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1. 发明授权

US07721415B2 Method of manufacturing a thin-film magnetic head 有权
标题翻译：制造薄膜磁头的方法
公开(公告)号：US07721415B2
公开(公告)日：2010-05-25
申请号：US11406268
申请日：2006-04-19
申请人： Yoshitaka Sasaki , Hiroyuki Ito , Takehiro Horinaka , Takehiro Kamigama , Tatsushi Shimizu
发明人： Yoshitaka Sasaki , Hiroyuki Ito , Takehiro Horinaka , Takehiro Kamigama , Tatsushi Shimizu
IPC分类号： G11B5/127 , H04R31/00
CPC分类号： G11B5/1278 , G11B5/3116 , G11B5/3123 , G11B5/3163 , Y10T29/49032 , Y10T29/49043 , Y10T29/49046 , Y10T29/49048 , Y10T29/49052
摘要： A thin-film magnetic head is manufactured as follows. First, a base insulating layer having a magnetic pole forming depression sunken into a form corresponding to the main magnetic pole layer is formed, a stop film for CMP is formed such as to fill the magnetic pole forming depression, and then a magnetic layer is formed on the stop film. Next, the magnetic layer is separated by forming a separation groove substantially surrounding the magnetic pole forming depression on the outside thereof, and thus separated magnetic layer is formed with a cover insulating film adapted to cover the whole upper face. The surface is polished by CMP until the stop film is exposed, so that the part of magnetic layer remaining on the inside of the magnetic pole forming depression is used as the main magnetic pole layer. Further, a recording gap layer, a write shield layer, and a thin-film coil are formed.
摘要翻译：如下制造薄膜磁头。首先，形成具有凹陷形成为与主磁极层对应的形状的磁极形成凹部的基底绝缘层，形成用于填充磁极形成凹部的用于CMP的停止膜，然后形成磁性层在停止电影。接下来，通过在其外侧形成基本上围绕磁极形成凹部的分离槽来分离磁性层，由此分离的磁性层形成有覆盖整个上表面的覆盖绝缘膜。通过CMP抛光表面，直到停止膜露出，使得残留在磁极形成凹部内侧的磁性层的一部分被用作主磁极层。此外，形成记录间隙层，写入屏蔽层和薄膜线圈。

2. 发明申请

US20080002293A1 Thin-film magnetic head, method of manufacturing the same, head gimbal assembly and hard disk drive 有权
标题翻译：薄膜磁头，制造方法，磁头万向架组件和硬盘驱动器
公开(公告)号：US20080002293A1
公开(公告)日：2008-01-03
申请号：US11406268
申请日：2006-04-19
申请人： Yoshitaka Sasaki , Hiroyuki Ito , Takehiro Horinaka , Takehiro Kamigama , Tatsushi Shimizu
发明人： Yoshitaka Sasaki , Hiroyuki Ito , Takehiro Horinaka , Takehiro Kamigama , Tatsushi Shimizu
IPC分类号： G11B5/147
CPC分类号： G11B5/1278 , G11B5/3116 , G11B5/3123 , G11B5/3163 , Y10T29/49032 , Y10T29/49043 , Y10T29/49046 , Y10T29/49048 , Y10T29/49052
摘要： A thin-film magnetic head is manufactured as follows. First, a base insulating layer having a magnetic pole forming depression sunken into a form corresponding to the main magnetic pole layer is formed, a stop film for CMP is formed such as to fill the magnetic pole forming depression, and then a magnetic layer is formed on the stop film. Next, the magnetic layer is separated by forming a separation groove substantially surrounding the magnetic pole forming depression on the outside thereof, and thus separated magnetic layer is formed with a cover insulating film adapted to cover the whole upper face. The surface is polished by CMP until the stop film is exposed, so that the part of magnetic layer remaining on the inside of the magnetic pole forming depression is used as the main magnetic pole layer. Further, a recording gap layer, a write shield layer, and a thin-film coil are formed.
摘要翻译：如下制造薄膜磁头。首先，形成具有凹陷形成为与主磁极层对应的形状的磁极形成凹部的基底绝缘层，形成用于填充磁极形成凹部的用于CMP的停止膜，然后形成磁性层在停止电影。接下来，通过在其外侧形成基本上围绕磁极形成凹部的分离槽来分离磁性层，由此分离的磁性层形成有覆盖整个上表面的覆盖绝缘膜。通过CMP抛光表面，直到停止膜露出，使得残留在磁极形成凹部内侧的磁性层的一部分被用作主磁极层。此外，形成记录间隙层，写入屏蔽层和薄膜线圈。

