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1. 发明授权

US06839124B2 Projection aligner 失效
标题翻译：投影对准器
公开(公告)号：US06839124B2
公开(公告)日：2005-01-04
申请号：US10327947
申请日：2002-12-26
申请人： Yoshinori Kobayashi , Shigetomo Ishibashi , Masato Hara
发明人： Yoshinori Kobayashi , Shigetomo Ishibashi , Masato Hara
IPC分类号： G03F7/20 , G03F9/00 , G03B27/42 , G01B11/00 , G03B27/54
CPC分类号： G03F7/70225 , G03F7/70258 , G03F7/70275 , G03F7/70466 , G03F7/70475 , G03F7/70791 , G03F9/7003
摘要： A projection aligner scans a plurality of light beams over a mask in a main scanning direction to transfer an image of a mask pattern on an object by the light beams passed through the mask. The projection aligner has a plurality of optical systems for projecting light beams passed through the mask onto the object. Each of the optical system includes a lens unit, a reflector provided to one side of the lens unit and a deflector provided to the other side of the lens unit. The light beam passed through the mask is deflected by the deflector, passes through the lens unit, reflected back by the reflector, passes through the lens unit again, and deflected by the deflector toward the object. The size of the image formed by the light beam is varied by moving the reflector in the main scanning direction and moving the deflector in a direction perpendicular to the object. The location of the image on the object in the auxiliary direction is adjusted by further moving the reflector in the auxiliary direction.
摘要翻译：投影对准器在主扫描方向上扫描掩模上的多个光束，以通过通过掩模的光束将掩模图案的图像转印到物体上。投影对准器具有多个光学系统，用于将通过掩模的光束投射到物体上。每个光学系统包括透镜单元，设置在透镜单元的一侧的反射器和设置在透镜单元的另一侧的偏转器。穿过掩模的光束被偏转器偏转，穿过透镜单元，被反射器反射回来，再次穿过透镜单元，并且被偏转器偏转到物体。通过在主扫描方向上移动反射器并使偏转器沿垂直于物体的方向移动来改变由光束形成的图像的大小。通过在辅助方向上进一步移动反射器来调整图像在辅助方向上的位置。

2. 发明授权

US06807013B2 Projection aligner 失效
标题翻译：投影对准器
公开(公告)号：US06807013B2
公开(公告)日：2004-10-19
申请号：US10327901
申请日：2002-12-26
申请人： Yoshinori Kobayashi , Shigetomo Ishibashi , Masato Hara
发明人： Yoshinori Kobayashi , Shigetomo Ishibashi , Masato Hara
IPC分类号： G02B1514
CPC分类号： G03F7/70225 , G03B27/42 , G03F7/70258 , G03F7/70275 , G03F7/70466 , G03F7/70475 , G03F7/70791 , G03F9/7003
摘要： The projection aligner for transferring an image of a mask pattern of a mask onto an object to be exposed comprises a projection optical system that forms the image of the mask pattern onto the object, an expansion ratio determiner that measures lengths of the object in first and second directions and determines first and second expansion ratios, which are expansion ratios of the object in the first and second directions, respectively, based on those lengths, and a magnification controller that adjusts the magnification of the projection optical system to a value between the first and second expansion ratios.
摘要翻译：用于将掩模的掩模图案的图像转印到要曝光的对象上的投影对准器包括将掩模图案的图像形成在对象上的投影光学系统，测量物体的长度的扩张比确定器，第二方向，并且基于这些长度分别确定第一和第二方向上的物体的膨胀比的第一和第二膨胀比;以及放大控制器，其将投影光学系统的倍率调整为第一和第二和第二扩张比。

