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    • 1. 发明授权
    • Confocal microscope
    • 共焦显微镜
    • US06188514B1
    • 2001-02-13
    • US09018478
    • 1998-02-04
    • Yoshiharu SaitoHiroyuki Nishida
    • Yoshiharu SaitoHiroyuki Nishida
    • G02B2100
    • G02B21/0052G02B21/0072
    • The invention relates to a confocal microscope which has high resolving power and a great focal depth and is capable of observing a sample in real time, so that a fine stereoscopic structure of a highly integrated IC or the like can be inspected, and provides a confocal microscope in which a pinhole substrate 2 having a plurality of pinholes, located at a position of an image formed by an objective 4, is illuminated by light coming from a light source 1 to focus light passing through pinhole substrate 2 onto a sample 6 by objective 4 so that an image is formed thereon, light reflected at sample 6 is again focused onto pinhole substrate 2 through objective 4 to form an image thereon, light passing through pinhole substrate 2 is focused by a relay lens 7 or the like to re-form an image in the form of a sample image, and sample 6 is scanned with light by high-speed rotation of pinhole substrate 2 to obtain a reconstructed image of sample 6, wherein a longitudinal chromatic aberration-producing optical element 5 is located between pinhole substrate 2 and sample 6.
    • 本发明涉及一种共焦显微镜,其具有高分辨能力和较大的焦深,并且能够实时观察样品,从而可以检查高度集成的IC等的精细立体结构,并提供共焦 显微镜,其中具有多个针孔的针孔基板2,位于由物镜4形成的图像的位置处,由来自光源1的光照射,以将通过针孔基板2的光聚焦到样品6上,通过目标 4,使得在其上形成图像,在样品6处反射的光再次通过物镜4聚焦到针孔基板2上以在其上形成图像,通过针孔基板2的光被中继透镜7等聚焦以重新形成 通过针孔基板2的高速旋转,利用光进行样本图像的图像的扫描,得到样品6的重建图像,其中纵向色​​差产生 ucing光学元件5位于针孔基板2和样品6之间。
    • 3. 发明授权
    • Device and method for laser marking
    • 激光打标设备及方法
    • US07321377B2
    • 2008-01-22
    • US10831349
    • 2004-04-26
    • Keisuke EndoHiroyuki Nishida
    • Keisuke EndoHiroyuki Nishida
    • B41J2/435
    • G03C1/4989B41M5/26G03C1/498G03C11/02G03C2200/39
    • When laser beams with a wavelength of 9.3 μm or 9.6 μm are used, a pulse width t (μsec) which is a radiation time of the laser beam and an energy density E (kw/cm2) of the laser beam on an X-ray film are set such that they meet requirements based on an area A between line segments A1 and A2. Moreover, when laser beams with a wavelength of a 10-micrometer band, such as 10.6 μm, is used, the pulse width and the energy density are set such that they meet requirements based on an area B between line segments B1 and B2. As a result, since the pulse width t is within a range of equal to or larger than 3 μsec and smaller than 30 μsec, a high-quality marking pattern with excellent visibility can be formed while improving the productivity of the X-ray film.
    • 当使用波长为9.3μm或9.6μm的激光束时,作为激光束的辐射时间的脉冲宽度t(musec)和能量密度E(kw / cm 2) X射线胶片上的激光束被设定为使得它们满足基于线段A 1和A 2 2之间的面积A的要求。 此外,当使用波长为10微米波段(例如10.6μm)的激光束时,脉冲宽度和能量密度被设定为使得它们满足基于线段B 1之间的面积B的要求 和B 2。 结果,由于脉冲宽度t在3个以下且小于30个音圈的范围内,所以能够提高X射线胶片的生产率,能够形成具有良好的可视性的高品质的标记图案。
    • 5. 发明授权
    • Wavefront measuring apparatus and wavefront measuring method
    • 波前测量仪和波前测量方法
    • US06967724B2
    • 2005-11-22
    • US10895331
    • 2004-07-21
    • Hiroyuki Nishida
    • Hiroyuki Nishida
    • G01J9/02G01M11/00G01M11/02G01B9/02
    • G01M11/0271
    • A wavefront measuring apparatus and a wavefront measuring method are capable of performing optical measurement on a test optical system, including an immersion optical system, with comparable ease of handling to that of the conventional measuring method using a concave member, and substantially independently of reflection that may occur at the surface closest to the test optical system among the surfaces of an optical member for reflecting light exiting from the test optical system. The wavefront measuring apparatus has a light source, a reference light path in which a reference member for producing reference light is disposed, and a test light path in which the test optical system is disposed. A plano-convex optical member with a wall thickness approximately equal to the radius of curvature of a convex surface thereof is disposed in the test light path in such a manner that a plane surface thereof faces toward the test optical system. The space between the test optical system and the plano-convex optical member is filled with a liquid.
