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    • 3. 发明申请
    • Pixel structure of CMOS image sensor and method of forming the pixel structure
    • CMOS图像传感器的像素结构和形成像素结构的方法
    • US20080197388A1
    • 2008-08-21
    • US12010809
    • 2008-01-30
    • Jong-eun ParkKeun-chan Yuk
    • Jong-eun ParkKeun-chan Yuk
    • H01L27/146H01L21/8234
    • H01L27/1463H01L27/14603H01L27/14621H01L27/14689
    • Provided is a pixel structure of a CMOS image sensor. The pixel structure may include a semiconductor substrate, a photo diode, and a color filter. The photo diode may have a trench structure formed in the semiconductor substrate. The color filter may be formed in the trench structure. The color filter may be formed by filling a material in the trench structure using a gap-fill process. The material in the trench structure may transmit light having a wavelength within a predetermined or given range. Because the color filter of the pixel structure of the CMOS image sensor may be formed in the photo diode having the afore-mentioned trench structure, the height of the pixel may be decreased, and the efficiency of the output signal and the color sensitivity may be increased.
    • 提供了CMOS图像传感器的像素结构。 像素结构可以包括半导体衬底,光电二极管和滤色器。 光电二极管可以具有形成在半导体衬底中的沟槽结构。 滤色器可以形成在沟槽结构中。 滤色器可以通过使用间隙填充工艺填充沟槽结构中的材料来形成。 沟槽结构中的材料可以将具有在预定或给定范围内的波长的光透射。 由于CMOS图像传感器的像素结构的滤色器可以形成在具有上述沟槽结构的光电二极管中,因此可以降低像素的高度,并且输出信号的效率和色彩灵敏度可以是 增加。