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1. 发明申请

US20100178468A1 ULTRA-THIN MICROPOROUS/HYBRID MATERIALS 有权
标题翻译：超细微孔/混合材料
公开(公告)号：US20100178468A1
公开(公告)日：2010-07-15
申请号：US12271719
申请日：2008-11-14
申请人： Ying-Bing JIANG , Joseph L. Cecchi , C. Jeffrey Brinker
发明人： Ying-Bing JIANG , Joseph L. Cecchi , C. Jeffrey Brinker
IPC分类号： C23C16/02 , B32B3/02 , B32B3/26 , B05D3/06
CPC分类号： B01D69/122 , B01D67/0002 , B01D67/0079 , B01D67/0083 , B01D67/009 , B01D69/148 , C23C16/401 , C23C16/45536 , C23C16/45555 , Y10T428/24521 , Y10T428/24545 , Y10T428/249953
摘要： Ultra-thin hybrid and/or microporous materials and methods for their fabrication are provided. In one embodiment, the exemplary hybrid membranes can be formed including successive surface activation and reaction steps on a porous support that is patterned or non-patterned. The surface activation can be performed using remote plasma exposure to locally activate the exterior surfaces of porous support. Organic/inorganic hybrid precursors such as organometallic silane precursors can be condensed on the locally activated exterior surfaces, whereby ALD reactions can then take place between the condensed hybrid precursors and a reactant. Various embodiments can also include an intermittent replacement of ALD precursors during the membrane formation so as to enhance the hybrid molecular network of the membranes.
摘要翻译：提供了超薄混合和/或微孔材料及其制造方法。在一个实施方案中，可以形成示例性混合膜，包括在图案化或非图案化的多孔载体上的连续表面活化和反应步骤。表面活化可以使用远程等离子体暴露来局部激活多孔载体的外表面。有机/无机混合前体例如有机金属硅烷前体可以在局部活化的外表面上缩合，由此ALD反应可以在冷凝的杂化前体和反应物之间进行。各种实施方案还可以包括在膜形成期间ALD前体的间歇替代，以增强膜的杂合分子网络。

2. 发明授权

US08187678B2 Ultra-thin microporous/hybrid materials 有权
标题翻译：超细微孔/混合材料
公开(公告)号：US08187678B2
公开(公告)日：2012-05-29
申请号：US12271719
申请日：2008-11-14
申请人： Ying-Bing Jiang , Joseph L. Cecchi , C. Jeffrey Brinker
发明人： Ying-Bing Jiang , Joseph L. Cecchi , C. Jeffrey Brinker
IPC分类号： H05H1/00 , H05H1/24 , C04B41/00 , C23C16/00
CPC分类号： B01D69/122 , B01D67/0002 , B01D67/0079 , B01D67/0083 , B01D67/009 , B01D69/148 , C23C16/401 , C23C16/45536 , C23C16/45555 , Y10T428/24521 , Y10T428/24545 , Y10T428/249953
摘要： Ultra-thin hybrid and/or microporous materials and methods for their fabrication are provided. In one embodiment, the exemplary hybrid membranes can be formed including successive surface activation and reaction steps on a porous support that is patterned or non-patterned. The surface activation can be performed using remote plasma exposure to locally activate the exterior surfaces of porous support. Organic/inorganic hybrid precursors such as organometallic silane precursors can be condensed on the locally activated exterior surfaces, whereby ALD reactions can then take place between the condensed hybrid precursors and a reactant. Various embodiments can also include an intermittent replacement of ALD precursors during the membrane formation so as to enhance the hybrid molecular network of the membranes.
摘要翻译：提供了超薄混合和/或微孔材料及其制造方法。在一个实施方案中，可以形成示例性混合膜，包括在图案化或非图案化的多孔载体上的连续表面活化和反应步骤。表面活化可以使用远程等离子体暴露来局部激活多孔载体的外表面。有机/无机混合前体例如有机金属硅烷前体可以在局部活化的外表面上缩合，由此ALD反应可以在冷凝的杂化前体和反应物之间进行。各种实施方案还可以包括在膜形成期间ALD前体的间歇替代，以增强膜的杂合分子网络。

