会员体验
专利管家(专利管理)
工作空间(专利管理)
风险监控(情报监控)
数据分析(专利分析)
侵权分析(诉讼无效)
联系我们
交流群
官方交流:
QQ群: 891211   
微信请扫码    >>>
现在联系顾问~
热词
    • 7. 发明授权
    • Method of manufacturing semiconductor device
    • 制造半导体器件的方法
    • US08053337B2
    • 2011-11-08
    • US12659991
    • 2010-03-26
    • Takamitsu Noda
    • Takamitsu Noda
    • H01L21/78
    • H01L21/78B23K26/364B23K26/40B23K2103/172B23K2103/42B23K2103/50Y10S438/976
    • In a method of manufacturing a semiconductor device, a first groove and a second groove each having a width less than that of a scribe line are formed along the scribe line in a first protective film provided below a second protective film which protects element forming regions when a wafer is divided into parts by a laser dicing, and the first groove and the second groove are filled with the second protective film. Then, the laser dicing is performed on a region between the first groove and the second groove along the scribe line from the surface where the second protective film is formed to form a cutting groove that reaches at least a predetermined depth of the multi-layer interconnect.
    • 在制造半导体器件的方法中,沿着划线沿着划线形成第一保护膜,第一保护膜设置在保护元件形成区域的第二保护膜下方的第一保护膜中,第一保护膜和第二槽的宽度小于划线的宽度, 通过激光切割将晶片分成多个部分,并且第一凹槽和第二凹槽被第二保护膜填充。 然后,从形成第二保护膜的表面沿着划线在第一槽和第二槽之间的区域上进行激光切割,以形成至少达到多层互连的预定深度的切割槽 。
    • 8. 发明申请
    • Method of manufacturing semiconductor device
    • 制造半导体器件的方法
    • US20100273312A1
    • 2010-10-28
    • US12659991
    • 2010-03-26
    • Takamitsu Noda
    • Takamitsu Noda
    • H01L21/78
    • H01L21/78B23K26/364B23K26/40B23K2103/172B23K2103/42B23K2103/50Y10S438/976
    • In a method of manufacturing a semiconductor device, a first groove and a second groove each having a width less than that of a scribe line are formed along the scribe line in a first protective film provided below a second protective film which protects element forming regions when a wafer is divided into parts by a laser dicing, and the first groove and the second groove are filled with the second protective film. Then, the laser dicing is performed on a region between the first groove and the second groove along the scribe line from the surface where the second protective film is formed to form a cutting groove that reaches at least a predetermined depth of the multi-layer interconnect.
    • 在制造半导体器件的方法中,沿着划线沿着划线形成第一保护膜,第一保护膜设置在保护元件形成区域的第二保护膜下方的第一保护膜中,第一保护膜和第二槽的宽度小于划线的宽度, 通过激光切割将晶片分成多个部分,并且第一凹槽和第二凹槽被第二保护膜填充。 然后,从形成第二保护膜的表面沿着划线在第一槽和第二槽之间的区域上进行激光切割,以形成至少达到多层互连的预定深度的切割槽 。