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    • 7. 发明申请
    • METHOD OF FORMING RESIST PATTERN AND NEGATIVE TONE-DEVELOPMENT RESIST COMPOSITION
    • 形成电阻图案和负极色调发展电阻组合物的方法
    • US20120276481A1
    • 2012-11-01
    • US13456768
    • 2012-04-26
    • Hiroaki ShimizuHideto Nito
    • Hiroaki ShimizuHideto Nito
    • G03F7/20G03F7/004
    • G03F7/325G03F7/0046G03F7/0397G03F7/11G03F7/2041
    • A method of forming a resist pattern, the method including: forming a resist film on a substrate using a resist composition containing a base component (A) that exhibits reduced solubility in an organic solvent under the action of acid, an acid generator component (B) that generates acid upon exposure and a fluorine-containing polymeric compound (F), exposing the resist film, and patterning the resist film by negative tone development using a developing solution containing the organic solvent, thereby forming a resist pattern, wherein the base component (A) contains a resin component (A1) containing a structural unit (a1) derived from an acrylate ester, the dissolution rates of (A1) and (F) in the developing solution are each at least 10 nm/s, and the absolute value of the difference in the dissolution rates of (A1) and (F) in the developing solution is not more than 80 nm/s.
    • 一种形成抗蚀剂图案的方法,该方法包括:使用含有在酸作用下在有机溶剂中显示降低的溶解度的碱成分(A)的抗蚀剂组合物在基材上形成抗蚀剂膜,酸产生剂组分(B ),暴露出含氟聚合物(F),曝光抗蚀剂膜,并使用含有有机溶剂的显影溶液通过负色调显影对抗蚀剂膜进行图案化,从而形成抗蚀剂图案,其中基础组分 (A)含有含有由丙烯酸酯衍生的结构单元(a1)的树脂成分(A1),显影液中(A1)和(F)的溶解速度分别为10nm / s以上,绝对值 显影液中(A1)和(F)的溶解速度差的值不大于80nm / s。
    • 10. 发明授权
    • Axle driving apparatus
    • 车轴驱动装置
    • US08001777B2
    • 2011-08-23
    • US12431467
    • 2009-04-28
    • Kenichi TakadaRyota OhashiHironori SumomozawaHiroaki Shimizu
    • Kenichi TakadaRyota OhashiHironori SumomozawaHiroaki Shimizu
    • F16D31/02
    • B60K17/105F01B3/02F02B61/00F16D31/02F16H39/14Y10T74/2066Y10T74/2186
    • An axle driving apparatus in which a hydraulic pump and a hydraulic motor which constitute a hydrostatic transmission are disposed on a center section. In a horizontal portion of the center section are provided a pair of linear oil passages in parallel to each other. A pair of arcuate ports are provided on a pump mounting surface formed on the horizontal portion of the center section. The pair of arcuate ports are substantially perpendicular with respect to the direction in which the oil passages extend. The axis of slanting movement of a movable swash plate of the hydraulic pump extends laterally of the vehicle body on which the axle driving apparatus is provided. The rotating direction of an arm provided on a control shaft for slantingly operating the movable swash plate is coincident with the operating direction of a control rod connected with a speed changing member. Thus, the link mechanism for connecting the speed changing member and the control arm for the movable swash plate is simplified.
    • 其中构成静液压变速器的液压泵和液压马达设置在中心部分上的车轴驱动装置。 在中心部分的水平部分中设置有彼此平行的一对直线油道。 一对弧形端口设置在形成在中心部分的水平部分上的泵安装表面上。 一对弓形端口相对于油路延伸的方向基本垂直。 液压泵的可动斜盘的倾斜运动的轴线在设置有车轴驱动装置的车身的侧面上延伸。 设置在用于倾斜地操作可动斜盘的控制轴上的臂的旋转方向与与变速构件连接的控制杆的操作方向一致。 因此,用于连接变速构件和用于可动斜盘的控制臂的连杆机构被简化。