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USRE39120E1 Ceramic sintered product and process for producing the same 有权
标题翻译：陶瓷烧结产品及其制造方法
公开(公告)号：USRE39120E1
公开(公告)日：2006-06-06
申请号：US10124067
申请日：2002-04-16
申请人： Yoshihisa Sechi , Masahiro Sato , Hiroshi Aida , Shoji Kohsaka , Yutaka Hayashi
发明人： Yoshihisa Sechi , Masahiro Sato , Hiroshi Aida , Shoji Kohsaka , Yutaka Hayashi
IPC分类号： C04B35/195
CPC分类号： H01L23/15 , C04B35/195 , H01L2924/0002 , H01L2924/00
摘要： Low thermal expansion ceramics contains a cordierite crystal phase, wherein a phase of a crystalline compound containing at least one element selected from the group consisting of an alkaline earth element other than Mg, a rare earth element, Ga and In, is precipitated in the grain boundaries of said crystal phase, said ceramics has a relative density of not smaller than 95%, a coefficient of thermal expansion of not larger than 1×10−6/° C. at 10 to 40° C., and a Young's modulus of not smaller than 130 GPa. That is, the ceramics has a small coefficient of thermal expansion, is deformed very little depending upon a change in the temperature, has a very high Young's modulus and is highly rigid and is resistance against external force such as vibration. Accordingly, the ceramics is very useful as a member for supporting a wafer or an optical system is a lithography apparatus that forms high resolution circuit patterns on a silicon wafer.
摘要翻译：低热膨胀陶瓷含有堇青石结晶相，其中含有选自Mg以外的碱土金属元素，稀土元素，Ga和In中的至少一种元素的结晶化合物的相析出在晶粒中所述晶相的边界，所述陶瓷的相对密度不低于95％，热膨胀系数在10-40℃下不大于1×10 -6 /℃，杨氏模量不小于130GPa。也就是说，陶瓷具有小的热膨胀系数，根据温度的变化而变形很小，具有非常高的杨氏模量，并且是高度刚性的并且是抗外力如振动的抵抗力。因此，陶瓷作为用于支撑晶片的部件是非常有用的，或者光学系统是在硅晶片上形成高分辨率电路图案的光刻设备。

2. 发明授权

US06265334B1 Ceramic sintered product and process for producing the same 有权
标题翻译：陶瓷烧结产品及其制造方法
公开(公告)号：US06265334B1
公开(公告)日：2001-07-24
申请号：US09177977
申请日：1998-10-22
申请人： Yoshihisa Sechi , Masahiro Sato , Hiroshi Aida , Shoji Kohsaka
发明人： Yoshihisa Sechi , Masahiro Sato , Hiroshi Aida , Shoji Kohsaka
IPC分类号： C04B35195
CPC分类号： H01L23/15 , C04B35/195 , H01L2924/0002 , H01L2924/00
摘要： Low thermal expansion ceramics contains a cordierite crystal phase, wherein a phase of a crystalline compound containing at least one element selected from the group consisting of an alkaline earth element other than Mg, a rare earth element, Ga and In, is precipitated in the grain boundaries of said crystal phase, said ceramics has a relative density of not smaller than 95%, a coefficient of thermal expansion of not larger than 1×10−6/° C. at 10 to 40° C., and a Young's modulus of not smaller than 130 GPa. That is, the ceramics has a small coefficient of thermal expansion, is deformed very little depending upon a change in the temperature, has a very high Young's modulus and is highly rigid and is resistance against external force such as vibration. Accordingly, the ceramics is very useful as a member for supporting a wafer or an optical system is a lithography apparatus that forms high resolution circuit patterns on a silicon wafer.
摘要翻译：低热膨胀陶瓷含有堇青石结晶相，其中含有选自Mg以外的碱土金属元素，稀土元素，Ga和In中的至少一种元素的结晶化合物的相析出在晶粒中所述结晶相的边界，所述陶瓷的相对密度不低于95％，热膨胀系数在10〜40℃不大于1×10 -6 /℃，杨氏模量不小于超过130 GPa。也就是说，陶瓷具有小的热膨胀系数，根据温度的变化而变形很小，具有非常高的杨氏模量，并且是高度刚性的并且是抗外力如振动的抵抗力。因此，陶瓷作为用于支撑晶片的部件是非常有用的，或者光学系统是在硅晶片上形成高分辨率电路图案的光刻设备。

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