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    • 1. 发明申请
    • THREE-DIMENSIONAL SEMICONDUCTOR MEMORY DEVICE
    • 三维半导体存储器件
    • US20150145015A1
    • 2015-05-28
    • US14519713
    • 2014-10-21
    • Yoocheol ShinHongsoo KimJaesung Sim
    • Yoocheol ShinHongsoo KimJaesung Sim
    • H01L27/115
    • H01L27/11556G11C16/0483H01L27/11531H01L27/11548H01L27/11573H01L27/11575H01L27/11582
    • A three-dimensional semiconductor memory device includes stacked structures, vertical semiconductor patterns, common source regions, and well pickup regions. The stacked structures are disposed on a semiconductor layer of a first conductivity type. Each stacked structure includes electrodes vertically stacked on each other and is extended in a first direction. The vertical semiconductor patterns penetrate the stacked structures. The common source regions of a second conductivity type are disposed in the semiconductor layer. At least one common source region is disposed between two adjacent stacked structures. The at least one common source region is extended in the first direction. The well pickup regions of the first conductivity type are disposed in the semiconductor layer. At least one well pickup region is adjacent to both ends of at least one stacked structure.
    • 三维半导体存储器件包括堆叠结构,垂直半导体图案,公共源极区域和阱拾取区域。 堆叠结构设置在第一导电类型的半导体层上。 每个堆叠结构包括彼此垂直堆叠并沿第一方向延伸的电极。 垂直半导体图案穿透层叠结构。 第二导电类型的公共源极区域设置在半导体层中。 在两个相邻的堆叠结构之间设置至少一个公共源区。 所述至少一个公共源区域沿第一方向延伸。 第一导电类型的阱拾取区域设置在半导体层中。 至少一个阱拾取区域与至少一个堆叠结构的两端相邻。