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    • 1. 发明授权
    • Piezoelectric vibration angular velocity sensor
    • 压电振动角速度传感器
    • US07571648B2
    • 2009-08-11
    • US11752674
    • 2007-05-23
    • Yook-Kong YongMihir S PatelShigeo KannaMasako Tanaka
    • Yook-Kong YongMihir S PatelShigeo KannaMasako Tanaka
    • G01P9/04
    • G01C19/5642
    • An angular velocity sensor includes a protrusion protruding in a Y′-axis direction and extending in an X-axis direction on a main surface of a rotated Y cut quartz plate, and an excitation electrode and a detection electrode formed on the main surface adjacent to this protrusion. This excitation electrode excites thickness-shear vibration in the X-axis direction on the quartz substrate, exiting vibration on the protrusion. Then, the protrusion is bent and displaced due to Coriolis force acting in a direction orthogonal to the vibration of the protrusion corresponding to a rotation around an Y′ axis. This displacement at the protrusion is applied to the quartz substrate as stress. The detection electrode detects change of this stress, thereby angular speed added to the angular velocity sensor is detected.
    • 一种角速度传感器包括沿Y'轴方向突出并在旋转的Y切割石英板的主表面上沿X轴方向延伸的突起,以及形成在主表面上的激励电极和检测电极, 这个突出。 该激发电极激发石英基板上的X轴方向的厚度 - 剪切振动,从而突出突出的振动。 然后,由于在与围绕Y'轴的旋转相对应的与突起的振动正交的方向作用的科里奥利力,突起被弯曲和位移。 突起处的位移作为应力施加到石英基板。 检测电极检测该应力的变化,从而检测加到角速度传感器的角速度。
    • 2. 发明授权
    • Quartz crystal resonator
    • 石英晶体谐振器
    • US07608986B2
    • 2009-10-27
    • US11537920
    • 2006-10-02
    • Yook-Kong YongMihir S PatelMasako Tanaka
    • Yook-Kong YongMihir S PatelMasako Tanaka
    • H01L41/053H01L41/18
    • H03H9/08H03H9/02023H03H9/0547H03H9/0595H03H9/1035
    • A quartz crystal resonator includes a quartz crystal resonator element having a main surface including an X axis (electrical axis) and a Z′ axis of an inclination rotated at an angle (y) equal to or greater than 36.4 degrees and equal to or smaller than, 40.5 degrees from a Z axis (optical axis) around the X axis, a main vibrating portion vibrating at a predetermined resonance frequency (f) and a supporting portion integrally formed with the main vibrating portion in such a manner as to be formed peripherally to surround the main vibrating portion, and two covers having a thermal expansion coefficient equal to or greater than 6×10−6 per degrees centigrade and equal to or smaller than 10×10−6 per degrees centigrade and bonded to the supporting portion so as to sandwich the quartz crystal resonator element therebetween.
    • 石英晶体谐振器包括具有包括X轴(电轴)的主表面和以等于或大于36.4度并且等于或小于等于或等于36.4度的角度(y)旋转的倾斜的Z'轴的石英晶体谐振器元件 相对于X轴的Z轴(光轴)为40.5度,以规定的共振频率(f)振动的主振动部和与主振动部一体形成的支撑部, 围绕主振动部分,以及两个热膨胀系数等于或大于6×10 -6 /摄氏度并且等于或小于10×10 -6 /摄氏度的盖,并结合到支撑部分,以夹持石英晶体 谐振元件。