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    • 2. 发明申请
    • SEMICONDUCTOR DEVICE
    • 半导体器件
    • US20120217557A1
    • 2012-08-30
    • US13460962
    • 2012-05-01
    • Yoichi NOGAMI
    • Yoichi NOGAMI
    • H01L29/78
    • H01L29/8128
    • A semiconductor device includes: a semiconductor substrate of a compound semiconductor material; a buffer layer, a channel layer, and a Schottky junction forming layer sequentially disposed on the semiconductor substrate, the buffer layer, the channel layer, and the Schottky junction forming layer each being compound semiconductor materials; a source electrode and a drain electrode located on the Schottky junction forming layer; and a gate electrode disposed between the source and drain electrodes and forming a Schottky junction with the Schottky junction forming layer. The carrier density in the channel layer varies with distance from a top surface of the channel layer and is inversely proportional to the third power of depth into the channel layer from the top surface of the channel layer. The buffer layer has a lower electron affinity than the channel layer and is a different compound semiconductor material from the channel layer.
    • 半导体器件包括:化合物半导体材料的半导体衬底; 顺序地设置在半导体衬底上的缓冲层,沟道层和肖特基结形成层,缓冲层,沟道层和肖特基结形成层均为化合物半导体材料; 位于肖特基结形成层上的源电极和漏电极; 以及设置在源极和漏极之间并与肖特基结形成层形成肖特基结的栅电极。 沟道层中的载流子密度随距离沟道层顶表面的距离而变化,并且与沟道层顶表面的沟道层深度的第三次方成反比。 缓冲层具有比沟道层更低的电子亲和力,并且是与沟道层不同的化合物半导体材料。
    • 3. 发明申请
    • SEMICONDUCTOR DEVICE
    • 半导体器件
    • US20120007153A1
    • 2012-01-12
    • US13238038
    • 2011-09-21
    • Yoichi NOGAMI
    • Yoichi NOGAMI
    • H01L29/812
    • H01L29/8128
    • A semiconductor device includes: a compound semiconductor substrate; a buffer layer, a channel layer, and a Schottky junction forming layer sequentially disposed on the compound semiconductor substrate, the buffer layer, the channel layer, and the Schottky junction forming layer each being compound semiconductor materials; a source electrode and a drain electrode located on the Schottky junction forming layer; and a gate electrode disposed between the source and drain electrodes and forming a Schottky junction with the Schottky junction forming layer. The dopant impurity concentration in the channel layer is inversely proportional to the third power of depth into the channel layer from a top surface of the channel layer. The gate electrode has a gate length in a range from 0.2 μm to 0.6 μm.
    • 半导体器件包括:化合物半导体衬底; 顺序地设置在化合物半导体衬底上的缓冲层,沟道层和肖特基结形成层,缓冲层,沟道层和肖特基结形成层均为化合物半导体材料; 位于肖特基结形成层上的源电极和漏电极; 以及设置在源极和漏极之间并与肖特基结形成层形成肖特基结的栅电极。 沟道层中的掺杂剂杂质浓度与从沟道层的顶表面进入沟道层的深度的第三功率成反比。 栅电极的栅极长度在0.2μm至0.6μm的范围内。