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1. 发明申请

US20100220569A1 FINAL AREA RETRIEVING APPARATUS, INFORMATION REPRODUCING APPARATUS, FINAL AREA RETRIEVING METHOD, AND FINAL AREA RETRIEVING PROGRAM 审中-公开
标题翻译：最终区域检索设备，信息再现设备，最终区域检索方法和最终区域检索程序
公开(公告)号：US20100220569A1
公开(公告)日：2010-09-02
申请号：US12159483
申请日：2006-12-07
申请人： Takaaki Ujiie , Yoshimichi Nishio , Yoshihiro Hashizuka , Hideaki Tsurumi , Hiroyuki Enomoto , Hideyasu Iwano , Chikashi Kuwahara , Manabu Shimodaira , Hiroshi Someya , Hidetaka Urabe
发明人： Takaaki Ujiie , Yoshimichi Nishio , Yoshihiro Hashizuka , Hideaki Tsurumi , Hiroyuki Enomoto , Hideyasu Iwano , Chikashi Kuwahara , Manabu Shimodaira , Hiroshi Someya , Hidetaka Urabe
IPC分类号： G11B27/36
CPC分类号： G11B20/10 , G11B2020/10916 , G11B2020/1235 , G11B2020/1267 , G11B2220/2537 , G11B2220/65
摘要： A final area retrieving apparatus, an information reproducing apparatus, a final area retrieving method, and a final area retrieving program are provided, which are capable of decreasing a period of time necessary for acquiring information necessary for reproduction of optical disc.When a final area of optical disc D is retrieved, a system control unit 6 stores a start address of the area, and the like in a flash memory 5. When the optical disc D is inserted again, and a final area is newly retrieved, it is determined whether a final area retrieved at the last time exists on the optical disc D, based on a starting address of final area stored in the flash memory 5. In a case where it is determined that a final area retrieved at the last time exists on the optical disc D, the acquisition of start address of next area, and the like is started from a final area retrieved at the last time, and a final area is retrieved.
摘要翻译：提供了最终区域检索装置，信息再现装置，最终区域检索方法和最终区域检索程序，其能够减少获取光盘再现所需的信息所需的时间。当检索到光盘D的最后区域时，系统控制单元6将闪存5中的该区域的起始地址等存储在闪存5中。当再次插入光盘D并且重新检索最终区域时，基于存储在闪速存储器5中的最终区域的起始地址，确定在光盘D上是否存在最后检索的最终区域。在确定在最后一次检索到的最后区域的情况下存在于光盘D上，从最后检索的最终区域开始获取下一区域的起始地址等，并且检索最终区域。

2. 发明申请

US20090310466A1 OBJECTIVE LENS DRIVING DEVICE AND DRIVING METHOD FOR THE SAME 审中-公开
标题翻译：目标镜头驱动装置及其驱动方法
公开(公告)号：US20090310466A1
公开(公告)日：2009-12-17
申请号：US12096108
申请日：2006-12-08
申请人： Yoshimichi Nishio , Chikashi Kuwahara , Takaaki Ujiie , Hiroshi Someya , Hidetaka Urabe , Yoshihiro Hashizuka , Hideyasu Iwano , Hiroyuki Enomoto , Hideaki Tsurumi , Manabu Shimodaira
发明人： Yoshimichi Nishio , Chikashi Kuwahara , Takaaki Ujiie , Hiroshi Someya , Hidetaka Urabe , Yoshihiro Hashizuka , Hideyasu Iwano , Hiroyuki Enomoto , Hideaki Tsurumi , Manabu Shimodaira
IPC分类号： G11B7/135
CPC分类号： G11B7/08511
摘要： [Problems] In an objective lens driving device used for an optical disc and the like, a moving speed of the objective lens is changed corresponding to amount of vertical deviation of the optical disc, and when the vertical deviation is small, time for aligning the focus is reduced.[Means for Solving Problems] In a case that an objective lens is moved from a bottom limit to an upper limit in a specific range for aligning the focus, when the objective lens is positioned nearer a point (basic focusing position) where light is focused on an optical disc 11 having no vertical deviation than a position away from the basic focusing position, the servo signal processor 5 moves the objective lens faster.
摘要翻译： [问题]在用于光盘等的物镜驱动装置中，物镜的移动速度根据光盘的垂直偏差量而改变，当垂直偏差小时，重点减少。 [解决问题的手段]在物镜在用于对准焦点的特定范围内从底限移动到上限的情况下，当物镜位于更靠近光的聚焦位置（基本聚焦位置）时在没有垂直偏离比离开基本聚焦位置的位置的光盘11上，伺服信号处理器5更快地移动物镜。