3. 发明授权

US08174790B2 Thin-film magnetic head having remnant coating and remnant insulating film, head gimbal assembly and hard disk drive 有权
标题翻译：薄膜磁头具有残留涂层和残留绝缘膜，磁头万向架组件和硬盘驱动器
公开(公告)号：US08174790B2
公开(公告)日：2012-05-08
申请号：US12690381
申请日：2010-01-20
申请人： Yoshitaka Sasaki , Hiroyuki Ito , Takehiro Horinaka , Takehiro Kamigama , Tatsushi Shimizu
发明人： Yoshitaka Sasaki , Hiroyuki Ito , Takehiro Horinaka , Takehiro Kamigama , Tatsushi Shimizu
IPC分类号： G11B5/127
CPC分类号： G11B5/1278 , G11B5/3116 , G11B5/3123 , G11B5/3163 , Y10T29/49032 , Y10T29/49043 , Y10T29/49046 , Y10T29/49048 , Y10T29/49052
摘要： A thin-film magnetic head including a structure in which a main magnetic pole layer including a magnetic pole end part on a side of a medium-opposing surface opposing a recording medium, a write shield layer opposing the magnetic pole end part so as to form a recording gap layer on the medium-opposing surface side, and a thin-film coil wound about the write shield layer or main magnetic pole layer are laminated. The main magnetic pole layer is incorporated in a magnetic pole forming depression of a base insulating layer, the magnetic pole forming depression being sunken into a form corresponding to the main magnetic pole layer. The thin-film magnetic head has a remnant insulating film, formed on the outside of the magnetic pole forming depression so as to substantially surround the magnetic pole forming depression, covering the base insulating layer.
摘要翻译：一种薄膜磁头，其包括其中包括在与记录介质相对的介质相对表面一侧上的磁极端部的主磁极层，与磁极端部相对的写入屏蔽层以形成介质相对表面侧的记录间隙层和卷绕在写入屏蔽层或主磁极层上的薄膜线圈层叠。主磁极层结合在基极绝缘层的磁极形成凹部中，磁极形成凹部凹陷成与主磁极层对应的形式。薄膜磁头具有残留的绝缘膜，形成在磁极形成用凹部的外侧，从而基本上围绕着形成磁极的凹部，覆盖基底绝缘层。

4. 发明授权

US07943288B2 Thin-film magnetic head structure, method of manufacturing the same, and thin-film magnetic head 失效
标题翻译：薄膜磁头结构及其制造方法以及薄膜磁头
公开(公告)号：US07943288B2
公开(公告)日：2011-05-17
申请号：US12232722
申请日：2008-09-23
申请人： Yoshitaka Sasaki , Hiroyuki Ito , Takehiro Kamigama , Tatsushi Shimizu , Hironori Araki , Shigeki Tanemura , Kazuo Ishizaki
发明人： Yoshitaka Sasaki , Hiroyuki Ito , Takehiro Kamigama , Tatsushi Shimizu , Hironori Araki , Shigeki Tanemura , Kazuo Ishizaki
IPC分类号： G11B5/31
CPC分类号： G11B5/3116 , G11B5/1278 , G11B5/3163 , Y10T29/49032
摘要： A method of manufacturing a thin-film magnetic head structure comprises the steps of preparing an insulating layer 10; forming a first resist layer 51 provided with a first slit pattern 51a corresponding to a very narrow groove part and a second slit pattern 51b corresponding to a temporary groove part integrally extending from the very narrow groove part along outer edges of a main depression onto the insulating layer 10; etching the insulating layer 10 while using the first resist layer 51 as a mask; eliminating the first resist layer 51; forming a second resist layer having an opening pattern corresponding to the main depression onto the insulating layer 10; and etching the insulating layer 10 while using the second resist layer as a mask.
摘要翻译：制造薄膜磁头结构的方法包括制备绝缘层10的步骤; 形成第一抗蚀剂层51，该第一抗蚀剂层51具有对应于非常窄的槽部分的第一狭缝图案51a和对应于从非常窄的槽部分沿着主凹陷的外边缘整体延伸到绝缘体上的临时槽部分的第二狭缝图案51b 第10层; 在使用第一抗蚀剂层51作为掩模的同时蚀刻绝缘层10; 消除第一抗蚀剂层51; 在所述绝缘层10上形成具有与所述主凹部对应的开口图案的第二抗蚀剂层; 并且在使用第二抗蚀剂层作为掩模的同时蚀刻绝缘层10。

