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    • 7. 发明授权
    • Method of fabricating long wavelength vertical-cavity surface-emitting lasers
    • 制造长波长垂直腔表面发射激光器的方法
    • US06727109B2
    • 2004-04-27
    • US10210668
    • 2002-07-31
    • Young Gu JuWon Seok HanO Kyun KwonJae Heon ShinByueng Su YooJung Rae Ro
    • Young Gu JuWon Seok HanO Kyun KwonJae Heon ShinByueng Su YooJung Rae Ro
    • H01L2100
    • H01S5/18308H01L33/145H01S5/02461H01S5/0421H01S5/18341H01S5/18369H01S5/2063
    • The present invention relates to a method of fabricating vertical-cavity surface emitting lasers being watched as a light source for long wavelength communication. The present invention includes forming a layer having a high resistance near the surface by implanting heavy ions such as silicon (Si), so that the minimum current injection diameter is made very smaller unlike implantation of a proton. Further, the present invention includes regrowing crystal so that current can flow the epi surface in parallel to significantly reduce the resistance up to the current injection part formed by silicon (Si) ions. Therefore, the present invention can not only effectively reduce the current injection diameter but also significantly reduce the resistance of a device to reduce generation of a heat. Further, the present invention can further improve dispersion of a heat using InP upon regrowth and thus improve the entire performance of the device.
    • 本发明涉及一种垂直腔表面发射激光器的制造方法,该激光器被视为用于长波长通信的光源。 本发明包括通过注入诸如硅(Si)的重离子在表面附近形成具有高电阻的层,使得最小电流注入直径不像植入质子那样非常小。 此外,本发明包括再生晶体,使得电流可以平行地流动外延表面,以显着降低直到由硅(Si)离子形成的电流注入部分的电阻。 因此,本发明不仅可以有效地降低电流注入直径,而且可以显着降低器件的电阻以减少发热。 此外,本发明可以进一步改善在再生后使用InP的散热分散,从而提高装置的整体性能。
    • 10. 发明申请
    • Hybrid metal bonded vertical cavity surface emitting laser and fabricating method thereof
    • 混合金属结合垂直腔表面发射激光器及其制造方法
    • US20060126694A1
    • 2006-06-15
    • US11179954
    • 2005-07-12
    • O. Kyun KwonMi Ran ParkWon Seok HanJong Hee KimHyun Woo Song
    • O. Kyun KwonMi Ran ParkWon Seok HanJong Hee KimHyun Woo Song
    • H01S5/00
    • H01S5/18316H01S5/0215H01S5/0217H01S5/18369H01S5/18375H01S5/18377
    • Provided is a method of fabricating a vertical cavity surface emitting laser among semiconductor optical devices, comprising: bonding a dielectric mirror layer to an epi-structure having a mirror layer and an active layer; bonding these on a new substrate using a metal bonded method; removing the existing substrate; and fabricating a vertical cavity surface emitting laser on the new substrate. The method of fabricating the vertical cavity surface emitting laser is performed by moving and attaching a vertical cavity surface emitting laser to a new substrate using an external metallic bonding method, without electrically and optically affecting upper and lower mirrors and an active layer that constitutes the vertical cavity surface emitting laser. While using the existing method of fabricating the vertical cavity surface emitting laser, the VCSEL is fabricated by moving to a new substrate having good thermal characteristics so that good heat emission characteristics are accomplished, thus facilitating manufacture of the vertical cavity surface emitting laser having high reliability and good characteristics.
    • 提供了一种在半导体光学器件中制造垂直腔表面发射激光器的方法,包括:将介质镜层结合到具有镜层和有源层的外延结构; 使用金属键合方法将它们结合在新的基板上; 去除现有的基板; 并在新基板上制造垂直腔表面发射激光器。 垂直腔表面发射激光器的制造方法是通过使用外部金属接合方法将垂直空腔表面发射激光器移动并附着到新的衬底而进行的,而不会电和影响上镜和下反射镜以及构成垂直腔的表面发射激光的有源层 腔表面发射激光。 在使用制造垂直腔表面发射激光器的现有方法的同时,通过移动到具有良好热特性的新衬底来制造VCSEL,从而实现良好的发热特性,从而有助于制造具有高可靠性的垂直腔表面发射激光器 和良好的特点。