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    • 1. 发明申请
    • MEMS MICROPHONE AND METHOD FOR MANUFACTURING SAME
    • MEMS麦克风及其制造方法
    • US20110316100A1
    • 2011-12-29
    • US13201112
    • 2010-02-11
    • Yong-Kook KimChung-Dam Song
    • Yong-Kook KimChung-Dam Song
    • H01L29/84H01L21/306H01L21/20
    • H04R19/04B81B2201/0257B81B2203/0127B81C1/00158
    • A micro electro mechanical systems (MEMS) microphone, and a method of manufacturing the MEMS microphone having an interval between a membrane and a back plate, the interval being correctly adjusted by forming the membrane and the back plate after an air-gap forming portion on a silicon substrate. Since the membrane and/or the back plate are/is formed by electroless plating, a sacrificial layer is easily planarized, and a residual stress is easily removed or controlled. The MEMS microphone includes a silicon substrate in which a back chamber is formed and on which an air-gap forming portion is formed above the chamber by etching the silicon substrate to a predetermined depth above the chamber; a membrane formed on the air-gap forming portion of the silicon substrate or the silicon substrate; and a back plate that is formed on the air-gap forming portion or the silicon substrate so as to be spaced apart from the membrane, wherein an air gap is formed between the membrane and the back plate.
    • 微电子机械系统(MEMS)麦克风以及制造具有隔膜与背板之间间隔的MEMS麦克风的方法,该间隔通过在气隙形成部分上形成膜和背板而正确地调节 硅衬底。 由于膜和/或背板通过无电镀形成,牺牲层容易平坦化,并且容易地去除或控制残余应力。 MEMS麦克风包括硅衬底,其中形成后室,并且通过将硅衬底蚀刻到室上方的预定深度而在腔上方形成气隙形成部分; 形成在硅衬底或硅衬底的气隙形成部分上的膜; 以及形成在所述气隙形成部或所述硅基板上以与所述膜隔开的背板,其中在所述膜与所述背板之间形成气隙。
    • 3. 发明授权
    • Device for separating a heat roller from a pressure roller in a fixing
unit of an electrophotographic machine
    • 用于在电子照相机的定影单元中从加压辊分离加热辊的装置
    • US6035160A
    • 2000-03-07
    • US210620
    • 1998-12-14
    • Yong-Kook Kim
    • Yong-Kook Kim
    • G03G15/20
    • G03G15/2032
    • A roller separating device automatically separates a pressure roller from a heat roller when the rollers are unable to rotate or when a fixing operation is not in progress. The roller separating device includes an idle gear engaged with a pressure roller gear, a cam driving gear engaged with the idle gear, an electronic clutch fixed to a cam shaft to which a cam is also fixed. The electronic clutch is detachably coupled to the cam driving gear. The cam is driven by a driving force of a power gear and the electronic clutch couples/uncouples the driving force to the cam. When the electronic clutch is actuated, a driving force of the cam driving gear is transferred to the cam to move a pressure roller support frame so that the pressure roller is separated from the heat roller. When the electronic clutch is inactuated, the pressure roller support frame returns to its normal position by an elastic force of a spring so that the pressure roller contacts the heat roller.
    • 当辊不能旋转时或当定影操作未进行时,辊分离装置自动将加压辊与加热辊分离。 辊分离装置包括与压辊齿轮接合的空转齿轮,与空转齿轮啮合的凸轮驱动齿轮,固定到凸轮轴的电子离合器,凸轮也固定到凸轮轴上。 电子离合器可拆卸地联接到凸轮驱动齿轮。 凸轮由动力齿轮的驱动力驱动,并且电子离合器将驱动力耦合/解耦到凸轮。 当电子离合器被致动时,凸轮驱动齿轮的驱动力被传递到凸轮以移动压力辊支撑框架,使得加压辊与加热辊分离。 当电子离合器失效时,压力辊支撑架通过弹簧的弹力返回到其正常位置,使得压力辊接触加热辊。