3. 发明申请

US20100172222A1 INFORMATION REPRODUCING APPARATUS, SERVO ADJUSTING METHOD, AND THE LIKE 审中-公开
标题翻译：信息再现装置，伺服调整方法等
公开(公告)号：US20100172222A1
公开(公告)日：2010-07-08
申请号：US12160730
申请日：2007-01-10
申请人： Yoshihiro Hashizuka , Yoshimichi Nishio , Hiroyuki Kobayashi , Hiroki Goto , Hideaki Tsurumi , Takaaki Ujiie , Hiroshi Someya , Manabu Shimodaira , Hidetaka Urabe
发明人： Yoshihiro Hashizuka , Yoshimichi Nishio , Hiroyuki Kobayashi , Hiroki Goto , Hideaki Tsurumi , Takaaki Ujiie , Hiroshi Someya , Manabu Shimodaira , Hidetaka Urabe
IPC分类号： G11B7/00
CPC分类号： G11B7/0945 , G11B7/094 , G11B7/0941 , G11B2007/0013
摘要： The present invention provides an information processing apparatus, a servo adjustment method, and the like realizing reduced time required for servo adjustment.An information reproducing apparatus according to the present invention is for reproducing information recorded on a recording medium having a plurality of recording layers.The apparatus includes: signal level measuring means for measuring a signal level of each of recording layers; and servo adjusting means for performing servo adjustment on at least one of the recording layers, storing a servo adjustment value in the servo adjustment, and in the case where the recorded information is reproduced from the recording layers, performing servo adjustment on the recording layers so as to become to the servo adjustment value.When a level ratio of signal levels of at least two recording layers in the measured signal levels of the recording layers lies in a threshold range, the servo adjusting means performs the servo adjustment on one of the recording layers, stores the servo adjustment value in the servo adjustment, and in the case where the recorded information is reproduced from the other recording layer, performs the servo adjustment on the other recording layer so as to become to the servo adjustment value for one recording layer.
摘要翻译：本发明提供一种实现伺服调整所需时间缩短的信息处理装置，伺服调整方法等。根据本发明的信息再现装置用于再现记录在具有多个记录层的记录介质上的信息。该装置包括：用于测量每个记录层的信号电平的信号电平测量装置; 以及用于在至少一个记录层上执行伺服调整的伺服调整装置，在伺服调整中存储伺服调整值，并且在记录层再现记录信息的情况下，对记录层进行伺服调整，成为伺服调整值。当记录层的测量信号电平中的至少两个记录层的信号电平的电平比在阈值范围内时，伺服调整装置在其中一个记录层上执行伺服调节，将伺服调整值存储在伺服调整，并且在从另一个记录层再现记录信息的情况下，在另一个记录层上进行伺服调整，使其成为一个记录层的伺服调整值。

4. 发明申请

US20080117784A1 Boundary Detection Apparatus, Boundary Detection Method, Boundary Detection Program, and Information Recording Medium 审中-公开
标题翻译：边界检测装置，边界检测方法，边界检测程序和信息记录介质
公开(公告)号：US20080117784A1
公开(公告)日：2008-05-22
申请号：US11791639
申请日：2005-11-24
申请人： Yoshimichi Nishio , Takaaki Ujiie , Hiroshi Someya , Yoshihiro Hashizuka , Hiroki Goto , Hideaki Tsurumi
发明人： Yoshimichi Nishio , Takaaki Ujiie , Hiroshi Someya , Yoshihiro Hashizuka , Hiroki Goto , Hideaki Tsurumi
IPC分类号： G11B5/58
CPC分类号： G11B7/085 , G11B7/0948 , G11B7/0953
摘要： A boundary detection apparatus is provided that can quickly and accurately detect an end of a recorded area even if there is a defect caused by a scratch or a extraneous matter adhered on the recording face of a CD, or the CD itself is decentered.When it is detected that information is recorded at a predetermined dividing point B, a pickup is moved to a dividing point C located ahead seen from the dividing point B after moving. On the other hand, when it is detected that information is not recorded at the dividing point B, the pickup is moved to a dividing point A located on the opposite side from the dividing point B, and the pickup is further moved after the end containing range is ultimately determined. Thus, an end is detected.
摘要翻译：即使存在由附着在CD的记录面上的划痕或外来物质造成的缺陷，或者CD本身偏心，也能够快速，准确地检测记录区域的结束的边界检测装置。当检测到信息被记录在预定分割点B时，拾取器移动到移动之后从分割点B看到的分割点C. 另一方面，当检测到在分割点B处没有记录信息时，拾取器被移动到位于与分割点B相反的一侧的分割点A，并且拾取器在包含范围最终确定。因此，检测到结束。