5. 发明申请

US20090040655A1 Thin-film magnetic head structure, method of manufacturing the same, and thin-film magnetic head 有权
公开(公告)号：US20090040655A1
公开(公告)日：2009-02-12
申请号：US12232723
申请日：2008-09-23
申请人： Yoshitaka Sasaki , Hiroyuki Ito , Takehiro Kamigama , Tatsushi Shimizu , Hironori Araki , Shigeki Tanemura , Kazuo Ishizaki
发明人： Yoshitaka Sasaki , Hiroyuki Ito , Takehiro Kamigama , Tatsushi Shimizu , Hironori Araki , Shigeki Tanemura , Kazuo Ishizaki
IPC分类号： G11B5/187
CPC分类号： G11B5/3116 , G11B5/1278 , G11B5/3163 , Y10T29/49032
摘要： A method of manufacturing a thin-film magnetic head structure comprises the steps of preparing an insulating layer 10; forming a first resist layer 51 provided with a first slit pattern 51a corresponding to a very narrow groove part and a second slit pattern 51b corresponding to a temporary groove part integrally extending from the very narrow groove part along outer edges of a main depression onto the insulating layer 10; etching the insulating layer 10 while using the first resist layer 51 as a mask; eliminating the first resist layer 51; forming a second resist layer having an opening pattern corresponding to the main depression onto the insulating layer 10; and etching the insulating layer 10 while using the second resist layer as a mask.

6. 发明申请

US20070014048A1 Thin-film magnetic head structure, method of manufacturing the same, and thin-film magnetic head 有权
标题翻译：薄膜磁头结构及其制造方法以及薄膜磁头
公开(公告)号：US20070014048A1
公开(公告)日：2007-01-18
申请号：US11179728
申请日：2005-07-13
申请人： Yoshitaka Sasaki , Hiroyuki Ito , Takehiro Kamigama , Tatsushi Shimizu , Hironori Araki , Shigeki Tanemura , Kazuo Ishizaki
发明人： Yoshitaka Sasaki , Hiroyuki Ito , Takehiro Kamigama , Tatsushi Shimizu , Hironori Araki , Shigeki Tanemura , Kazuo Ishizaki
IPC分类号： G11B5/147
CPC分类号： G11B5/3116 , G11B5/1278 , G11B5/3163 , Y10T29/49032
摘要： A method of manufacturing a thin-film magnetic head structure comprises the steps of preparing an insulating layer 10; forming a first resist layer 51 provided with a first slit pattern 51a corresponding to a very narrow groove part and a second slit pattern 51b corresponding to a temporary groove part integrally extending from the very narrow groove part along outer edges of a main depression onto the insulating layer 10; etching the insulating layer 10 while using the first resist layer 51 as a mask; eliminating the first resist layer 51; forming a second resist layer having an opening pattern corresponding to the main depression onto the insulating layer 10; and etching the insulating layer 10 while using the second resist layer as a mask.
摘要翻译：制造薄膜磁头结构的方法包括制备绝缘层10的步骤; 形成第一抗蚀剂层51，其设置有对应于非常窄的槽部的第一狭缝图案51a和对应于沿着主凹部的外边缘从非常窄的槽部整体延伸的临时槽部的第二狭缝图案51b，绝缘层10; 在使用第一抗蚀剂层51作为掩模的同时蚀刻绝缘层10; 消除第一抗蚀剂层51; 在所述绝缘层10上形成具有与所述主凹部对应的开口图案的第二抗蚀剂层; 并且在使用第二抗蚀剂层作为掩模的同时蚀刻绝缘层10。