3. 发明授权

US07947579B2 Method of making dense, conformal, ultra-thin cap layers for nanoporous low-k ILD by plasma assisted atomic layer deposition 有权
标题翻译：通过等离子体辅助原子层沉积制备纳米多孔低k ILD的致密，共形，超薄盖层的方法
公开(公告)号：US07947579B2
公开(公告)日：2011-05-24
申请号：US11673190
申请日：2007-02-09
申请人： Ying-Bing Jiang , Joseph L. Cecchi , C. Jeffrey Brinker
发明人： Ying-Bing Jiang , Joseph L. Cecchi , C. Jeffrey Brinker
IPC分类号： H01L21/4763
CPC分类号： A61K45/06 , A61K31/167 , A61K31/7048 , H01L21/76814 , H01L21/76826 , H01L21/76831 , Y10S977/89 , A61K2300/00
摘要： Barrier layers and methods for forming barrier layers on a porous layer are provided. The methods can include chemically adsorbing a plurality of first molecules on a surface of the porous layer in a chamber and forming a first layer of the first molecules on the surface of the porous layer. A plasma can then be used to react a plurality of second molecules with the first layer of first molecules to form a first layer of a barrier layer. The barrier layers can seal the pores of the porous material, function as a diffusion barrier, be conformal, and/or have a negligible impact on the overall ILD k value of the porous material.
摘要翻译：提供了阻挡层和在多孔层上形成阻挡层的方法。所述方法可以包括在多孔层的多孔层的表面上化学吸附多个第一分子并在多孔层的表面上形成第一分子的第一层。然后可以使用等离子体来使多个第二分子与第一分子的第一层反应以形成阻挡层的第一层。阻挡层可以密封多孔材料的孔，用作扩散阻挡层，保形，和/或对多孔材料的整体ILD k值具有可忽略的影响。

4. 发明申请

US20070190777A1 METHOD OF MAKING DENSE, CONFORMAL, ULTRA-THIN CAP LAYERS FOR NANOPOROUS LOW-K ILD BY PLASMA ASSISTED ATOMIC LAYER DEPOSITION 有权
标题翻译：通过等离子体辅助原子层沉积制备纳米级低K薄膜的DENSE，一致，超薄膜层的方法
公开(公告)号：US20070190777A1
公开(公告)日：2007-08-16
申请号：US11673190
申请日：2007-02-09
申请人： Ying Bing Jiang , Joseph L. Cecchi , C. Jeffrey Brinker
发明人： Ying Bing Jiang , Joseph L. Cecchi , C. Jeffrey Brinker
IPC分类号： H01L21/4763
CPC分类号： A61K45/06 , A61K31/167 , A61K31/7048 , H01L21/76814 , H01L21/76826 , H01L21/76831 , Y10S977/89 , A61K2300/00
摘要： Barrier layers and methods for forming barrier layers on a porous layer are provided. The methods can include chemically adsorbing a plurality of first molecules on a surface of the porous layer in a chamber and forming a first layer of the first molecules on the surface of the porous layer. A plasma can then be used to react a plurality of second molecules with the first layer of first molecules to form a first layer of a barrier layer. The barrier layers can seal the pores of the porous material, function as a diffusion barrier, be conformal, and/or have a negligible impact on the overall ILD k value of the porous material.
摘要翻译：提供了阻挡层和在多孔层上形成阻挡层的方法。所述方法可以包括在多孔层的多孔层的表面上化学吸附多个第一分子并在多孔层的表面上形成第一分子的第一层。然后可以使用等离子体来使多个第二分子与第一分子的第一层反应以形成阻挡层的第一层。阻挡层可以密封多孔材料的孔，用作扩散阻挡层，保形，和/或对多孔材料的整体ILD k值具有可忽略的影响。

