012
    • 1999-08-31
    • Yukihisa TakeuchiTakao OhnishiKoji Kimura
    • Yukihisa TakeuchiTakao OhnishiKoji Kimura
    • G01H1300
    • G01G3/13
    • A mass sensor including: a connecting plate having one or more slit(s) and/or opening portion(s) formed therein and/or having a thin-walled portion and a thick-walled portion formed therein; a diaphragm joined with the connecting plate at respective side surfaces; a piezoelectric element; a sensing plate with the piezoelectric element being provided at least at one part on at least one surface of the sensing plate, which has its side surface joined with a side surface of the connecting plate in the direction perpendicular to the joining direction of the diaphragm and the connecting plate; and a sensor substrate with which at least a part of side surfaces of the connecting plate as well as the sensing plate are joined, and the diaphragm, the connecting plate, the sensing plate, and the piezoelectric element form a resonating portion. The mass sensor can conveniently be used for determining the mass of a substance to be sensed by measuring changes in resonant frequencies caused by changes in the mass of the diaphragm on which a catching substance for catching a substance to be sensed by reacting only with the object of sensing is applied.
    • 一种质量传感器,包括:连接板,其中形成有一个或多个狭缝和/或开口部分,和/或具有形成在其中的薄壁部分和厚壁部分; 在相应的侧表面处连接有连接板的隔膜; 压电元件; 具有压电元件的检测板至少在传感板的至少一个表面上的一个部分上设置,其侧表面在垂直于隔膜的接合方向的方向上与连接板的侧表面接合, 连接板; 以及传感器基板,连接板的至少一部分的侧面以及感测板与其连接,隔膜,连接板,感测板和压电元件形成谐振部。 质量传感器可以方便地用于通过测量由通过仅与物体反应而捕获待检测物质的捕获物质的膜片的质量变化引起的谐振频率的变化来确定待感测物质的质量 的感应。
    • 9. 发明授权
    • Piezoelectric/electrostrictive device
    • 压电/电致伸缩器件
    • US06452309B1
    • 2002-09-17
    • US09627260
    • 2000-07-28
    • Yukihisa TakeuchiTsutomu NanatakiMasato KomazawaKoji Kimura
    • Yukihisa TakeuchiTsutomu NanatakiMasato KomazawaKoji Kimura
    • H01L4108
    • H01L41/0946H01L41/27
    • A piezoelectric/electrostrictive device is disclosed comprising a driving portion to be driven by a displacement of a piezoelectric/electrostrictive element, a movable portion to be operated by a drive of the driving portion, a fixing portion for holding the driving portion and the movable portion, the movable portion being coupled with the fixing portion via the driving portion, and a hole formed by inner walls of the driving portion, an inner wall of the movable portion, and an inner wall of the fixing portion. The driving portion comprises a pair of mutually opposing thin plate portions, and a piezoelectric/electrostrictive element including a piezoelectric/electrostrictive operating portion comprising at least a pair or more of electrodes and a piezoelectric/electrostrictive layer formed on at least a part of the outer surface of at least one thin plate portion out of the thin plate portions, one end of the piezoelectric/electrostrictive operating portion in a direction in which the fixing portion is connected with the movable portion exists on the fixing portion or the movable portion, and the other end of the piezoelectric/electrostrictive operating portion is arranged on the thin plate portion, and at least a piezoelectric/electrostrictive layer of the piezoelectric/electrostrictive element exists extending over the movable portion and the fixing portion. The device of the present invention, having high rigidity in the width direction of the thin plate portions, namely in the Y-axis direction, enables rigid joining when functional parts such as sensors, magnetic heads, or the like are fixed to the present device, and further when the present device per se is fixed to another structure.
    • 公开了一种压电/电致伸缩器件,其包括驱动部分,该驱动部分由压电/电致伸缩元件的位移驱动,通过驱动部分的驱动而操作的可动部分,用于保持驱动部分和可动部分的固定部分 所述可移动部分经由所述驱动部分与所述固定部分联接,以及由所述驱动部分的内壁,所述可移动部分的内壁和所述固定部分的内壁形成的孔。 驱动部分包括一对相互相对的薄板部分,以及包括压电/电致伸缩操作部分的压电/电致伸缩元件,所述压电/电致伸缩操作部分包括至少一对或多个电极和形成在外部的至少一部分上的压电/电致伸缩层 至少一个薄板部分的表面在薄板部分之外,压电/电致伸缩操作部分的固定部分与可动部分连接的方向的一端存在于固定部分或可移动部分上,并且 压电/电致伸缩操作部分的另一端设置在薄板部分上,至少压电/电致伸缩元件的压电/电致伸缩层存在于可移动部分和固定部分上方延伸。 本发明的薄板部的宽度方向的刚性即Y轴方向的本发明的装置能够在诸如传感器,磁头等功能部件被固定在本装置上时进行刚性接合 并且当本装置本身固定到另一结构时。