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    • 2. 发明授权
    • Automotive engine control system with rotary encoder indexing
    • 带旋转编码器索引的汽车发动机控制系统
    • US5212380A
    • 1993-05-18
    • US882176
    • 1992-05-11
    • Seiichi SatoKazuo YamaguchiYoshi KurosawaAtsushi UedaMasami Matsumura
    • Seiichi SatoKazuo YamaguchiYoshi KurosawaAtsushi UedaMasami Matsumura
    • G01D5/245H03M1/30
    • G01D5/2457H03M1/308
    • An automotive engine control system is provided for an automobile having a variable rotation speed engine which has a plurality of spark plugs served by respective spark plugs. The system includes an optical rotary encoder having a rotatable pulse scale having a row of code pattern with specific light-permeable or light-deflection slits each for outputting a reference position signal and other light-permeable or light-reflection slits each adapted to reduce the amount of light for outputting an angular signal, both of the optical signals being photoelectronically converted and the waveform of the resultant electric signals being shaped based on threshold voltages into electric pulse signals indicative of a reference angle of 0.degree. and the accumulated angle of rotation, in which the circumferential width of each specific reference slit is made narrower than that of other slit so that the pulse width for angular position-indicating of the angular pulse signal is always equal and constant for ensuring more accurate detection of the angle of rotation. As the engine rotation speed is sensed to speed up and slow down, by a sensor that is operatively connected with the engine, the optical rotary encoder varies igniting of the spark plugs.
    • 为具有可变转速发动机的汽车提供汽车发动机控制系统,该变速发动机具有由各个火花塞所服务的多个火花塞。 该系统包括光学旋转编码器,该光学旋转编码器具有可转动的脉冲刻度,该旋转脉冲刻度具有一列具有特定光透射或光偏转狭缝的编码图案,每个狭缝均用于输出基准位置信号和其他可透光或光反射狭缝, 用于输出角度信号的光量,将光信号转换的光信号和基于阈值电压的所得电信号的波形形成为表示参考角度0°和累积旋转角度的电脉冲信号, 其中每个特定参考狭缝的周向宽度比其他狭缝的圆周宽度窄,使得角度脉冲信号的角位置指示的脉冲宽度总是相等和恒定的,以确保更准确地检测旋转角度。 当通过与发动机可操作地连接的传感器感测到发动机转速被加速和减速时,光学旋转编码器随着火花塞点燃而变化。
    • 4. 发明授权
    • Optical rotary encoder with indexing
    • 光学旋转编码器
    • US5130536A
    • 1992-07-14
    • US603402
    • 1990-10-26
    • Seiichi SatoKazuo YamaguchiYoshi KurosawaAtsushi UedaMasami Matsumura
    • Seiichi SatoKazuo YamaguchiYoshi KurosawaAtsushi UedaMasami Matsumura
    • G01D5/36G01D5/245G01D5/30H03M1/30
    • H03M1/308G01D5/2457
    • An optical rotary encoder having a rotatable pulse scale having a row of code pattern with specific light-permeable or-deflection slits each for outputting a reference position signal and other light-permeable or reflection slits each adapted to reduce the amount of light for outputting an angular signal, both of the optical signals being photoelectronically converted and the waveform of the resultant electric signals being shaped based on threshold voltages into electric pulse signals indicative of a reference angle of 0.degree. and the accumulated angle of rotation, in which the circumferential width of each specific reference slit is made narrower than that of other slit so that the pulse width for angular position indicating of the angular pulse signal is always equal and constant for ensuring more accurate detection of the angle of rotation.