5. 发明授权

US08536550B2 Method and apparatus for cleaning collector mirror in EUV light generator 有权
标题翻译：在EUV光发生器中清洁集光镜的方法和装置
公开(公告)号：US08536550B2
公开(公告)日：2013-09-17
申请号：US12478083
申请日：2009-06-04
申请人： Takeshi Asayama , Hiroshi Someya , Masato Moriya , Hideo Hoshino , Tamotsu Abe
发明人： Takeshi Asayama , Hiroshi Someya , Masato Moriya , Hideo Hoshino , Tamotsu Abe
IPC分类号： B08B7/00
CPC分类号： B08B7/00 , B08B7/0035 , B08B13/00
摘要： A method for cleaning collector mirrors in an EUV light generator in which a target is made into a plasma state and EUV light generated is collected by a collector mirror, the method being adopted to the EUV light generator for cleaning contaminants adhering thereto, the method comprising: preparing at least two collector mirrors; locating one of the mirrors at an EUV light condensing position while locating the other mirror at a cleaning position; determining whether the mirror at the cleaning position is cleaned while determining whether the mirror at the light condensing position requires cleaning; and once determined that the mirror at the cleaning position is cleaned and the mirror at the light condensing position requires cleaning, conveying the mirror at the light condensing position and requiring cleaning to the cleaning position while conveying the mirror at the cleaning position and having been cleaned to the light condensing position.
摘要翻译：一种在EUV光发生器中清洁收集反射镜的方法，其中靶产生等离子体状态，并且通过集光镜收集产生的EUV光，该方法被用于EUV发光器，用于清除附着在其上的污染物，该方法包括：准备至少两个收集镜; 将其中一个反射镜定位在EUV聚光位置，同时将另一个反射镜定位在清洁位置; 确定在清洁位置处的反射镜是否被清洁，同时确定在聚光位置的反射镜是否需要清洁; 并且一旦确定在清洁位置处的反射镜被清洁并且聚光位置处的反射镜需要清洁，则在反射镜处于聚光位置并且在将反射镜输送到清洁位置并且被清洁时需要清洁到清洁位置到聚光位置。

6. 发明授权

US08477412B2 Collector mirror exchanging apparatus and method for extreme ultraviolet light source apparatus 有权
标题翻译：用于极紫外光源装置的集光镜交换装置和方法
公开(公告)号：US08477412B2
公开(公告)日：2013-07-02
申请号：US11979513
申请日：2007-11-05
申请人： Hiroshi Someya , Tamotsu Abe , Takashi Suganuma , Hideo Hoshino , Akira Sumitani
发明人： Hiroshi Someya , Tamotsu Abe , Takashi Suganuma , Hideo Hoshino , Akira Sumitani
IPC分类号： G02B15/14
CPC分类号： G21K1/06 , B82Y10/00 , G02B7/18 , G02B7/183 , G02B13/14 , G02B15/14 , G02B15/173 , G03F1/146 , G03F1/22 , G03F7/70175 , G03F7/702 , G03F7/70975 , G21K1/10 , G21K2201/067 , H05G2/001 , Y10T29/49895 , Y10T29/53087 , Y10T29/53539
摘要： A collector mirror exchanging apparatus is capable of safely and easily exchanging a collector mirror for collecting extreme ultra violet light emitted from plasma generated within a chamber of an extreme ultra violet light source apparatus. The collector mirror exchanging apparatus includes: a supporting base for supporting a collector mirror or a collector mirror structure; and a guiding rail disposed on the supporting base and regulating a moving direction of the collector mirror or the collector mirror structure; wherein at least the collector mirror is taken out of the chamber by moving the collector mirror or the collector mirror structure along the guiding rail on the supporting base.
摘要翻译：集光镜交换装置能够安全且容易地交换收集器反射镜，用于收集从极紫外光源装置的室内产生的等离子体发出的极紫外光。集电镜更换装置包括：支撑集电镜或收集镜结构的支撑基座; 以及导轨，其设置在所述支撑基座上并且调节所述集光镜或所述集光镜结构的移动方向; 其特征在于，通过使所述集光镜或所述集光镜结构沿着所述支撑基座上的导轨移动，至少将所述集光镜从所述室取出。

