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    • 4. 发明授权
    • Wafer surface observation apparatus
    • 晶圆表面观察装置
    • US07565002B2
    • 2009-07-21
    • US10493865
    • 2001-11-06
    • Hiroyuki YasutomiMikio SakumaHirofumi Shimoda
    • Hiroyuki YasutomiMikio SakumaHirofumi Shimoda
    • G06K9/00
    • H01L21/67259H01L21/681
    • A dicing apparatus for moving a wafer quickly to a desired observation position before the wafer surface is observed. The apparatus comprises imaging means for imaging the surface of a wafer, display means for displaying the image picked up by the imaging means, input means for inputting position information by designating an arbitrary position displayed by the display means, by using the display position on the display means, conversion means for converting the inputted position information into positional information on the position of the wafer surface, and moving means for moving the display position on the basis of the converted positional information. The apparatus displays the image in the displayed position moved.
    • 一种用于在观察晶片表面之前将晶片快速移动到所需观察位置的切割装置。 该装置包括用于对晶片表面进行成像的成像装置,用于显示由成像装置拾取的图像的显示装置,用于通过使用显示装置上的显示位置指定由显示装置显示的任意位置来输入位置信息的输入装置 显示装置,用于将输入的位置信息转换成关于晶片表面的位置的位置信息的转换装置,以及用于基于转换的位置信息移动显示位置的移动装置。 该设备将显示的图像显示在移动的位置。
    • 6. 发明申请
    • Inkjet head
    • 喷墨头
    • US20050036008A1
    • 2005-02-17
    • US10913442
    • 2004-08-09
    • Atsushi HirotaMikio Sakuma
    • Atsushi HirotaMikio Sakuma
    • B41J2/045B41J2/055B41J2/14
    • B41J2/14209B41J2002/14217B41J2002/14225B41J2002/14459B41J2202/20
    • Pressure chambers arranged in the form of a matrix along a plane form first and second pressure chamber columns arranged alternately in the plane and having nozzles connected on opposite sides respectively. Two adjacent pressure chamber columns constituted by a first pressure chamber column and a second pressure chamber column are arranged opposite to each common ink path. First connection holes formed in the pressure chambers of the first pressure chamber column and connected to nozzles and second connection holes formed in the pressure chambers of the second pressure chamber column and connected to nozzles are arranged side by side on opposite sides of a corresponding common ink path 5a. Between two adjacent common ink paths, first connection holes and second connection holes are arranged on a column.
    • 沿着平面以矩阵形式布置的压力室形成在平面中交替布置并且分别在相对侧连接有喷嘴的第一和第二压力室列。 由第一压力室列和第二压力室列构成的两个相邻的压力室列布置成与每个常用油墨通道相对。 形成在第一压力室列的压力室中并与喷嘴连接的第一连接孔和形成在第二压力室列的压力室中并连接到喷嘴的第二连接孔并排布置在相应的公共墨水的相对侧上 路径5a。 在两个相邻的公共墨道之间,第一连接孔和第二连接孔布置在列上。
    • 8. 发明授权
    • Inkjet head having a plurality of pressure chambers
    • 具有多个压力室的喷墨头
    • US06783214B2
    • 2004-08-31
    • US10305947
    • 2002-11-29
    • Mikio Sakuma
    • Mikio Sakuma
    • B41J2045
    • B41J2/155B41J2/14209B41J2002/14217B41J2002/14225B41J2002/14306B41J2002/14459B41J2202/11B41J2202/20
    • An inkjet head provided with a plurality of pressure chambers includes an actuator unit for the plurality of pressure chambers. The actuator unit includes a plurality of inactive layers and at least one active layer, both made of piezoelectric material. The plurality of inactive layers are arranged on a pressure chamber side to cover the plurality of pressure chambers. The at least one active layer is arranged on an opposite side of the pressure chambers with respect to the inactive layers. The active layer is segmented to a plurality of segments which are located at positions correspond to the plurality of pressure chambers. Further, each segment of the active layer is sandwiched between a common electrode and a driving electrode.
    • 设置有多个压力室的喷墨头包括用于多个压力室的致动器单元。 致动器单元包括多个非活性层和至少一个由压电材料制成的活性层。 多个非活性层被布置在压力室侧以覆盖多个压力室。 至少一个有源层相对于非活性层设置在压力室的相对侧上。 活性层被分割成位于对应于多个压力室的位置处的多个段。 此外,有源层的每个段夹在公共电极和驱动电极之间。
    • 10. 发明授权
    • Ink ejecting printer having different cleaning timings
    • 具有不同清洁时间的喷墨打印机
    • US5565898A
    • 1996-10-15
    • US316324
    • 1994-09-30
    • Mikio Sakuma
    • Mikio Sakuma
    • B41J2/165B41J2/505
    • B41J2/5056B41J2/1652
    • An ink ejecting printer capable of increasing a printing speed by eliminating unnecessary head maintenance operations includes a mode controller, a ROM, timing value storage, a wiping ordering unit and a suction ordering unit. When a normal print mode is selected, the mode controller supplies the timing value storage with the initial values of the wiping and suction timings held in the ROM; when a thin-out mode is selected, the mode controller supplies the storage with changed values. The timing value storage stores the wiping and suction timings sent from the mode controller. When a print operation is started, the wiping ordering unit and suction ordering unit retrieve the values of the wiping and suction timings from the timing value storage. When the print operation is found to have reached one of the timings, the corresponding unit suspends the printing and causes the appropriate wiping or sucking operation to be carried out. This makes it possible, when the thin-out mode is selected, to reduce unnecessary head maintenance operations and thereby increase the printing speed.
    • 能够通过消除不必要的头部维护操作来提高打印速度的喷墨打印机包括模式控制器,ROM,定时值存储,擦拭排序单元和抽吸排序单元。 当选择正常打印模式时,模式控制器将保持在ROM中的擦拭和抽吸定时的初始值提供定时值存储; 当选择薄型模式时,模式控制器为存储提供改变的值。 定时值存储器存储从模式控制器发送的擦拭和抽吸定时。 当打印操作开始时,擦拭订购单元和抽取订购单元从定时值存储器检索擦拭和抽吸定时的值。 当发现打印操作达到其中一个时间时,相应的单元暂停打印,并进行适当的擦拭或吸吮操作。 这使得当选择薄型模式时,可以减少不必要的头维护操作,从而提高打印速度。