3. 发明授权

US06727979B2 Projection aligner 有权
标题翻译：投影对准器
公开(公告)号：US06727979B2
公开(公告)日：2004-04-27
申请号：US10339301
申请日：2003-01-10
申请人： Yoshinori Kobayashi , Shigetomo Ishibashi , Masato Hara
发明人： Yoshinori Kobayashi , Shigetomo Ishibashi , Masato Hara
IPC分类号： G03B2742
CPC分类号： G03B27/52
摘要： The projection aligner transfers the image of the pattern formed on the mask to the object by scanning a light beam across the mask and the object. The projection aligner includes a driving mechanism for synchronously moving the mask and the object and thereby scanning the light beam across the mask and the object in a predetermined beam scanning direction. The light beam scanning the mask passes through the mask and is projected onto the object by a projection optical system of which magnification is adjusted by a magnification adjusting mechanism. The magnification adjusting mechanism and the driving mechanism are controlled by a controller such that the difference between the magnification of said projection optical system and a velocity ratio of the mask and the object moved by the driving mechanism becomes below a predetermined maximum value which is determined based on a line width of the pattern formed on the mask.
摘要翻译：投影对准器通过扫描光束穿过掩模和物体将形成在掩模上的图案的图像转移到物体上。投影对准器包括用于同步移动掩模和物体的驱动机构，从而以预定的光束扫描方向扫描光束穿过掩模和物体。扫描掩模的光束通过掩模，并通过投影光学系统投影到物体上，投影光学系统通过放大调节机构来调节放大倍率。放大调节机构和驱动机构由控制器控制，使得所述投影光学系统的放大率与由驱动机构移动的掩模和物体的速度比之间的差异变得低于基于确定的预定最大值在形成在掩模上的图案的线宽上。

4. 发明授权

US06853441B2 Projection aligner 失效
标题翻译：投影对准器
公开(公告)号：US06853441B2
公开(公告)日：2005-02-08
申请号：US10327946
申请日：2002-12-26
申请人： Yoshinori Kobayashi , Shigetomo Ishibashi , Masato Hara
发明人： Yoshinori Kobayashi , Shigetomo Ishibashi , Masato Hara
IPC分类号： G03B27/42 , G03F7/20 , G03F9/00 , G03B27/52 , G03B27/54 , G03B27/70
CPC分类号： G03F7/70225 , G03B27/42 , G03F7/70258 , G03F7/70275 , G03F7/70466 , G03F7/70475 , G03F7/70791 , G03F9/7003
摘要： The projection aligner transfers a mask pattern formed on a mask to a substrate. A collimated light beam is emitted from a light source toward the mask. The light beam passed through the mask is deflected by a first mirror formed on a deflector toward a lens unit having a positive power. A reflector is provided at the other side of the lens unit to reflect back the light beam passed through the lens unit. The light beam reflected by the reflector passed through the lend unit again and then deflected by a second mirror formed on the deflector toward the substrate to form an image of the mask pattern. The size of the image formed on the substrate is adjusted by moving the reflector along the optical axis of the lens unit, and the deflector along the optical path of the light beam passed through the mask.
摘要翻译：投影对准器将形成在掩模上的掩模图案转印到基板上。从光源朝向掩模发射准直光束。通过掩模的光束被形成在偏转器上的第一反射镜朝向具有正光焦度的透镜单元偏转。反射器设置在透镜单元的另一侧，以反射穿过透镜单元的光束。由反射镜反射的光束再次穿过借用单元，然后由形成在偏转器上的第二反射镜朝向衬底偏转以形成掩模图案的图像。通过沿着透镜单元的光轴移动反射器并且沿着光束的光路穿过掩模来调整形成在基板上的图像的尺寸。

