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    • 3. 发明申请
    • METHODS FOR MANUFACTURING RADIO FREQUENCY (RF) POWDER
    • 制造无线电频率(RF)粉末的方法
    • US20120152890A1
    • 2012-06-21
    • US13404667
    • 2012-02-24
    • Yuji FURUMURA
    • Yuji FURUMURA
    • H05K3/00
    • G06K19/07749G06K19/0723G06K19/07767
    • The present disclosure provides methods for manufacturing a radio frequency (RF) powder including a plurality of RF particles, each of which includes a circuit element. A plurality of circuit elements, each corresponding to a different RF particle, may be formed on a first surface of a substrate. Grooves may be etched into the first surface of the substrate between the plurality of circuit elements. A protection film may be formed on each of the plurality of circuit elements and a portion of the substrate between a second, opposite surface of the substrate and bottoms of the grooves may be removed so that each of the plurality of circuit elements is associated with the remaining portion of the substrate.
    • 本公开提供了制造包括多个RF颗粒的射频(RF)粉末的方法,每个RF颗粒包括电路元件。 可以在衬底的第一表面上形成各自对应于不同的RF颗粒的多个电路元件。 沟槽可以蚀刻到多个电路元件之间的衬底的第一表面中。 可以在多个电路元件中的每一个上形成保护膜,并且可以去除衬底的第二相对表面和沟槽的底部之间的衬底的一部分,使得多个电路元件中的每一个与 衬底的剩余部分。
    • 5. 发明申请
    • METHOD FOR MANUFACTURING RF POWDER
    • 制造射频粉末的方法
    • US20100081235A1
    • 2010-04-01
    • US12516493
    • 2007-11-26
    • Yuji FURUMURA
    • Yuji FURUMURA
    • H01L21/78
    • G06K19/07749G06K19/07775G06K19/07779H01Q1/2283H01Q7/005
    • A method for manufacturing RF powder wherein the RF powder is composed of a large amount of particles and used as collective RF powder (a powdery entity); and a large amount of RF powder particles can be obtained from a wafer in a stable manner and at a high yield is provided.The method for manufacturing RF powder is a method for manufacturing RF powder composed of a large amount of particles 11a each having a substrate 12 and a magnetic coupling circuit device 15. This method includes a step S11 of forming many antenna circuit devices 39 on a wafer 40; a gas dicing step S13 for drawing dicing grooves on a wafer to locate positions of separation of magnetic coupling circuit devices; a protection film formation step S14 for coating surrounding areas of the magnetic coupling circuit devices with a protection film; a reinforcement step S15 for attaching the wafer to a supporting plate using an adhesive sheet; a grinding step S16 for grinding the backside of the wafer until the dicing grooves are reached; and a separation step S17 for separating the circuit devices by removing the supporting plate.
    • 一种制造射频粉末的方法,其中RF粉末由大量的颗粒组成并用作集体RF粉末(粉末实体); 并且可以以稳定的方式从晶片获得大量的RF粉末颗粒,并以高产率提供。 RF粉末的制造方法是由具有基板12和磁耦合电路装置15的大量的粒子11a构成的RF粉末的制造方法。该方法包括在晶片上形成许多天线电路装置39的工序S11 40; 用于在晶片上吸引切割槽的气体切割步骤S13,以定位磁耦合电路器件的分离位置; 保护膜形成步骤S14,用于用保护膜涂覆磁耦合电路装置的周围区域; 加强步骤S15,用于使用粘合片将晶片附着在支撑板上; 用于研磨晶片的背面直到达到切割槽的研磨步骤S16; 以及用于通过移除支撑板来分离电路装置的分离步骤S17。