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    • 2. 发明授权
    • Atomic force microscope
    • 原子力显微镜
    • US06508110B1
    • 2003-01-21
    • US09716283
    • 2000-11-21
    • Hsi-Hsiang LinShih-Che Lo
    • Hsi-Hsiang LinShih-Che Lo
    • G01B734
    • G01Q60/34Y10S977/851
    • A tapping mode atomic force microscope includes a sinusoidal signal generator. The sinusoidal signal generator generates sinusoidal wave signals to a modulating laser diode for outputting a pulsed laser beam. The laser beam reflects from the back side of a photo detector and then a current signal with a corresponding intensity is output b y the photo detector. Then, the signal is converted by a current to voltage converter and then is operated by a differential amplifier. After the DC component and the undesired multiple frequency harmonics of the current signal is filtered by a band pass filter, the current signal is processed by a demodulation circuit and a low pass filter to produce a voltage value corresponding to probe deformation. After inputting this voltage value to a Z-axis servo controller, a corresponding control command is acquired based on a control algorithm so as to keep the value of the probe deformation constant. If the position of the Z-axis is recorded at a specific time point and all the data are collected, the surface profile of the test sample can be obtained.
    • 敲击模式原子力显微镜包括正弦信号发生器。 正弦信号发生器产生正弦波信号到调制激光二极管,用于输出脉冲激光束。 激光束从光电检测器的背面反射,然后输出具有相应强度的电流信号。 然后,信号由电流转换为电压转换器,然后由差分放大器操作。 在通过带通滤波器对电流信号的直流分量和不需要的多次谐波进行滤波之后,由解调电路和低通滤波器对电流信号进行处理,以产生与探头变形相对应的电压值。 在将该电压值输入到Z轴伺服控制器之后,基于控制算法获取相应的控制命令,以使探头的值保持恒定。 如果在特定时间点记录Z轴的位置并且收集所有数据,则可以获得测试样品的表面轮廓。
    • 6. 发明授权
    • Sensing pad
    • 感应垫
    • US08922225B2
    • 2014-12-30
    • US13491151
    • 2012-06-07
    • Jin-Chern ChiouShih-Che LoHsin-Hsueh TsaiJia-Hung YanFong Yuan ChangHui-Mei Chang
    • Jin-Chern ChiouShih-Che LoHsin-Hsueh TsaiJia-Hung YanFong Yuan ChangHui-Mei Chang
    • G01R27/28
    • A61B5/6892A61B2562/0252G01G19/445
    • A sensing pad includes a first sensing layer, a second sensing layer and a spacer layer. The second sensing layer has at least one second sparse sensing zone and at least one second dense sensing zone. The spacer layer is disposed between the first sensing layer and second sensing layer, and includes at least one high pressure spacer zone and at least one low pressure spacer zone. The second sensing layer is pressed downwards upon receiving a load to compress the spacer layer and contact the first sensing layer to generate electric connection, thereby detecting the pressed location. Through the dense sensing zone and sparse sensing zone distributed on the second sensing layer whether a person is lay on a bed can be judged to reduce faulty judgments, and the posture of the person can be detected to better understand conditions of the person lay on the bed.
    • 感测板包括第一感测层,第二感测层和间隔层。 第二感测层具有至少一个第二稀疏感测区和至少一个第二致密感测区。 间隔层设置在第一感测层和第二感测层之间,并且包括至少一个高压间隔区和至少一个低压间隔区。 接收负载以压缩间隔层并接触第一感测层以产生电连接,从而检测按压位置,第二感测层被向下按压。 通过分布在第二感测层上的密集感测区和稀疏感测区,人是否躺在床上可以判断为减少错误的判断,并且可以检测到人的姿势,以更好地了解人的状况 床。
    • 7. 发明申请
    • INDUCTION PAD
    • 感应垫
    • US20130328574A1
    • 2013-12-12
    • US13491151
    • 2012-06-07
    • Jin-Chern CHIOUShih-Che LoHsin-Hsueh TsaiJia-Hung YanFong Yuan ChangHui-Mei Chang
    • Jin-Chern CHIOUShih-Che LoHsin-Hsueh TsaiJia-Hung YanFong Yuan ChangHui-Mei Chang
    • G01R27/28
    • A61B5/6892A61B2562/0252G01G19/445
    • An induction pad includes a first induction layer, a second induction layer and a spacer layer. The second induction layer has at least one second sparse induction zone and at least one second dense induction zone. The spacer layer is disposed between the first induction layer and second induction layer, and includes at least one high pressure spacer zone and at least one low pressure spacer zone. The second induction layer is pressed downwards upon receiving a load to compress the spacer layer and contact the first induction layer to generate electric connection, thereby detecting the pressed location. Through the dense induction zone and sparse induction zone distributed on the second induction layer whether a person is lay on a bed can be judged to reduce faulty judgments, and the posture of the person can be detected to better understand conditions of the person lay on the bed.
