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    • 3. 发明授权
    • Ring rolling mill and ring rolling method
    • 环轧机和环轧法
    • US08365564B2
    • 2013-02-05
    • US12294533
    • 2007-03-28
    • Shimpei HiroseYuji IshiwariHiroaki KikuchiHideo Takizawa
    • Shimpei HiroseYuji IshiwariHiroaki KikuchiHideo Takizawa
    • B21D15/00B21D1/02B21D3/02B21D19/12B21B1/10
    • B21B17/02B21B5/00B21H1/06
    • This ring rolling mill includes a main roll and a mandrel provided so as to be capable of being brought close to or separated from each other, and rolling a peripheral portion of a ring-shaped body in a radial direction of the ring-shaped body while the ring-shaped body is rotated along its peripheral direction in a state where the peripheral portion of the ring-shaped body is pinched in the radial direction between an outer peripheral surface of the main roll which is rotationally driven, and an outer peripheral surface of the mandrel which is rotatable. This ring rolling mill further includes a mandrel inclining/supporting mechanism which inclines and supports the mandrel with respect to the axis of rotation of the main roll such that the gap between the outer peripheral surface of the mandrel and the outer peripheral surface of the main roll differs on one side and on the other side as seen in a direction along the axis of rotation of the main roll.
    • 该环轧机包括主辊和心轴,其设置成能够彼此靠近或分离,并且在环形体的径向方向上滚动环形体的周边部分,同时 在环状体的周缘部沿径向被夹持在主旋转驱动的主辊的外周面与外周面之间的状态下,环状体沿其圆周方向旋转, 可旋转的心轴。 该环轧机还包括:心轴倾​​斜/支撑机构,其相对于主辊的旋转轴线倾斜并支撑心轴,使得心轴的外周面与主辊的外周面之间的间隙 在沿着主辊的旋转轴线的方向观察时,在一侧和另一侧是不同的。
    • 5. 发明申请
    • RING ROLLING MILL AND RING ROLLING METHOD
    • 环形轧机和环轧方法
    • US20100236311A1
    • 2010-09-23
    • US12294533
    • 2007-03-28
    • Shimpei HiroseYuji IshiwariHiroaki KikuchiHideo Takizawa
    • Shimpei HiroseYuji IshiwariHiroaki KikuchiHideo Takizawa
    • B21D1/02
    • B21B17/02B21B5/00B21H1/06
    • This ring rolling mill includes a main roll and a mandrel provided so as to be capable of being brought close to or separated from each other, and rolling a peripheral portion of a ring-shaped body in a radial direction of the ring-shaped body while the ring-shaped body is rotated along its peripheral direction in a state where the peripheral portion of the ring-shaped body is pinched in the radial direction between an outer peripheral surface of the main roll which is rotationally driven, and an outer peripheral surface of the mandrel which is rotatable. This ring rolling mill further includes a mandrel inclining/supporting mechanism which inclines and supports the mandrel with respect to the axis of rotation of the main roll such that the gap between the outer peripheral surface of the mandrel and the outer peripheral surface of the main roll differs on one side and on the other side as seen in a direction along the axis of rotation of the main roll.
    • 该环轧机包括主辊和心轴,其设置成能够彼此靠近或分离,并且在环形体的径向方向上滚动环形体的周边部分,同时 在环状体的周缘部沿径向被夹持在主旋转驱动的主辊的外周面与外周面之间的状态下,环状体沿其圆周方向旋转, 可旋转的心轴。 该环轧机还包括:心轴倾​​斜/支撑机构,其相对于主辊的旋转轴线倾斜并支撑心轴,使得心轴的外周表面与主辊的外周表面之间的间隙 在沿着主辊的旋转轴线的方向观察时,在一侧和另一侧是不同的。
    • 7. 发明授权
    • Method of detecting defects in a wiring process
    • 检测布线过程中的缺陷的方法
    • US06204075B1
    • 2001-03-20
    • US09310136
    • 1999-05-12
    • Hiroaki Kikuchi
    • Hiroaki Kikuchi
    • H01L2166
    • H01L22/34H01L23/528H01L2924/0002H01L2924/00
    • A circuit, a semiconductor wafer including the circuit and a method for detecting defects of wiring used for detecting a malfunction in a wiring fabrication process during semiconductor device manufacturing. The circuit comprises an insulating film formed on a semiconductor substrate, a first wiring which is formed on the insulating film formed on the semiconductor substrate and is in an electrically floating condition, and a second wiring which is formed on the insulating film formed on the semiconductor substrate and is disposed adjacent to the first wiring and is in an electrically floating condition, wherein the capacitance between the second wiring and the semiconductor substrate is larger than the capacitance between the first wiring and the semiconductor substrate. Portions of the first and second wiring are scanned by an electron beam on the surfaces thereof, and secondary electrons emitted from the first wiring and second wiring are detected.