5. 发明授权

US09242210B1 Enzymatically active high-flux selectively gas-permeable membranes 有权
标题翻译：酶活性高通量选择性透气膜
公开(公告)号：US09242210B1
公开(公告)日：2016-01-26
申请号：US14215964
申请日：2014-03-17
申请人： Ying-Bing Jiang , Joseph L. Cecchi , Susan Rempe , Yaqin Fu , C. Jeffrey Brinker
发明人： Ying-Bing Jiang , Joseph L. Cecchi , Susan Rempe , Yaqin Fu , C. Jeffrey Brinker
IPC分类号： C12N11/02 , C12N11/04 , B01D53/62
CPC分类号： B01D53/62 , B01D53/228 , B01D53/229 , B01D53/84 , B01D2255/804 , B01D2257/504 , Y02A50/2358 , Y02C10/02 , Y02C10/10
摘要： An ultra-thin, catalyzed liquid transport medium-based membrane structure fabricated with a porous supporting substrate may be used for separating an object species such as a carbon dioxide object species. Carbon dioxide flux through this membrane structures may be several orders of magnitude higher than traditional polymer membranes with a high selectivity to carbon dioxide. Other gases such as molecular oxygen, molecular hydrogen, and other species including non-gaseous species, for example ionic materials, may be separated using variations to the membrane discussed.
摘要翻译：用多孔支撑基底制造的超薄催化液体输送介质膜结构可用于分离物体物质如二氧化碳物体物质。通过该膜结构的二氧化碳通量可以比具有高二氧化碳选择性的传统聚合物膜高几个数量级。可以使用对所讨论的膜的变化来分离其它气体，例如分子氧，分子氢和包括非气态物质的其它物质，例如离子物质。

6. 发明申请

US20110186971A1 METHOD OF MAKING DENSE, CONFORMAL, ULTRA-THIN CAP LAYERS FOR NANOPOROUS LOW-K ILD BY PLASMA ASSISTED ATOMIC LAYER DEPOSITION 审中-公开
标题翻译：通过等离子体辅助原子层沉积制备纳米级低K薄膜的DENSE，一致，超薄膜层的方法
公开(公告)号：US20110186971A1
公开(公告)日：2011-08-04
申请号：US13083790
申请日：2011-04-11
申请人： Ying-Bing Jiang , Joseph L. Cecchi , C. Jeffrey Brinker
发明人： Ying-Bing Jiang , Joseph L. Cecchi , C. Jeffrey Brinker
IPC分类号： H01L29/02 , H01L21/02
CPC分类号： A61K45/06 , A61K31/167 , A61K31/7048 , H01L21/76814 , H01L21/76826 , H01L21/76831 , Y10S977/89 , A61K2300/00
摘要： Barrier layers and methods for forming barrier layers on a porous layer are provided. The methods can include chemically adsorbing a plurality of first molecules on a surface of the porous layer in a chamber and forming a first layer of the first molecules on the surface of the porous layer. A plasma can then be used to react a plurality of second molecules with the first layer of first molecules to form a first layer of a barrier layer. The barrier layers can seal the pores of the porous material, function as a diffusion barrier, be conformal, and/or have a negligible impact on the overall ILD k value of the porous material.
摘要翻译：提供了阻挡层和在多孔层上形成阻挡层的方法。所述方法可以包括在多孔层的多孔层的表面上化学吸附多个第一分子并在多孔层的表面上形成第一分子的第一层。然后可以使用等离子体来使多个第二分子与第一分子的第一层反应以形成阻挡层的第一层。阻挡层可以密封多孔材料的孔，用作扩散阻挡层，保形，和/或对多孔材料的整体ILD k值具有可忽略的影响。

