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    • 8. 发明申请
    • Heater Stack In A Micro-Fluid Ejection Device And Method For Forming Floating Electrical Heater Element In The Heater Stack
    • 微流体喷射装置中的加热器堆叠和在加热器堆叠中形成浮动电加热器元件的方法
    • US20100165056A1
    • 2010-07-01
    • US12345788
    • 2008-12-30
    • Yimin GuanZachary Justin ReitmeierCarl Edmond Sullivan
    • Yimin GuanZachary Justin ReitmeierCarl Edmond Sullivan
    • B41J2/14H01L21/3213
    • B41J2/1412B41J2/1601B41J2/1629B41J2/1631
    • A method for forming a floating heater element includes processing a silicon substrate to form a heater stack having the heater element on the substrate with peripheral edge portions, processing the heater stack by depositing and patterning a layer of photoresist or hard mask thereon to substantially mask the heater stack and form a trench through the photoresist or hard mask exposing a surface area of the substrate extending along the peripheral edge portions of the heater element, and processing the masked heater stack and exposed surface area of the substrate by sequentially removing the photoresist and portions of the substrate at the exposed surface area and that underlie the heater element so as to create a well in the substrate undercutting the heater element and open along the peripheral edge portions thereof, the well being capable of filling with a fluid so as to produce the floating heater element.
    • 一种用于形成浮动加热元件的方法包括处理硅衬底以形成具有在周边边缘部分的衬底上具有加热器元件的加热器堆叠,通过在其上沉积和图案化一层光致抗蚀剂或硬掩模来对加热器堆叠进行处理以基本上掩盖 加热器堆叠并通过光致抗蚀剂或硬掩模形成沟槽,暴露沿着加热器元件的周边边缘部分延伸的衬底的表面区域,并且通过顺序地除去光致抗蚀剂和部分来处理掩模加热器堆叠和暴露的衬底表面区域 在基板的暴露的表面区域,并且位于加热器元件的下面,以便在底板上形成一个凹槽,该底板使加热器元件沿其周缘部分开口,并且能够填充流体,从而产生 浮动加热元件。