7. 发明授权

US07492555B2 Thin-film magnetic head structure, method of manufacturing the same, and thin-film magnetic head 有权
标题翻译：薄膜磁头结构及其制造方法以及薄膜磁头
公开(公告)号：US07492555B2
公开(公告)日：2009-02-17
申请号：US11179728
申请日：2005-07-13
申请人： Yoshitaka Sasaki , Hiroyuki Ito , Takehiro Kamigama , Tatsushi Shimizu , Hironori Araki , Shigeki Tanemura , Kazuo Ishizaki
发明人： Yoshitaka Sasaki , Hiroyuki Ito , Takehiro Kamigama , Tatsushi Shimizu , Hironori Araki , Shigeki Tanemura , Kazuo Ishizaki
IPC分类号： G11B5/127
CPC分类号： G11B5/3116 , G11B5/1278 , G11B5/3163 , Y10T29/49032
摘要： A method of manufacturing a thin-film magnetic head structure comprises the steps of preparing an insulating layer 10; forming a first resist layer 51 provided with a first slit pattern 51a corresponding to a very narrow groove part and a second slit pattern 51b corresponding to a temporary groove part integrally extending from the very narrow groove part along outer edges of a main depression onto the insulating layer 10; etching the insulating layer 10 while using the first resist layer 51 as a mask; eliminating the first resist layer 51; forming a second resist layer having an opening pattern corresponding to the main depression onto the insulating layer 10; and etching the insulating layer 10 while using the second resist layer as a mask.
摘要翻译：制造薄膜磁头结构的方法包括制备绝缘层10的步骤; 形成第一抗蚀剂层51，该第一抗蚀剂层51具有对应于非常窄的槽部分的第一狭缝图案51a和对应于从非常窄的槽部分沿着主凹陷的外边缘整体延伸到绝缘体上的临时槽部分的第二狭缝图案51b 第10层; 在使用第一抗蚀剂层51作为掩模的同时蚀刻绝缘层10; 消除第一抗蚀剂层51; 在所述绝缘层10上形成具有与所述主凹部对应的开口图案的第二抗蚀剂层; 并且在使用第二抗蚀剂层作为掩模的同时蚀刻绝缘层10。

8. 发明授权

US08169740B2 Thin-film magnetic head structure and thin-film magnetic head 有权
标题翻译：薄膜磁头结构和薄膜磁头
公开(公告)号：US08169740B2
公开(公告)日：2012-05-01
申请号：US12232723
申请日：2008-09-23
申请人： Yoshitaka Sasaki , Hiroyuki Ito , Takehiro Kamigama , Tatsushi Shimizu , Hironori Araki , Shigeki Tanemura , Kazuo Ishizaki
发明人： Yoshitaka Sasaki , Hiroyuki Ito , Takehiro Kamigama , Tatsushi Shimizu , Hironori Araki , Shigeki Tanemura , Kazuo Ishizaki
IPC分类号： G11B5/127
CPC分类号： G11B5/3116 , G11B5/1278 , G11B5/3163 , Y10T29/49032
摘要： A thin-film magnetic head including a main magnetic pole layer having a magnetic pole end part on a side of a medium-opposing surface opposing a recording medium; a write shield layer opposing the magnetic pole end part to form a recording gap layer on the medium-opposing surface side; a thin-film coil wound about the write shield layer or the main magnetic pole layer; and a base insulating layer formed with a magnetic pole forming depression, including a very narrow groove defining a form of the magnetic pole end part and a main depression integrally extending from an end part of the very narrow groove remote from the medium-opposing surface. A stepped part is formed at a boundary between a bottom face of the main depression and a bottom face of the very narrow groove. The main magnetic pole layer is the only magnetically functional layer in the depression.
摘要翻译：一种薄膜磁头，包括：主磁极层，在与记录介质相对的介质相对表面的一侧上具有磁极端部; 与所述磁极端部相对的写入屏蔽层，以在所述介质相对表面侧上形成记录间隙层; 围绕写入屏蔽层或主磁极层缠绕的薄膜线圈; 以及形成有磁极形成凹部的基底绝缘层，包括限定磁极端部的形式的非常窄的槽，以及从非常窄的槽的远离介质相对表面的端部整体延伸的主凹部。在主凹陷的底面和非常窄的凹槽的底面之间的边界处形成台阶部分。主磁极层是凹陷中唯一的磁性功能层。

