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    • 4. 发明申请
    • METHOD FOR MANUFACTURING FIN TRANSISTOR THAT PREVENTS ETCHING LOSS OF A SPIN-ON-GLASS INSULATION LAYER
    • 用于制造防止旋转玻璃绝缘层损失的FIN晶体管的方法
    • US20080242030A1
    • 2008-10-02
    • US11965835
    • 2007-12-28
    • Dong Sun SHEENSeok Pyo SONGYoung Ho LEE
    • Dong Sun SHEENSeok Pyo SONGYoung Ho LEE
    • H01L21/336
    • H01L29/66795H01L29/7851
    • A method for manufacturing a fin transistor includes forming a trench by etching a semiconductor substrate. A flowable insulation layer is filled in the trench to form a field insulation layer defining an active region. The portion of the flowable insulation layer coming into contact with a gate forming region is etched so as to protrude the gate forming region in the active region. A protective layer over the semiconductor substrate is formed to fill the portion of the etched flowable insulation layer. The portion of the protective layer formed over the active region is removed to expose the active region of the semiconductor substrate. The exposed active region of the semiconductor substrate is cleaned. The protective layer remaining on the portion of the etched flowable insulation layer is removed. Gates are formed over the protruded gate forming regions in the active region.
    • 一种制造鳍式晶体管的方法包括:通过蚀刻半导体衬底形成沟槽。 可流动的绝缘层填充在沟槽中以形成限定有源区的场绝缘层。 与栅极形成区域接触的可流动绝缘层的部分被蚀刻以便在有源区域中突出栅极形成区域。 形成半导体衬底上方的保护层以填充该可蚀刻的可流动绝缘层的部分。 在有源区上形成的保护层的部分被去除以暴露半导体衬底的有源区。 清洁半导体衬底的暴露的有源区。 残留在可蚀刻的可流动绝缘层的部分上的保护层被去除。 在活性区域中的突出的栅极形成区域上形成栅极。