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    • 1. 发明申请
    • FILM-FORMING METHOD, AND FILM FORMING DEVICE
    • 成膜方法和薄膜成型装置
    • US20090047418A1
    • 2009-02-19
    • US12185970
    • 2008-08-05
    • Hirotsuna MIURAYoshikazu HAMA
    • Hirotsuna MIURAYoshikazu HAMA
    • C23C14/54B05C11/00
    • B41J2/162G02F1/1303G02F1/133723
    • A film-forming method includes: a) discharging a liquid including a film material on an object so as to form a liquid film made of the liquid; b) measuring distribution of an optical constant related to a film thickness of a thin film by irradiating the liquid film with light from a first light source so as to detect light from the liquid film; and c) modulating light from a second light source corresponding to the optical constant of the liquid film based on converting data indicating a relation between the optical constant and light wave information of the light from the second light source while irradiating the liquid film with the light from the second light source so as to dry the liquid film to form the thin film on the object.
    • 一种成膜方法包括:a)将包含膜材料的液体排放到物体上,以形成由液体制成的液膜; b)通过用来自第一光源的光照射液膜来测量与薄膜的膜厚相关的光学常数的分布,以便检测来自液膜的光; 以及c)基于转换表示来自所述第二光源的光的光学常数和光波信息之间的关系的数据,同时用所述光照射所述液膜,调制来自与所述液膜的光学常数相对应的来自第二光源的光 从而将液膜干燥以在物体上形成薄膜。
    • 4. 发明申请
    • FILM-FORMING METHOD AND FILM-FORMING DEVICE
    • 薄膜成型方法和成膜装置
    • US20090047419A1
    • 2009-02-19
    • US12185972
    • 2008-08-05
    • Hirotsuna MIURAYoshikazu HAMA
    • Hirotsuna MIURAYoshikazu HAMA
    • C23C14/54B05C11/00
    • C03C17/002B41J2/162G02F1/1303G02F1/133723
    • A film-forming method includes: a) discharging a liquid including a film material on an object so as to form a liquid film made of the liquid; b) irradiating the liquid film with light and thus detecting light from the liquid film so as to measure distribution of an optical constant, which is related to a film thickness of a thin film, with respect to the liquid film; and c) drying the liquid film on the object so as to form the thin film by converting the distribution of the optical constant into distribution of a temperature of the liquid film based on converting information that relates the optical constant of the liquid film to the temperature of the liquid film and thus forming the distribution of the temperature on the liquid film.
    • 一种成膜方法包括:a)将包含膜材料的液体排放到物体上,以形成由液体制成的液膜; b)用光照射液膜,从而检测来自液膜的光,以便测量与薄膜相对于液膜的光学常数的分布; 以及c)通过将所述液膜的光学常数的转换信息转换成与所述液膜的光学常数相关的转换信息,将所述光学常数的分布转换成所述液膜的温度分布来形成所述薄膜,从而形成所述薄膜 从而形成液膜上的温度分布。
    • 6. 发明申请
    • FILM FORMATION METHOD AND ORIENTATION FILM FORMATION METHOD
    • 电影形成方法和方位膜形成方法
    • US20080187653A1
    • 2008-08-07
    • US12019995
    • 2008-01-25
    • Katsumi SUZUKIKohei ISHIDAYoshikazu HAMA
    • Katsumi SUZUKIKohei ISHIDAYoshikazu HAMA
    • B05D5/12
    • G02F1/133711G02F1/1303G02F1/133723G02F1/13378
    • In a film formation method, a droplet discharge unit discharges droplets of a functional liquid material on a substrate as the droplet discharge unit is moved with respect to the substrate to form a liquid film on the substrate. The film formation method includes discharging a plurality of first droplets onto a plurality of first positions on the substrate with the first positions being arranged so that the first droplets do not touch each other on the substrate, discharging a plurality of second droplets onto a plurality of second positions on the substrate with the second positions being disposed between the first droplets that were discharged on the substrate; and causing the second droplets to touch a plurality of adjacent ones of the first droplets to form the liquid film.
    • 在成膜方法中,当液滴喷射单元相对于基板移动时,液滴喷射单元将基板上的功能液体材料的液滴排出,从而在基板上形成液膜。 成膜方法包括将多个第一液滴排放到基板上的多个第一位置上,其中第一位置被布置成使得第一液滴在基板上不彼此接触,将多个第二液滴排放到多个 第二位置位于衬底上,第二位置被布置在被排出到衬底上的第一液滴之间; 并使第二液滴接触多个相邻的第一液滴以形成液膜。