    • 一种光学旋转编码器,其具有可旋转的脉冲刻度,其具有一排代码图案,具有特定的光透射或偏转狭缝,每个狭缝用于输出参考位置信号和其他透光或反射狭缝,每个适于减少用于输出 角度信号,两个光信号被光电转换,并且所得到的电信号的波形根据阈值电压被成形为表示参考角度0°的电脉冲信号和累积的旋转角度,其中圆周宽度 每个特定的参考狭缝比其他狭缝窄,使得指示角度脉冲信号的角位置的脉冲宽度总是相等和恒定的,以确保更准确地检测旋转角度。
    • 5. 发明授权
    • Photointerruptor for use in light-transmission type rotary encoder
    • 用于光传输型旋转编码器的光电断路器
    • US5015056A
    • 1991-05-14
    • US580645
    • 1990-09-11
    • Kazuo YamaguchiYoshi KurosawaSeiichi SatoAtsushi UedaMasami Matsumura
    • Kazuo YamaguchiYoshi KurosawaSeiichi SatoAtsushi UedaMasami Matsumura
    • G01D5/36H03M1/30
    • H03M1/301
    • A photointerruptor for use in a light transmission type rotary encoder comprising a photointerruptor main body having a plurality pair of light emitting and light receiving optical fibers resin-molded therein, each pair of the optical fibers being disposed such that their end faces are opposed on both sides of each code pattern formed circumferentially on a pulse scale, the light emitting optical fibers joined by way of an optical branching device into a light input end and the light receiving optical fibers being extended in parallel with each other through the photointerruptor and, an adaptor integrally formed to the photointerruptor main body and through which the light input end of the light emitting optical fibers and the light emitting ends of the light receiving optical fibers are extended and arranged such that they are collectively connected with core wires of a multi-cored transmission optical fiber cable by way of a light connector respectively.
    • 一种用于光传输型旋转编码器的光断续器,包括具有树脂模制在其中的多对发光和光接收光纤的光中断器主体,每对光纤被设置为使得它们的端面在两者上相对 每个代码图案的边缘以脉冲刻度圆周地形成,所述发光光纤通过光分支装置接合到光输入端,并且所述光接收光纤通过所述光断续器彼此并联延伸;以及适配器 一体地形成在光断续器主体上,发光光纤的光输入端和光接收光纤的发光端被延伸和布置,使得它们与多芯透射体的芯线共同连接 光纤电缆分别通过光连接器。
    • 8. 发明申请
    • Method and apparatus for observing and inspecting defects
    • 观察和检查缺陷的方法和装置
    • US20060238760A1
    • 2006-10-26
    • US11475667
    • 2006-06-26
    • Yukihiro ShibataShunji MaedaKazuo YamaguchiMinoru YoshidaAtsushi YoshidaKenji OkaKenji Watanabe
    • Yukihiro ShibataShunji MaedaKazuo YamaguchiMinoru YoshidaAtsushi YoshidaKenji OkaKenji Watanabe
    • G01J4/00
    • G01N21/21G01N21/9501G01N21/956G01N21/95607G02B21/0016
    • A defect inspecting apparatus is disclosed that can detect finer defects with high resolution optical images of those defects, and which makes the difference in contrast greater between fine line patterns of a semiconductor device. The defect inspecting apparatus includes a sample mounting device for mounting a sample; lighting and detecting apparatus for illuminating a patterned sample mounted on a mount and detecting the optical image of the reflected light obtained therefrom. Also included is a display for displaying the optical image detected by this lighting and detecting apparatus; an optical parameter setting device for setting and displaying optical parameters for the lighting and detecting apparatus on the display; and optical parameter adjusting apparatus for adjusting optical parameters set for the lighting and detecting apparatus according to the optical parameters set by the optical parameter setting apparatus; a storage device for storing comparative image data; and a defect detecting device for detecting defects from patterns formed on the sample by comparing the optical image detected by the optical image detecting apparatus with the comparative image data stored in the storage.