5. 发明申请

US20100052648A1 DRIVE CIRCUIT 有权
标题翻译：驱动电路
公开(公告)号：US20100052648A1
公开(公告)日：2010-03-04
申请号：US11993043
申请日：2006-05-01
申请人： Akio Iwabuchi , Masato Hara
发明人： Akio Iwabuchi , Masato Hara
IPC分类号： H02M3/156
CPC分类号： H02M7/538 , H03K17/063 , H03K2217/0036 , H03K2217/0081
摘要： A drive circuit for a switching circuit has a high-side drive circuit to turn on/off, according to a control signal, a switching element QH arranged on a high side of a DC power source Vin and a low-side drive circuit to turn on/off alternately with the switching element QH according to the control signal a switching element QL arranged on a low side of the DC power source and connected in series with the switching element QH. Ends of an auxiliary power source Vcc1 are connected in series with a switch element Qn1, a capacitor C1, and a switch element Qn2. Both ends of the capacitor C1 are connected in series with a switch element Qp1, a capacitor C2, and a switch element Qp2. A control circuit alternately turns on/off the switch elements Qn1 and Qn2 and the switch elements Qp1 and Qp2. The capacitor C2 provides the high-side drive circuit with source power.
摘要翻译：用于开关电路的驱动电路具有高侧驱动电路，其根据控制信号来接通/断开，布置在直流电源Vin的高侧的开关元件QH和用于转动的低侧驱动电路与开关元件QH交替地与开关元件QH根据控制信号配置在直流电源的低侧并与开关元件QH串联连接的开关元件QL。辅助电源Vcc1的端部与开关元件Qn1，电容器C1和开关元件Qn2串联连接。电容器C1的两端与开关元件Qp1，电容器C2和开关元件Qp2串联连接。控制电路交替地接通/断开开关元件Qn1和Qn2以及开关元件Qp1和Qp2。电容器C2为高边驱动电路提供源电源。

6. 发明授权

US06434263B1 Optical member inspecting apparatus and method of inspection thereof 失效
标题翻译：光学元件检查装置及其检查方法
公开(公告)号：US06434263B1
公开(公告)日：2002-08-13
申请号：US09579804
申请日：2000-05-26
申请人： Toshihiro Nakayama , Masato Hara , Masayuki Sugiura , Atsushi Kida
发明人： Toshihiro Nakayama , Masato Hara , Masayuki Sugiura , Atsushi Kida
IPC分类号： G06K900
CPC分类号： G01M11/0264 , G01M11/0278
摘要： An optical member inspection apparatus includes an inspection optical system having a light source, and a diffusing means for diffusing the light emitted from the light source. The diffusing means has a central portion and a peripheral portion. The diffusion transmittance of the peripheral portion is higher than the diffusion transmittance of the central portion. The inspection optical system is also provided with an image pick-up means to pick-up an image of the optical member to be inspected, and is positioned so as, to receive that light emitted from the light source and transmitted through the diffusing means and the optical member. A judging means is also provided, for judging whether or not the optical member has a defect, in accordance with image signals output from the image pick-up means.
摘要翻译：光学构件检查装置包括具有光源的检查光学系统和用于漫射从光源发射的光的漫射装置。扩散装置具有中心部分和周边部分。周边部分的扩散透射率高于中心部分的扩散透射率。检查光学系统还设置有用于拾取要检查的光学构件的图像的图像拾取装置，并且被定位成接收从光源发射并透射通过漫射装置的光，光学构件。还根据从摄像装置输出的图像信号，提供判断装置，用于判断光学构件是否具有缺陷。

7. 发明授权

US06427023B1 Optical member inspecting apparatus and method of inspection thereof 失效
公开(公告)号：US06427023B1
公开(公告)日：2002-07-30
申请号：US09580003
申请日：2000-05-26
申请人： Toshihiro Nakayama , Masato Hara , Masayuki Sugiura , Atsushi Kida
发明人： Toshihiro Nakayama , Masato Hara , Masayuki Sugiura , Atsushi Kida
IPC分类号： G06K900
CPC分类号： G01M11/0264 , G01M11/0278
摘要： An optical member inspection apparatus includes an inspection optical system having a light source, and a diffusing means for diffusing the light emitted from the light source. The diffusing means has a central portion and a peripheral portion. The diffusion transmittance of the peripheral portion is higher than the diffusion transmittance of the central portion. The inspection optical system is also provided with an image pick-up means to pick-up an image of the optical member to be inspected, and is positioned so as to receive that light emitted from the light source and transmitted through the diffusing means and the optical member. A judging means is also provided, for judging whether or not the optical member has a defect, in accordance with image signals output from the image pick-up means.