9. 发明申请

US20090042143A1 Thin-film magnetic head structure, method of manufacturing the same, and thin-film magnetic head 失效
公开(公告)号：US20090042143A1
公开(公告)日：2009-02-12
申请号：US12232722
申请日：2008-09-23
申请人： Yoshitaka Sasaki , Hiroyuki Ito , Takehiro Kamigama , Tatsushi Shimizu , Hironori Araki , Shigeki Tanemura , Kazuo Ishizaki
发明人： Yoshitaka Sasaki , Hiroyuki Ito , Takehiro Kamigama , Tatsushi Shimizu , Hironori Araki , Shigeki Tanemura , Kazuo Ishizaki
IPC分类号： G03F7/20
CPC分类号： G11B5/3116 , G11B5/1278 , G11B5/3163 , Y10T29/49032
摘要： A method of manufacturing a thin-film magnetic head structure comprises the steps of preparing an insulating layer 10; forming a first resist layer 51 provided with a first slit pattern 51a corresponding to a very narrow groove part and a second slit pattern 51b corresponding to a temporary groove part integrally extending from the very narrow groove part along outer edges of a main depression onto the insulating layer 10; etching the insulating layer 10 while using the first resist layer 51 as a mask; eliminating the first resist layer 51; forming a second resist layer having an opening pattern corresponding to the main depression onto the insulating layer 10; and etching the insulating layer 10 while using the second resist layer as a mask.

10. 发明授权

US08043515B2 Thin film magnetic head and manufacturing method thereof 有权
标题翻译：薄膜磁头及其制造方法
公开(公告)号：US08043515B2
公开(公告)日：2011-10-25
申请号：US12252411
申请日：2008-10-16
申请人： Yoshitaka Sasaki , Hiroyuki Itoh , Takehiro Kamigama , Tatsushi Shimizu
发明人： Yoshitaka Sasaki , Hiroyuki Itoh , Takehiro Kamigama , Tatsushi Shimizu
IPC分类号： B44C1/22
CPC分类号： G11B5/3116 , G11B5/1278
摘要： A thin film magnetic head has a configuration in which a main magnetic pole film having a magnetic pole end portion on a medium opposing surface (ABS) side facing a magnetic disk, a write shield film facing the magnetic pole end portion so as to form a recording gap film on the medium opposing surface side, and a thin film coil wound around at least a part of the write shield film are laminated. Further, the thin film magnetic head has an upper yoke magnetic pole film whose size is larger than that of the main magnetic pole film at a part more distant from the ABS than the recording gap film, and this upper yoke magnetic pole film is bonded to the side of the main magnetic pole film close to the thin film coil. In the upper yoke magnetic pole film, an end portion on the ABS side is retracted in a direction apart from the ABS in accordance with an increase in film thickness which is measured from the surface of the main magnetic pole film.
摘要翻译：薄膜磁头具有这样的结构，其中在与磁盘相对的介质相对表面（ABS）侧上具有磁极端部的主磁极膜，面对磁极端部的写入屏蔽膜以形成记录间隙膜在介质相对表面侧上，并且缠绕在写保护膜的至少一部分上的薄膜线圈。此外，薄膜磁头具有比记录间隙膜更远离ABS的部分的尺寸大于主磁极膜的上磁轭磁极膜，并且该上磁轭磁极膜粘合到主磁极膜的一侧靠近薄膜线圈。在上磁轭磁极膜中，根据从主磁极膜的表面测量的膜厚度的增加，ABS侧的端部沿与ABS隔离的方向缩回。

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