7. 发明授权

US4476100A Method of enhancing selective isotope desorption from metals 失效
标题翻译：增强金属选择性同位素解吸的方法
公开(公告)号：US4476100A
公开(公告)日：1984-10-09
申请号：US517477
申请日：1983-07-26
申请人： Randall J. Knize , Joseph L. Cecchi
发明人： Randall J. Knize , Joseph L. Cecchi
IPC分类号： C01B4/00 , B01D59/00
CPC分类号： C01B4/00
摘要： A method of enhancing the thermal desorption of a first isotope of a diatomic gas from a metal comprises the steps of (a) establishing a partial pressure of a second isotope of the diatomic gas in vicinity of the metal; heating the metal to a temperature such that the first isotope is desorbed from the metal; and reducing the partial pressure of the desorbed first isotope while maintaining the partial pressure of the second isotope substantially constant. The method is especially useful for enhancing the desorption of tritium from the Zr-Al getter in a plasma confinement device.
摘要翻译：增强双金属原子气体从金属的第一同位素的热解吸的方法包括以下步骤：（a）在金属附近建立双原子气体的第二同位素的分压; 将金属加热到使第一同位素从金属中解吸的温度; 并且在保持第二同位素的分压基本上恒定的同时降低解吸的第一同位素的分压。该方法特别可用于在等离子体限制装置中增强来自Zr-Al吸气剂的氚的解吸附。

8. 发明授权

US4976938A Hydrogen isotope separation utilizing bulk getters 失效
标题翻译：使用大量吸气剂的氢同位素分离
公开(公告)号：US4976938A
公开(公告)日：1990-12-11
申请号：US379841
申请日：1989-07-14
申请人： Randall J. Knize , Joseph L. Cecchi
发明人： Randall J. Knize , Joseph L. Cecchi
IPC分类号： B01D59/26 , C01B4/00
CPC分类号： C01B4/00 , B01D59/26 , Y10S423/07
摘要： Tritium and deuterium are separated from a gaseous mixture thereof, derived from a nuclear fusion reactor or some other source, by providing a casing with a bulk getter therein for absorbing the gaseous mixture to produce an initial loading of the getter, partially desorbing the getter to produce a desorbed mixture which is tritium-enriched, pumping the desorbed mixture into a separate container, the remaining gaseous loading in the getter being deuterium-enriched, desorbing the getter to a substantially greater extent to produce a deuterium-enriched gaseous mixture, and removing the deuterium-enriched mixture into another container. The bulk getter may comprise a zirconium-aluminum alloy, or a zirconium-vanadium-iron alloy. The partial desorption may reduce the loading by approximately fifty percent. The basic procedure may be extended to produce a multistage isotope separator, including at least one additional bulk getter into which the tritium-enriched mixture is absorbed. The second getter is then partially desorbed to produce a desorbed mixture which is further tritium-enriched. The last-mentioned mixture is then removed from the container for the second getter, which is then desorbed to a substantially greater extent to produce a desorbed mixture which is deuterium-enriched. The last-mentioned mixture is then removed so that the cycle can be continued and repeated. The method of isotope separation is also applicable to other hydrogen isotopes, in that the method can be employed for separating either deuterium or tritium from normal hydrogen.
摘要翻译：氚和氘通过提供壳体与其中的大量吸气剂一起吸收气体混合物以产生吸气剂的初始负载，将吸气剂部分解吸到来自核聚变反应器或其它源的气体混合物产生富含氚的解吸附混合物，将解吸的混合物泵送到单独的容器中，吸气剂中剩余的气体负载富含氘，将吸气剂解吸附到更大程度上以产生富氘气体混合物，并除去将富氘混合物转化为另一容器。本体吸气剂可以包括锆 - 铝合金或锆 - 钒 - 铁合金。部分解吸可减少约50％的负荷。基本程序可以扩展到产生多级同位素分离器，包括至少一个额外的容积吸收剂，富含氚的混合物被吸收到该吸附剂中。然后将第二吸气剂部分解吸以产生进一步氚富集的解吸附混合物。然后将最后提到的混合物从用于第二吸气剂的容器中取出，然后将其解吸到显着更大的程度以产生富含氘的解吸附的混合物。然后去除最后提到的混合物，使得循环可以继续并重复。同位素分离方法也适用于其他氢同位素，因为该方法可用于从正常氢气中分离出氘或氚。

