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    • 3. 发明授权
    • Micromechanical phase-shifting gate optical modulator
    • 微机械相移门光调制器
    • US06377718B1
    • 2002-04-23
    • US09535312
    • 2000-03-24
    • Long QueGunawan WitjaksonoYogesh B. Gianchandani
    • Long QueGunawan WitjaksonoYogesh B. Gianchandani
    • G02F1035
    • G02B6/3524G02B6/3532G02B6/3546G02B6/357G02B6/358G02B6/3584G02B6/3594
    • A micromechanical optical modulator includes an input optical waveguide that projects a beam across a gap to an output optical waveguide. A phase shifting gate is mounted between the input and output optical waveguides and has a light transmissive panel which may have at least two sections of different thicknesses. The phase shifting gate is translatable between a position in which the beam of light is transmitted and a second position in which a section of the gate panel is interposed in the beam path and the beam of light is reflected by interference effects. A micromechanical actuator may be connected to the phase shifting gate to switch it between its positions. The optical waveguides may be mounted at an angle to the surfaces of the sections of the gate such that when the beam is reflected from the gate it is directed to a second output optical waveguide, which receives the beam and directs it on a new path, thereby allowing switching of optical beam paths in an optical communication system. The optical modulator may also be used as a sensor to detect effects which displace the phase shifting gate, such as in an accelerometer in which a mass is connected to the gate to move the gate when the mass is subjected to accelerations.
    • 微机械光学调制器包括将光束跨越间隙投射到输出光波导的输入光波导。 相移门安装在输入和输出光波导之间,并具有透光面板,其可具有不同厚度的至少两个部分。 相移门可以在其中透射光束的位置和其中栅极面板的一部分插入在光束路径中并且光束被干涉效应反射的第二位置之间平移。 微机械致动器可以连接到相移门以在其位置之间切换。 光波导可以与栅极的部分的表面成角度地安装,使得当光束从栅极反射时,其被引导到第二输出光波导,其接收光束并将其引导到新的路径上, 从而允许光通信系统中的光束路径的切换。 光调制器也可以用作传感器,以检测移位相移门的效应,例如在质量连接到门的加速度计中,当质量受到加速时移动门。
    • 9. 发明授权
    • Latching mechanism for MEMS actuator and method of fabrication
    • MEMS致动器的锁定机构及其制造方法
    • US06549107B2
    • 2003-04-15
    • US09793307
    • 2001-02-26
    • Martin LimRobert FanLong Que
    • Martin LimRobert FanLong Que
    • H01H5122
    • H01H1/0036G02B26/0866H01H61/0107H01H2001/0042H01H2061/006
    • A latching mechanism for a MEMS actuator as, for example, a mirror in an N×N fiber optic switch, maintains a thermally actuated mirror in its actuated position even in the event of a power interruption by a pair of clamps, which clamp against an actuator arm. Such actuator arm is thermally actuated by a bent beam type of thermal actuator. To provide for effective fabrication using the MEMS technique (microelectromechanical system), on for example, a silicon substrate where the entire moveable structure is a suspended mechanism, the clamps are fabricated in a normally closed position. In this position they typically interfere with the line of motion of an enlarged portion of an actuator arm being directly in the line of motion or with a post and slot technique.
    • 用于MEMS致动器的闩锁机构,例如NxN光纤开关中的反射镜,即使在通过一对夹持器的电力中断的情况下,也将热致动反射镜保持在其致动位置,夹钳紧贴致动器臂 。 这种致动器臂由弯曲梁式的热致动器热致动。 为了提供使用MEMS技术(微机电系统)的有效制造,例如,整个可移动结构是悬挂机构的硅衬底,夹具被制造在常闭位置。 在这个位置上,它们通常干扰直接位于运动线中的致动器臂的放大部分的运动线,或者通过柱和槽技术。
    • 10. 发明授权
    • Two-dimensional tunable filter array for a matrix of integrated fiber optic input-output light channels
    • 用于集成光纤输入输出光通道矩阵的二维可调滤波器阵列
    • US06449410B1
    • 2002-09-10
    • US09811142
    • 2001-03-16
    • Long Que
    • Long Que
    • G02B626
    • G02B6/12007G02B6/29361G02B6/29395G02B6/4214
    • An integrated two-dimensional tunable filter array for a matrix of fiber-optic input-output light channels includes a tunable filter chip array sandwiched between a first semiconductive wafer in which the guiding grooves for the input light channels terminate in a 45° reflecting surface causing a 90° turn of the light beams into each tunable filter of the array. Then a third semiconductive substrate is bonded to the other side of the tunable filter array to receive the reflected light beams. A 45° mirror on a {111} plane may be formed by slow etching of a {100} type wafer or the use of a {100} type wafer with a 9.7° off axis cut.
    • 用于光纤输入 - 输出光通道矩阵的集成的二维可调滤波器阵列包括夹在第一半导体晶片之间的可调滤波器芯片阵列,其中用于输入光通道的引导槽终止于45°反射表面,导致 将光束的90°转换成阵列的每个可调滤波器。 然后,第三半导体衬底被结合到可调滤波器阵列的另一侧以接收反射光束。 {111}平面上的45°反射镜可以通过缓慢蚀刻{100}型晶片或使用具有9.7°偏轴切割的{100}型晶片来形成。