    • 感应垫包括第一感应层,第二感应层和间隔层。 第二感应层具有至少一个第二稀疏诱导区和至少一个第二致密诱导区。 间隔层设置在第一感应层和第二感应层之间,并且包括至少一个高压间隔区和至少一个低压间隔区。 在接收到负载以压缩间隔层并接触第一感应层以产生电连接时,第二感应层被向下按压,从而检测按压位置。 通过分布在第二感应层上的致密感应区和稀疏诱导区,无论人躺在床上,都可以判断为减少错误的判断,可以检测到人的姿势,以更好地了解人的状况 床。
    • 8. 发明授权
    • Manufacturing method for planar microprobe including electrostatic
actuator using sacrificial layer technology
    • 包括使用牺牲层技术的静电致动器的平面微探针的制造方法
    • US6136208A
    • 2000-10-24
    • US374829
    • 1999-08-13
    • Rou-Fu ChouWen-Syang HsuShih-Che LoHsi-Fu Lin
    • Rou-Fu ChouWen-Syang HsuShih-Che LoHsi-Fu Lin
    • B81B3/00G01Q70/16H01L21/302
    • G01Q70/16B82Y35/00G01Q10/045
    • The present invention discloses a planar microprobe and method of manufacturing the same. The present invention utilizes semiconductor process technologies that includes electroplating technology and sacrificial layer technology to integrate constituent elements on a silicon wafer having an insulator layer. The planar microprobe comprises: an upper cantilever beam including a first electrode; a supporting pad coupled to the upper cantilever beam; and a lower cantilever beam coupled to the supporting pad, situated below the upper cantilever beam and spaced by a distance from the upper cantilever beam. Besides, the lower cantilever beam comprises: a second electrode in cooperation with the first electrode to control a vertical displacement of the lower cantilever beam by applying an external voltage thereto. A tip is coupled to the second electrode. The microprobe is manufactured by depositing a photoresist sacrificial layer on a lower cantilever beam. Metal is electroplated to form an upper cantilever beam. Then, residual silicon, silicon oxide and photoresist are etched to release the microprobe.
    • 本发明公开了一种平面微探针及其制造方法。 本发明利用包括电镀技术和牺牲层技术在内的半导体工艺技术将组成元件集成在具有绝缘体层的硅晶片上。 平面微探针包括:上悬臂梁,包括第一电极; 耦合到所述上悬臂梁的支撑垫; 以及耦合到支撑垫的下悬臂梁,位于上悬臂梁的下方并与上悬臂梁隔开一段距离。 此外,下悬臂梁包括:与第一电极配合的第二电极,以通过向其施加外部电压来控制下悬臂梁的垂直位移。 尖端连接到第二电极。 微探针通过在下悬臂梁上沉积光致抗蚀剂牺牲层来制造。 电镀金属以形成上悬臂梁。 然后,蚀刻剩余的硅,氧化硅和光致抗蚀剂以释放微探针。
    • 9. 发明授权
    • Ozone generating device
    • 臭氧发生装置
    • US5733512A
    • 1998-03-31
    • US844279
    • 1997-04-18
    • Ming-Jye TsaiShih-Che LoRay-Ten ChenTung-Chuan Wu
    • Ming-Jye TsaiShih-Che LoRay-Ten ChenTung-Chuan Wu
    • C01B13/11B01J19/12
    • C01B13/11C01B2201/12C01B2201/22C01B2201/62
    • The present invention relates to an ozone generating device, comprising: a main body, having a cavity, on the lateral sides further having a plurality of inlet holes, which connect the cavity to the exterior to let in air, and on the top side having a plurality of outlet holes, which connect the cavity to the exterior to let out air with ozone; two electrodes, attached to the bottom and the top side of the cavity, for generating an electric discharge, so as to generate ozone in the cavity; and a heating device, installed below the electrode at the bottom side of the cavity, so as to heat the electrode and, indirectly, air in the cavity; wherein heating the first electrode by the heating device allows the operating voltage for generating an electric discharge to be reduced and heating the air with ozone within the cavity causes it to drift upward and to flow out of the cavity through the outlet holes.
    • 臭氧发生装置技术领域本发明涉及一种臭氧发生装置,其特征在于,具有:主体,具有空腔,在所述侧面上还具有多个入口孔,所述多个入口孔将所述空腔连接到外部以进入空气, 多个出口孔,其将空腔连接到外部以排出具有臭氧的空气; 两个电极,附接到腔的底部和顶侧,用于产生放电,以便在空腔中产生臭氧; 以及加热装置,其安装在所述空腔底部的所述电极下方,以便加热所述电极并间接地加热所述空腔中的空气; 其中通过加热装置加热第一电极允许减小放电的工作电压并且使空腔内的臭氧在空腔内加热使其向上漂移并通过出口孔流出空腔。
    • 10. 发明授权
    • Pressure measurement member
    • 压力测量部件
    • US08714020B2
    • 2014-05-06
    • US13412467
    • 2012-03-05
    • Jin-Chern ChiouShih-Che LoYung-Jiun LinHsin-Hsueh Tsai
    • Jin-Chern ChiouShih-Che LoYung-Jiun LinHsin-Hsueh Tsai
    • G01L7/08
    • G01L1/20G01L9/0057
    • A pressure measurement member includes an insulation bottom layer, a flexible insulation top layer and at least one spacer. The insulation bottom layer has a bottom conductive element on the surface thereof. The flexible insulation top layer has a top conductive element on the surface thereof adjacent to the insulation bottom layer and opposite to the bottom conductive element. The spacer is located between the insulation bottom layer and flexible insulation top layer to separate the insulation bottom layer and flexible insulation top layer. As different pressures could result in different impedance variations on the contact area between the top conductive element and bottom conductive element, the pressure being applied can be derived from the impedance variation. The invention can measure pressure without using piezoresistive material to reduce cost.
    • 压力测量构件包括绝缘底层,柔性绝缘顶层和至少一个间隔件。 绝缘底层在其表面上具有底部导电元件。 柔性绝缘顶层在其与绝缘底层相邻并与底部导电元件相对的表面上具有顶部导电元件。 间隔件位于绝缘底层和柔性绝缘顶层之间,以分离绝缘底层和柔性绝缘顶层。 由于不同的压力可能导致顶部导电元件和底部导电元件之间的接触面积上的不同阻抗变化,所以施加的压力可以从阻抗变化导出。 本发明可以在不使用压阻材料的情况下测量压力以降低成本。