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    • 1. 发明申请
    • Patterned Sapphire Substrate Manufacturing Method
    • 图案蓝宝石基板制造方法
    • US20110168670A1
    • 2011-07-14
    • US12687510
    • 2010-01-14
    • Yew-Chung Sermon WuChi-Hao ChengBo-Wen LinWen-Ching HsuSzu-Hua Ho
    • Yew-Chung Sermon WuChi-Hao ChengBo-Wen LinWen-Ching HsuSzu-Hua Ho
    • C23F1/00
    • G03F7/00
    • A patterned sapphire substrate manufacturing method uses two-section dip etching procedure to improve the lateral etching rate at each etching position, so as to produce a concave-convex pattern composed of a plurality of triangular pyramid structures protruded from a surface onto an upper surface of a sapphire substrate, such that less planar area of the sapphire substrate surface will remain, and a mixed solution of sulfuric acid and phosphoric acid is used in a first dip etching step, and pure phosphoric acid or a mixed solution of sulfuric acid and phosphoric acid is used in a second dip etching step for etching the sapphire substrate to control the inclination of each triangular pyramid structure precisely, and providing a better light extraction rate for later manufactured light emitting diodes.
    • 图案化蓝宝石衬底制造方法使用两段浸渍蚀刻方法来改善每个蚀刻位置处的横向蚀刻速率,以便产生由多个三角锥体结构组成的凹凸图案,所述凹凸图案从表面突出到 使蓝宝石衬底表面的平坦面积较小的蓝宝石衬底,在第一浸渍蚀刻工序中使用硫酸和磷酸的混合溶液,纯磷酸或硫酸与磷酸的混合溶液 用于蚀刻蓝宝石衬底的第二浸渍蚀刻步骤,以精确地控制每个三角锥形结构的倾斜度,并为稍后制造的发光二极管提供更好的光提取率。