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    • 10. 发明授权
    • Positive resist composition and pattern-forming method
    • 正抗蚀剂组成和图案形成方法
    • US08062826B2
    • 2011-11-22
    • US12058223
    • 2008-03-28
    • Shinichi Kanna
    • Shinichi Kanna
    • G03F7/004G03F7/30
    • G03F7/11G03F7/0045G03F7/0046G03F7/0397G03F7/0758G03F7/2041Y10S430/106Y10S430/111
    • A positive resist composition includes: (A) a resin capable of increasing the solubility in an alkali developing solution by the action of an acid, including: (a1) a repeating unit selected from repeating units represented by specific formulae (a1-1) to (a1-3); (a2) a repeating unit represented by a specific formula (a2); and (a3) a repeating unit selected from repeating units represented by specific formulae (a3-1) to (a3-4); (B) a compound capable of generating an acid upon irradiation with actinic ray or radiation, (C) a resin including: at least one of a fluorine atom and a silicon atom; and a group selected from specific groups (x) to (z):(x) an alkali-soluble group, (y) a group capable of decomposing by the action of an alkali developing solution to increase the solubility in the alkali developing solution, and (z) a group capable of decomposing by the action of an acid; and (D) a solvent.
    • 正型抗蚀剂组合物包括:(A)能够通过酸的作用增加在碱性显影液中的溶解度的树脂,其包括:(a1)选自由特定式(a1-1)至 (a1-3); (a2)由特定式(a2)表示的重复单元; 和(a3)选自由特定式(a3-1)〜(a3-4)表示的重复单元的重复单元; (B)能够在用光化射线或辐射照射时能够产生酸的化合物,(C)含有氟原子和硅原子中的至少一种的树脂; 和选自碱溶性基团(x)〜(z):( x)中的基团,(y)能够通过碱性显影液的作用分解以提高在碱性显影液中的溶解度的基团, 和(z)能够通过酸的作用分解的基团; 和(D)溶剂。