8. 发明授权

US5838431A Laser marking device 失效
标题翻译：激光打标机
公开(公告)号：US5838431A
公开(公告)日：1998-11-17
申请号：US783006
申请日：1997-01-14
申请人： Masato Hara , Satoshi Takami , Teruo Sakai , Noriaki Takahashi , Eiichi Ito
发明人： Masato Hara , Satoshi Takami , Teruo Sakai , Noriaki Takahashi , Eiichi Ito
IPC分类号： G01C15/00 , G01B11/26 , G01C5/02
CPC分类号： G01C15/004 , Y10S33/21
摘要： The laser marking device comprises a laser source, an optical system for projecting a laser beam emitted from the laser source to form a laser spot on an object, a light distributing element that is disposed in an optical path of the optical system and includes at least one light distributing portion that distributes a part of the laser beam to form at least one static reference line on the object so that the laser spot is formed on the static reference line, a rotating mechanism that rotates at least a part of the optical system to form a dynamic reference on the object, and a switch for selecting between a rotation mode in which the rotating mechanism is activated and a stationary mode in which said rotating mechanism is not activated.
摘要翻译：激光打标装置包括激光源，用于投射从激光源发射的激光束以在物体上形成激光光点的光学系统，配置在光学系统的光路中的光分布元件，至少包括一个光分布部分，其分布所述激光束的一部分以在所述物体上形成至少一个静态参考线，使得所述激光光斑形成在所述静态参考线上;旋转机构，其使所述光学系统的至少一部分旋转到在物体上形成动态参考，以及用于在其中启动旋转机构的旋转模式和其中所述旋转机构未被激活的静止模式之间进行选择的开关。

9. 发明授权

US5026978A Photoelectric switch having pulse driver circuitry 失效
标题翻译：具有脉冲驱动电路的光电开关
公开(公告)号：US5026978A
公开(公告)日：1991-06-25
申请号：US468091
申请日：1990-01-22
申请人： Fumihiko Misumi , Masazumi Ueda , Masato Hara , Yutaka Matsui , Kiyoshi Imai
发明人： Fumihiko Misumi , Masazumi Ueda , Masato Hara , Yutaka Matsui , Kiyoshi Imai
IPC分类号： H03K17/78 , H04B10/50
CPC分类号： H04B10/502 , H03K17/78
摘要： A light projecting circuit of a photoelectric switch includes a light projecting element (2), a driver circuit (1, 3) for driving the light projecting element by use of pulses, and a change-over switch (4) for increasing or for decreasing an amount of light emitted from the light projecting element. With this provision, in an operation to adjust optical axes, the change-over switch can be used to increase the amount of the emitted light. Consequently, the position of the projected light beam can be easily confirmed.

10. 发明授权

US4883955A Optical encoder with converging means 失效
标题翻译：具有会聚手段的光学编码器
公开(公告)号：US4883955A
公开(公告)日：1989-11-28
申请号：US160320
申请日：1988-02-25
申请人： Harumi Kawasaki , Masato Hara
发明人： Harumi Kawasaki , Masato Hara
IPC分类号： G01D5/36
CPC分类号： G01D5/36
摘要： An optical encoder comprises a measuring section and a scanning grating plate. The measuring section comprises parallel light beam sources, light receiving elements located in opposition to the parallel light beam sources, converging devices disposed between the parallel light beam sources and the light receiving elements and a main grating plate arranged between the converging devices and the light receiving elements. The scanning grating plate is located between the main grating plate and the light receiving elements while allowing the scanning grating plate to move relative to the measuring section.
摘要翻译：光学编码器包括测量部分和扫描光栅板。测量部分包括平行光束源，与平行光束源相对的光接收元件，设置在平行光束源和光接收元件之间的会聚装置以及设置在会聚装置与光接收之间的主光栅板元素。扫描光栅板位于主光栅板和光接收元件之间，同时允许扫描光栅板相对于测量部分移动。

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