    • 公开了能够利用这些缺陷的高分辨率光学图像检测更细的缺陷的缺陷检查装置,并且使得半导体器件的细线图案之间的对比度差异更大。 缺陷检查装置包括用于安装样品的样品安装装置; 照明和检测装置,用于照亮安装在安装件上的图案样品,并检测由其获得的反射光的光学图像。 还包括用于显示由该照明和检测装置检测的光学图像的显示器; 用于在显示器上设置和显示照明和检测装置的光学参数的光学参数设置装置; 以及光学参数调整装置,用于根据由所述光学参数设定装置设定的光学参数来调整对所述照明和检测装置设定的光学参数; 用于存储比较图像数据的存储装置; 以及缺陷检测装置,用于通过将由光学图像检测装置检测的光学图像与存储在存储器中的比较图像数据进行比较来检测在样本上形成的图案的缺陷。
    • 9. 发明申请
    • Method and apparatus for reviewing defects
    • 检查缺陷的方法和装置
    • US20060210144A1
    • 2006-09-21
    • US11325552
    • 2006-01-05
    • Kazuo YamaguchiToshifumi HondaYuji TakagiMunenori Fukunishi
    • Kazuo YamaguchiToshifumi HondaYuji TakagiMunenori Fukunishi
    • G06K9/00
    • G06T7/0006G06T2207/10061G06T2207/30148
    • A reviewing apparatus, for enabling to conduct detailed review (ADR) and/or defect classification (ADC), effectively, through making alignment of defects detected in an upstream inspecting apparatus into the reviewing apparatus, with certainty and at high accuracy, and further within a short time-period, comprises a defect selecting portion 240 for selecting or picking up a plural number of alignment candidates from a large numbers defects, upon defect inspection information, which is detected within the inspecting apparatus, an electron microscope 21 (30) for obtaining a SEM image of the plural number of alignment candidates, through picking up an image on each of the plural number of alignment candidates, which are selected or picked up, narrowly, and a determining portion 243 for calculating out characteristic quantities relating to the plural number of alignment candidates, upon basis of the obtained SEM images thereof, and for determining on suitableness/unsuitableness for use in alignment relating to the plural number of alignment candidates, upon basis of the characteristic quantities calculated therewith.
    • 一种审查装置,能够有效地进行详细审查(ADR)和/或缺陷分类(ADC),通过将上游检测装置中检测到的缺陷与确定性和准确性进行对准,并进一步在 短时间段包括用于从大量缺陷中选择或拾取多个对准候选的缺陷选择部分240,在检查装置内检测到的缺陷检查信息时,具有电子显微镜21(30),用于 通过拾取选择或拾取的多个对准候选者中的每一个上的图像,以及用于计算与多个对准候选者相关的特征量的确定部分243,获得多个对准候选的SEM图像; 基于所获得的SEM图像和用于确定适合性/不适合性的对准候选数 基于由其计算的特征量,与多个对准候选对齐。
    • 10. 发明授权
    • Method and apparatus for observing and inspecting defects
    • 观察和检查缺陷的方法和装置
    • US06690469B1
    • 2004-02-10
    • US09397334
    • 1999-09-14
    • Yukihiro ShibataShunji MaedaKazuo YamaguchiMinoru YoshidaAtsushi YoshidaKenji OkaKenji Watanabe
    • Yukihiro ShibataShunji MaedaKazuo YamaguchiMinoru YoshidaAtsushi YoshidaKenji OkaKenji Watanabe
    • G01J400
    • G01N21/21G01N21/9501G01N21/956G01N21/95607G02B21/0016
    • A defect inspecting apparatus is disclosed that can detect finer defects with high resolution optical images of those defects, and which makes the difference in contrast greater between fine line patterns of a semiconductor device. The defect inspecting apparatus includes a sample mounting device for mounting a sample; lighting and detecting apparatus for illuminating a patterned sample mounted on a mount and detecting the optical image of the reflected light obtained therefrom. Also included is a display for displaying the optical image detected by this lighting and detecting apparatus; an optical parameter setting device for setting and displaying optical parameters for the lighting and detecting apparatus on the display; and optical parameter adjusting apparatus for adjusting optical parameters set for the lighting and detecting apparatus according to the optical parameters set by the optical parameter setting apparatus; a storage device for storing comparative image data; and a defect detecting device for detecting defects from patterns formed on the sample by comparing the optical image detected by the optical image detecting apparatus with the comparative image data stored in the storage.
    • 公开了能够利用这些缺陷的高分辨率光学图像检测更细的缺陷的缺陷检查装置,并且使得半导体器件的细线图案之间的对比度差异更大。 缺陷检查装置包括用于安装样品的样品安装装置; 照明和检测装置,用于照亮安装在安装件上的图案样品,并检测由其获得的反射光的光学图像。 还包括用于显示由该照明和检测装置检测的光学图像的显示器; 用于在显示器上设置和显示照明和检测装置的光学参数的光学参数设置装置; 以及光学参数调整装置,用于根据由所述光学参数设定装置设定的光学参数来调整对所述照明和检测装置设定的光学参数; 用于存储比较图像数据的存储装置; 以及缺陷检测装置,用于通过将由光学图像检测装置检测的光学图像与存储在存储器中的比较图像数据进行比较来检测在样本上形成的图案的缺陷。