7. 发明授权

US08258492B2 Differential evacuation system 有权
标题翻译：差分疏散系统
公开(公告)号：US08258492B2
公开(公告)日：2012-09-04
申请号：US12631258
申请日：2009-12-04
申请人： Hiroshi Someya , Yukio Watanabe
发明人： Hiroshi Someya , Yukio Watanabe
IPC分类号： G21G5/00
CPC分类号： G03F7/70841 , G03F7/70033 , G03F7/70808 , H05G2/003 , H05G2/008
摘要： [Technical Problem] To provide a differential evacuation system capable of easily maintaining, at a low cost, a large differential pressure between a light generation chamber and an illumination optical chamber in which optical processing, e.g. exposure, is performed by using extreme ultraviolet (EUV) light generated in the light generation chamber, and yet capable of sufficiently ensuring a desired optical path.[Solution to Problem] The differential evacuation system has a light generation chamber 10 that generates EUV light, an illumination optical chamber 100 in which optical processing is performed by using the EUV light generated in the light generation chamber 10, and a chamber connecting passage 150 that connects together the light generation chamber 10 and the illumination optical chamber 100 to guide the EUV light generated in the light generation chamber 10 into the illumination optical chamber 100. The chamber connecting passage 150 has a flow path constricting portion 151 and is increased in inner diameter in a conical tube shape at portions thereof that are at opposite sides, respectively, of the flow path constricting portion 151. An enlarged-diameter part 160 is provided at a position of the chamber connecting passage 150 that is closer to the light generation chamber 10, which is the higher in pressure of the two chambers 10 and 100, than the flow path constricting portion 151, and vacuum pumps 170 are attached to the enlarged-diameter part 160.
摘要翻译：技术问题提供一种能够以低成本容易地维持光生成室和照明光学室之间的大的压差的差分抽空系统，其中光学处理，例如，曝光是通过使用在光产生室中产生的极紫外（EUV）光进行的，并且能够充分确保期望的光路。 [问题的解决方案]差分抽空系统具有产生EUV光的光生成室10，通过使用在光生成室10中产生的EUV光进行光学处理的照明光学室100和室连接通路150 将光生成室10和照明光学室100连接在一起，将发光室10内产生的EUV光引导到照明光学室100中。室连通路150具有流路收缩部151，内部增大直径在分别位于流路收缩部151的相对侧的部分处的锥形管形状。扩径部160设置在室连接通道150的靠近光生成室的位置如图10所示，两个腔室10和100的压力比流路收缩部分151高，并且真空泵170附接到扩径部160。

8. 发明申请

US20100181498A1 Differential evacuation system 有权
标题翻译：差分疏散系统
公开(公告)号：US20100181498A1
公开(公告)日：2010-07-22
申请号：US12631258
申请日：2009-12-04
申请人： Hiroshi Someya , Yukio Watanabe
发明人： Hiroshi Someya , Yukio Watanabe
IPC分类号： G21K5/02
CPC分类号： G03F7/70841 , G03F7/70033 , G03F7/70808 , H05G2/003 , H05G2/008
摘要： [Technical Problem] To provide a differential evacuation system capable of easily maintaining, at a low cost, a large differential pressure between a light generation chamber and an illumination optical chamber in which optical processing, e.g. exposure, is performed by using extreme ultraviolet (EUV) light generated in the light generation chamber, and yet capable of sufficiently ensuring a desired optical path.[Solution to Problem] The differential evacuation system has a light generation chamber 10 that generates EUV light, an illumination optical chamber 100 in which optical processing is performed by using the EUV light generated in the light generation chamber 10, and a chamber connecting passage 150 that connects together the light generation chamber 10 and the illumination optical chamber 100 to guide the EUV light generated in the light generation chamber 10 into the illumination optical chamber 100. The chamber connecting passage 150 has a flow path constricting portion 151 and is increased in inner diameter in a conical tube shape at portions thereof that are at opposite sides, respectively, of the flow path constricting portion 151. An enlarged-diameter part 160 is provided at a position of the chamber connecting passage 150 that is closer to the light generation chamber 10, which is the higher in pressure of the two chambers 10 and 100, than the flow path constricting portion 151, and vacuum pumps 170 are attached to the enlarged-diameter part 160.
摘要翻译：技术问题提供一种能够以低成本容易地维持光生成室和照明光学室之间的大的压差的差分抽空系统，其中光学处理，例如，曝光是通过使用在光产生室中产生的极紫外（EUV）光进行的，并且能够充分确保期望的光路。 [问题的解决方案]差分抽空系统具有产生EUV光的光生成室10，通过使用在光生成室10中产生的EUV光进行光学处理的照明光学室100和室连接通路150 将光生成室10和照明光学室100连接在一起，将发光室10内产生的EUV光引导到照明光学室100中。室连通路150具有流路收缩部151，内部增大直径在分别位于流路收缩部151的相对侧的部分处的锥形管形状。扩径部160设置在室连接通道150的靠近光生成室的位置如图10所示，两个腔室10和100的压力比流路收缩部分151高，并且真空泵170附接到扩径部160。