    • 波前测量装置和波前测量方法能够在包括浸没式光学系统的测试光学系统上进行光学测量,其具有与使用凹形构件的常规测量方法相当的易于处理,并且基本上独立于反射 可以在用于反射从测试光学系统出射的光的光学构件的表面中的最接近测试光学系统的表面处发生。 波前测量装置具有光源,其中设置有用于产生参考光的基准部件的基准光路和设置有测试光学系统的测试光路。 在测试光路中以与其凸表面的曲率半径大致相等的平凸面光学构件,使其平面朝向测试光学系统。 测试光学系统和平凸光学构件之间的空间填充有液体。
    • 7. 发明授权
    • Wavefront measuring apparatus and wavefront measuring method
    • US06785006B2
    • 2004-08-31
    • US10083558
    • 2002-02-27
    • Hiroyuki Nishida
    • Hiroyuki Nishida
    • G01B902
    • G01M11/0271
    • A wavefront measuring apparatus and a wavefront measuring method are capable of performing optical measurement on a test optical system, including an immersion optical system, with comparable ease of handling to that of the conventional measuring method using a concave member, and substantially independently of reflection that may occur at the surface closest to the test optical system among the surfaces of an optical member for reflecting light exiting from the test optical system. The wavefront measuring apparatus has a light source, a reference light path in which a reference member for producing reference light is disposed, and a test light path in which the test optical system is disposed. A plano-convex optical member with a wall thickness approximately equal to the radius of curvature of a convex surface thereof is disposed in the test light path in such a manner that a plane surface thereof faces toward the test optical system. The space between the test optical system and the plano-convex optical member is filled with a liquid.
    • 8. 发明授权
    • Optical filter and illumination optical system provided with same
    • 光滤波器和照明光学系统同样提供
    • US06671089B2
    • 2003-12-30
    • US10024709
    • 2001-12-21
    • Hiroyuki NishidaShingo Kashima
    • Hiroyuki NishidaShingo Kashima
    • G02B2106
    • G02B21/16
    • An optical filter has a spectral transmittance characteristic plotted as a curve that is not mirror-symmetric with respect to any vertical axis upon wavelength being taken along the axis of abscissa and transmittance being taken along the axis of ordinate. The optical filter can be designed and fabricated easily and efficiently. The optical filter is used with a light source that causes self-absorption, to constitute an illumination optical system. In the illumination optical system, an image of the arc lamp is projected with a sufficiently high magnification in good aberration condition on the pupil of the objective lens, light in a wavelength region that was conventionally unused is efficiently used, and, in addition, the heat problem is solved.
    • 光学滤波器具有作为曲线绘制的光谱透射率特性,其作为沿着横坐标轴取波长而相对于任何垂直轴不是镜像对称的曲线,并且透射率沿纵轴取。 滤光片可以容易且高效地设计和制造。 光滤波器与引起自吸收的光源一起使用,构成照明光学系统。 在照明光学系统中,在物镜的光瞳上以良好的像差状态以足够高的倍率投影弧光灯的图像,有效地使用以往未使用的波长区域的光,另外, 热问题解决了。
    • 10. 发明授权
    • Confocal microscope and relay optical system for use in confocal
microscope and the like
    • 用于共聚焦显微镜的共聚焦显微镜和中继光学系统等
    • US6157484A
    • 2000-12-05
    • US401605
    • 1999-09-22
    • Hiroyuki Nishida
    • Hiroyuki Nishida
    • G02B13/00G02B21/00G02B13/06G02B21/06
    • G02B21/0052G02B21/0024
    • A confocal unit that can be removably attached to a microscope body to construct a confocal microscope that is compact and suffers a minimal loss of brightness. A relay optical system for use in the confocal microscope has a compact structure with a reduced overall length and requires a reduced number of lens elements. A scanning disc placed at the image position of an objective lens is illuminated with light from a light source. Light passing through the scanning disc illuminates a specimen through the objective lens. Light reflected from the specimen passes through the objective lens again to form an image near the scanning disc. Light passing through the scanning disc passes through a relay optical system to form a specimen image. The scanning disc is rotated at high speed to scan the specimen with illuminating light at high speed, thereby obtaining a specimen image. The image is received with an image pickup device. The illuminating optical system, the scanning disc and the relay optical system can be removably attached to the microscope body as a confocal unit. The scanning disc, the relay optical system and the image pickup device are arranged in approximately the same straight line.
    • 可以可移除地连接到显微镜主体以构建紧凑的共焦显微镜并且具有最小的亮度损失的共焦单元。 在共焦显微镜中使用的中继光学系统具有紧凑的结构,其总长度减小并且需要减少数量的透镜元件。 放置在物镜的图像位置的扫描盘被来自光源的光照射。 通过扫描盘的光通过物镜照射样品。 从样品反射的光再次通过物镜,以形成扫描盘附近的图像。 穿过扫描盘的光通过中继光学系统以形成标本图像。 扫描盘以高速旋转,以高速度的照明光扫描样品,从而获得样本图像。 用图像拾取装置接收图像。 照明光学系统,扫描盘和中继光学系统可以作为共焦单元可移除地附接到显微镜主体。 扫描盘,中继光学系统和图像拾取装置布置在大致相同的直线上。