9. 发明授权

US5041147A Hydrogen isotope separation utilizing bulk getters 失效
标题翻译：使用大量吸气剂的氢同位素分离
公开(公告)号：US5041147A
公开(公告)日：1991-08-20
申请号：US623837
申请日：1990-12-07
申请人： Randall J. Knize , Joseph L. Cecchi
发明人： Randall J. Knize , Joseph L. Cecchi
IPC分类号： B01D59/26 , C01B4/00
CPC分类号： C01B4/00 , B01D59/26
摘要： Tritium and deuterium are separated from a gaseous mixture thereof, derived from a nuclear fusion reactor or some other source, by providing a casing with a bulk getter therein for absorbing the gaseous mixture to produce an initial loading of the getter, partially desorbing the getter to produce a desorbed mixture which is tritium-enriched, pumping the desorbed mixture into a separate container, the remaining gaseous loading in the getter being deuterium-enriched, desorbing the getter to a substantially greater extent to produce a deuterium-enriched gaseous mixture, and removing the deuterium-enriched mixture into another container. The bulk getter may comprise a zirconium-aluminum alloy, or a zirconium-vanadium-iron alloy. The partial desorption may reduce the loading by approximately fifty percent. The basic procedure may be extended to produce a multistage isotope separator, including at least one additional bulk getter into which the tritium-enriched mixture is absorbed. The second getter is then partially desorbed to produce a desorbed mixture which is further tritium-enriched. The last-mentioned mixture is then removed from the container for the second getter, which is then desorbed to a substantially greater extent to produce a desorbed mixture which is deuterium-enriched. The last-mentioned mixture is then removed so that the cycle can be continued and repeated. The method of isotope separation is also applicable to other hydrogen isotopes, in that the method can be employed for separating either deuterium or tritium from normal hydrogen.
摘要翻译：氚和氘通过提供壳体与其中的大量吸气剂一起吸收气体混合物以产生吸气剂的初始负载，将吸气剂部分解吸到来自核聚变反应器或其它源的气体混合物产生富含氚的解吸附混合物，将解吸的混合物泵送到单独的容器中，吸气剂中剩余的气体负载富含氘，将吸气剂解吸附到更大程度上以产生富氘气体混合物，并除去将富氘混合物转化为另一容器。本体吸气剂可以包括锆 - 铝合金或锆 - 钒 - 铁合金。部分解吸可减少约50％的负荷。基本程序可以扩展到产生多级同位素分离器，包括至少一个额外的容积吸收剂，富含氚的混合物被吸收到该吸附剂中。然后将第二吸气剂部分解吸以产生进一步氚富集的解吸附混合物。然后将最后提到的混合物从用于第二吸气剂的容器中取出，然后将其解吸到显着更大的程度以产生富含氘的解吸附的混合物。然后去除最后提到的混合物，使得循环可以继续并重复。同位素分离方法也适用于其他氢同位素，因为该方法可用于从正常氢气中分离出氘或氚。

10. 发明授权

US5587038A Apparatus and process for producing high density axially extending plasmas 失效
标题翻译：用于生产高密度轴向延伸等离子体的装置和方法
公开(公告)号：US5587038A
公开(公告)日：1996-12-24
申请号：US261853
申请日：1994-06-16
申请人： Joseph L. Cecchi , James E. Stevens
发明人： Joseph L. Cecchi , James E. Stevens
IPC分类号： H01J37/32 , C23F1/02
CPC分类号： H01J37/3211 , H01J37/321 , H01J37/3266
摘要： A high density elongated plasma is produced by the interaction of an electrically conductive planar antenna located outside of a processing chamber, and a magnetic field generating means, also located outside of the processing chamber. A magnetic field perpendicular to the plane of the antenna is generated within the processing chamber by the magnetic field generating means. The antenna is electrically coupled to a radio frequency power source to generate a helicon wave in the processing chamber to produce a plasma of a gas in the processing chamber. The magnetic field generated by the magnetic field generating means elongates the plasma within the processing chamber.
摘要翻译：通过位于处理室外部的导电平面天线和位于处理室外部的磁场产生装置的相互作用产生高密度细长等离子体。通过磁场产生装置在处理室内产生垂直于天线平面的磁场。天线电耦合到射频电源以在处理室中产生螺旋波，以在处理室中产生气体的等离子体。由磁场产生装置产生的磁场使处理室内的等离子体伸长。

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