9. 发明授权

US08445877B2 Extreme ultraviolet light source apparatus and target supply device 有权
标题翻译：极紫外光源设备和目标供应装置
公开(公告)号：US08445877B2
公开(公告)日：2013-05-21
申请号：US13081148
申请日：2011-04-06
申请人： Hiroshi Someya , Tamotsu Abe , Hideo Hoshino
发明人： Hiroshi Someya , Tamotsu Abe , Hideo Hoshino
IPC分类号： A61N5/06 , G01J3/10 , H05G2/00
CPC分类号： H05G2/003 , H05G2/006
摘要： A nozzle protection device capable of protecting a target nozzle from heat of plasma without disturbing formation of a stable flow of a target material in an LPP type EUV light source apparatus. This nozzle protection device includes a cooling unit which is formed with an opening for passing the target material therethrough, and which is formed with a flow path for circulating a cooling medium inside, and an actuator which changes a position or a shape of the cooling unit between a first state of evacuating the cooling unit from a trajectory of the target material and a second state of blocking heat radiation from the plasma to the nozzle by the cooling unit while securing a path of the target material in the cooling unit.
摘要翻译：一种喷嘴保护装置，其能够保护目标喷嘴免受等离子体的热量的干扰，而不会在LPP型EUV光源装置中形成稳定的目标材料流。该喷嘴保护装置包括冷却单元，该冷却单元形成有用于使目标材料通过的开口，并且其形成有用于使冷却介质在内部循环的流路;以及致动器，其改变冷却单元的位置或形状在从所述目标材料的轨迹排出所述冷却单元的第一状态和通过所述冷却单元阻止从所述等离子体到所述喷嘴的热辐射的第二状态之间，同时确保所述目标材料在所述冷却单元中的路径。

10. 发明申请

US20120228527A1 EXTREME ULTRA VIOLET LIGHT SOURCE APPARATUS 审中-公开
标题翻译：极光紫外线光源设备
公开(公告)号：US20120228527A1
公开(公告)日：2012-09-13
申请号：US13477940
申请日：2012-05-22
申请人： Tamotsu ABE , Toshihiro Nishisaka , Hiroshi Someya , Masato Moriya , Takeshi Asayama , Hideo Hoshino , Hakaru Mizoguchi
发明人： Tamotsu ABE , Toshihiro Nishisaka , Hiroshi Someya , Masato Moriya , Takeshi Asayama , Hideo Hoshino , Hakaru Mizoguchi
IPC分类号： G21K5/02
CPC分类号： H05G2/001 , G03F7/70033 , G03F7/70916
摘要： An extreme ultra violet light source apparatus prevents debris staying and accumulating within a chamber from contaminating the chamber and deteriorating the performance of an important optical component. The extreme ultra violet light source apparatus includes: a chamber in which extreme ultra violet light is generated; a driver laser for applying a laser beam to a target supplied to a predetermined position within the chamber to generate plasma; a collector mirror provided within the chamber, for collecting and outputting the extreme ultra violet light radiated from the plasma; an exhaust path communicating with the chamber and connected to an exhausting device, for maintaining an interior of the chamber at a certain pressure; a catching chamber provided in the exhaust path, for catching debris generated from the plasma; and a collecting unit for collecting the caught debris out of the chamber.
摘要翻译：极紫外光源装置可防止残留物积聚在室内，免受室内污染，降低重要光学元件的性能。极紫外光源装置包括：产生极紫外光的室; 用于将激光束施加到提供到所述室内的预定位置的目标以产生等离子体的驱动器激光器; 设置在室内的收集器反射镜，用于收集和输出从等离子体辐射的极紫外光; 与所述室连通并连接到排气装置的排气路径，用于将所述室的内部保持在一定压力; 设置在排气路径中的捕获室，用于捕获从等离子体产生的碎屑; 以及收集单元，用于将捕获的碎屑收集在室外。

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