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    • 5. 发明授权
    • Pressure sensor
    • 压力传感器
    • US07703329B2
    • 2010-04-27
    • US11630015
    • 2005-06-13
    • Masashi SekineHidefumi Harada
    • Masashi SekineHidefumi Harada
    • G01L9/00
    • G01L9/0073
    • There is provided a pressure sensor having: a sensor chip (30) which detects a pressure; a base plate (20 (21, 22)) which supports the sensor chip (30); and a support diaphragm (50) which is bonded to the base plate (20 (21, 22)) and supports the base plate (20 (21, 22)), wherein the pressure sensor (1) has a structure in which the support diaphragm (50) is joined to a package (10), and the sensor chip (30) and the base plate (20 (21, 22)) are supported in the package through the support diaphragm (50) alone, thereby constantly and accurately detecting a pressure without being affected by a heat stress caused due to heat from the outside.
    • 提供了一种压力传感器,其具有:检测压力的传感器芯片(30); 支撑所述传感器芯片(30)的基板(20(21,22))。 以及支撑隔膜(50),其接合到所述基板(20(21,22))并支撑所述基板(20,22,22)),其中,所述压力传感器(1)具有这样的结构, 膜片(50)与包装体(10)接合,传感器芯片(30)和基板(20,22,21)通过支撑膜片(50)单独地支撑在包装体中,从而不断地和准确地 检测压力而不受由于来自外部的热量引起的热应力的影响。
    • 10. 发明授权
    • Pressure sensor device
    • 压力传感器装置
    • US08763467B2
    • 2014-07-01
    • US13419543
    • 2012-03-14
    • Takuya IshiharaHidefumi HaradaMasashi Sekine
    • Takuya IshiharaHidefumi HaradaMasashi Sekine
    • G01L9/12G01L9/00
    • G01L9/12G01L9/0044G01L9/0072G01L19/0084G01L19/0618G01L19/0636
    • A pressure sensor device has a sensor detecting pressure of a gas that is introduced from the outside, a heater for heating the sensor, a package containing the sensor and the heater, a circuit portion producing an output signal that represents the pressure of the gas based on the detection output detected by the sensor, and a circuit containing portion containing the circuit portion. The package and the circuit containing portion are structured from separate cases and are disposed separately with a connecting structural member interposed therebetween. The connecting structural member 90 includes electrode lead pins connecting between the sensor within the package and the circuit portion within the circuit containing portion, insulated pipes for covering the outer peripheries of the electrode lead pins, and coil springs covering the outer peripheries of the insulated pipes.
    • 压力传感器装置具有检测从外部引入的气体的压力的传感器,用于加热传感器的加热器,包含传感器和加热器的封装,产生表示基于气体的压力的输出信号的电路部分 在由传感器检测到的检测输出上,以及包含电路部分的电路容纳部分。 封装和电路容纳部分由独立的壳体构成,并且分别设置有插入其间的连接结构构件。 连接结构件90包括连接在封装内的传感器与电路容纳部分内的电路部分之间的电极引脚,用于覆盖电极引脚的外周的绝缘管和覆盖绝缘管的外周的螺旋弹簧 。