专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

1. 发明授权

US06737660B2 Electron beam irradiation apparatus and electron beam irradiating method 失效
标题翻译：电子束照射装置和电子束照射法
公开(公告)号：US06737660B2
公开(公告)日：2004-05-18
申请号：US10372419
申请日：2003-02-24
申请人： Yoshihisa Miura , Yuichi Aki , Hiroshi Kawase , Masanobu Yamamoto , Naoki Date , Setsuo Norioka , Mitsuru Koizumi , Gakuo Komatsubara
发明人： Yoshihisa Miura , Yuichi Aki , Hiroshi Kawase , Masanobu Yamamoto , Naoki Date , Setsuo Norioka , Mitsuru Koizumi , Gakuo Komatsubara
IPC分类号： G11B910
CPC分类号： H01J37/18 , G11B7/261 , H01J37/305 , H01J37/3056 , H01J2237/162 , H01J2237/188
摘要： An electron beam irradiation apparatus in a partial vacuum method is structured with a static pressure floating pad 18 connected to a vacuum chamber 14 containing an electron beam column 15 and in a condition that the static pressure floating pad 18 is attached to a subject 1 to be irradiated without contacting, and an electron beam irradiating the subject 1 to be irradiated through an electron beam path 19 of the static pressure floating pad 18, whereby the vacuum chamber and the electron beam column can be maintained in the required degree of vacuum even in a condition that the static pressure floating pad 18 is separated from the subject 1 to be irradiated. A vacuum seal valve 30 including a piston to open and close the electron beam path 19 is provided within the static pressure floating pad 18. When the static pressure floating pad 18 is separated from the subject 1, the vacuum seal valve 30 is structured to be activated to close the electron beam path 19 so as to prevent the air from flowing into the vacuum chamber 14. In this structure, the vacuum seal valve 30 is formed with a round shaped cross section and in a tapered shape with a narrow tip so as to accomplish high vacuum seal without a gap, so that the degree of vacuum in the vacuum chamber and the electron beam column can surely be maintained.
摘要翻译：部分真空法中的电子束照射装置由连接到包含电子束柱15的真空室14的静压浮动垫18构成，并且在将静压浮动垫18附着到被检体1的状态下照射不经接触的电子束，以及通过静压浮动垫18的电子束路径19照射待被检体1的电子束，由此即使在真空室和电子束柱中也可以将真空室和电子束柱保持在所需的真空度条件是静压浮动垫18与待照射的被检体1分离。在静压浮动垫18内设置包括打开和关闭电子束通道19的活塞的真空密封阀30.当静压浮动垫18与被检体1分离时，真空密封阀30构成为激活以闭合电子束路径19，以防止空气流入真空室14.在该结构中，真空密封阀30形成为圆形截面并具有窄尖端的锥形形状，以便实现高真空密封而没有间隙，从而可以确保真空室和电子束柱中的真空度。

IPRDB

热门服务

关于我们

友情链接

联系方式