    • 电路,包括电路的半导体晶片和用于检测在半导体器件制造期间用于检测布线制造工艺中的故障的布线的缺陷的方法。 该电路包括形成在半导体衬底上的绝缘膜,形成在形成于半导体衬底上并处于电浮置状态的绝缘膜上的第一布线,以及形成在半导体上形成的绝缘膜上的第二布线 衬底并且被布置为与第一布线相邻并且处于电浮置状态,其中第二布线和半导体衬底之间的电容大于第一布线和半导体衬底之间的电容。 通过电子束在其表面上扫描第一和第二布线的部分,并且检测从第一布线和第二布线发射的二次电子。
    • 8. 发明授权
    • Method of producing bonded substrate with silicon-on-insulator structure
    • 用绝缘体上硅结构生产键合衬底的方法
    • US5985681A
    • 1999-11-16
    • US937009
    • 1997-09-24
    • Tomohiro HamajimaHiroaki Kikuchi
    • Tomohiro HamajimaHiroaki Kikuchi
    • H01L21/762H01L21/02H01L21/304H01L21/76H01L27/12H01L21/3065
    • H01L21/76251Y10S438/977
    • Two wafers of single-crystal silicon are used to produce a bonded substrate having a silicon-on-insulator (SOI) structure. In a principal surface of a first wafer, a number of first insulator film patterns of equal thickness art formed for isolation of semiconductor devices to be fabricated on the bonded substrate. Simultaneously, at least to second insulator film patterns having the same thickniess as the first insulator film patterns are formed in the same surface of the first wafer for optical measurement of the thickness of an active layer of in the bonded substrate. Then the first wafer is bonded to a second wafer to obtain a bonded substrate in which the insulator film patterns are buried adjacent to the interface between the two silicon wafers. To form an active layer having a desired thickness above the buried insulator film patterns, the thickness of the first wafer is reduced by mechanical grinding and chemical-mechanical polishing. The polishing operation is intermitted at suitable time intervals, and the thickness of the active layer is measured by an optical method in the area of each of the second insulator film patterns while the polishing operation is intermitted.
    • 使用两片单晶硅晶片来制造具有绝缘体上硅(SOI)结构的键合衬底。 在第一晶片的主表面中,形成了用于隔离待制造在键合衬底上的半导体器件的多个等厚度的第一绝缘膜图案。 同时,至少在与第一绝缘膜图形相同厚度的第二绝缘膜图案形成在第一晶片的相同表面上,用于光学测量键合衬底中的有源层的厚度。 然后将第一晶片接合到第二晶片,以获得其中绝缘膜图案被掩埋在两个硅晶片之间的界面附近的键合衬底。 为了在掩埋绝缘膜图案上方形成具有所需厚度的有源层,通过机械研磨和化学机械抛光来减少第一晶片的厚度。 以合适的时间间隔进行抛光操作,并且通过光学方法在每个第二绝缘膜图案的区域中测量有源层的厚度,同时中间抛光操作。
    • 9. 发明授权
    • Semiconductor substrate with SOI structure
    • 具有SOI结构的半导体衬底
    • US5844294A
    • 1998-12-01
    • US774424
    • 1996-12-30
    • Hiroaki KikuchiKenichi Arai
    • Hiroaki KikuchiKenichi Arai
    • H01L21/762H01L27/01H01L27/12H01L29/00
    • H01L21/76264H01L21/76275H01L21/76286
    • A semiconductor substrate which is optimum for a substrate for integrating a vertical power element and a control circuit element monolithically. A cavity 3 is formed between a dielectric layer 2 and a single crystal silicon substrate 4 in a control circuit element forming region 8, and junction planes 1a and 4a of single crystal silicon substrates 1 and 4 are joined together. Since bonding of regions where a vertical power element is formed is made with flat single crystal silicon planes, no void (non-bonded portion) is generated on the junction plane of the region where the vertical power element is formed. As a result, it is possible to realize a semiconductor device provided with perfect junction having electrical conductivity in a direction perpendicular to the junction interface.
    • 一种半导体衬底,其对于用于将垂直功率元件和控制电路元件整体地集成的衬底是最佳的。 在控制电路元件形成区域8中的介电层2和单晶硅基板4之间形成有空穴3,单晶硅基板1和4的接合面1a和4a接合在一起。 由于形成垂直功率元件的区域的结合由平坦的单晶硅平面制成,所以在形成垂直功率元件的区域的结面上不产生空隙(非接合部分)。 结果,可以实现在垂直于接合界面的方向上具有导电性的完美结的半导体器件。