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1. 发明授权

US08723837B1 Scanning mirror touch screen 有权
标题翻译：扫描镜面触摸屏
公开(公告)号：US08723837B1
公开(公告)日：2014-05-13
申请号：US13080044
申请日：2011-04-05
申请人： Yee-Chung Fu , Chen-Chi Lin
发明人： Yee-Chung Fu , Chen-Chi Lin
IPC分类号： G09G5/00
CPC分类号： G06F3/0423
摘要： A touch panel system includes a panel, first and second scanning mirrors located about first and second panel corners, a photodetector array along a first panel edge between the first and the second panel corners, and a stationary plane mirror along a second panel edge adjacent to the first panel edge. The first scanning mirror sweeps a light beam across the panel. The second mirror sweeps another light beam across the panel, a part of which reflects from the stationary plane mirror to back into the panel to sweep the panel from a different angle. The light beams, including the reflected part from the stationary plane mirror, strike objects on the panel and reflect towards the photodetector array. Angular positions of the first and the second scanning mirrors at the times the photodetector array detects the reflected light are correlated to object locations.
摘要翻译：触摸面板系统包括面板，围绕第一和第二面板角落定位的第一和第二扫描镜，沿着第一和第二面板角部之间的第一面板边缘的光电检测器阵列，以及沿着与第二面板边缘相邻的第二面板边缘的固定平面镜第一个面板边缘。第一扫描镜扫过面板上的光束。第二个镜子扫过另一个光束穿过面板，其一部分从固定平面镜反射回到面板中，从不同的角度扫过面板。包括来自固定平面镜的反射部分的光束撞击面板上的物体并朝向光电检测器阵列反射。光电检测器阵列检测反射光时第一和第二扫描镜的角位置与物体位置相关。

2. 发明授权

US07576955B1 Disk drive actuator with outer arms having regions of reduced width and increased thickness 有权
标题翻译：具有外臂的磁盘驱动器致动器具有减小的宽度和增加的厚度的区域
公开(公告)号：US07576955B1
公开(公告)日：2009-08-18
申请号：US11295418
申请日：2005-12-06
申请人： Jian Yang , Chen-Chi Lin , Yee-Chung Fu
发明人： Jian Yang , Chen-Chi Lin , Yee-Chung Fu
IPC分类号： G11B5/55 , G11B21/08
CPC分类号： G11B5/4833
摘要： An actuator for a disk drive is disclosed. The actuator includes a plurality of arms including an upper outer arm, a lower outer arm, and at least one inner arm. The outer arms each include a region of reduced width and also include a region of increased thickness, both such regions being located closer to a proximal supported end of the outer arm than to its distal end. Each region of increased thickness has a minimum thickness that is more than the thickness of the inner arm at an equal distance from the axis. Each region of reduced width has a minimum width that is less than the minimum width of the inner arm at an equal distance from the axis.
摘要翻译：公开了一种用于磁盘驱动器的致动器。致动器包括多个臂，包括上外臂，下外臂和至少一个内臂。外臂各自包括宽度减小的区域并且还包括增加厚度的区域，两个这样的区域位于比其远端更靠近外臂的近侧支撑的端部。增加厚度的每个区域具有比距离轴线等距离的内臂的厚度的最小厚度。减小宽度的每个区域具有小于距离轴线等距离的内臂的最小宽度的最小宽度。

3. 发明申请

US20120085728A1 Novel process for MEMS scanning mirror with mass remove from mirror backside 有权
标题翻译： MEMS扫描镜的新工艺，从镜面背面去除质量
公开(公告)号：US20120085728A1
公开(公告)日：2012-04-12
申请号：US12924873
申请日：2010-10-07
申请人： Jun Chen , Guomin Mao , Tom Zhong , Wei Cao , Yee-Chung Fu , Chyu-Jiuh Torng
发明人： Jun Chen , Guomin Mao , Tom Zhong , Wei Cao , Yee-Chung Fu , Chyu-Jiuh Torng
IPC分类号： B81C1/00
CPC分类号： B81B3/0045 , B81B2201/042 , G02B26/0841
摘要： Two methods of fabricating a MEMS scanning mirror having a tunable resonance frequency are described. The resonance frequency of the mirror is set to a particular value by mass removal from the backside of the mirror during fabrication.
摘要翻译：描述制造具有可调共振频率的MEMS扫描反射镜的两种方法。反射镜的共振频率通过在制造期间从反射镜的背面质量去除而被设定为特定的值。

4. 发明授权

US07459093B1 MEMS mirror made from topside and backside etching of wafer 有权
标题翻译： MEMS镜由晶片的顶侧和背面蚀刻制成
公开(公告)号：US07459093B1
公开(公告)日：2008-12-02
申请号：US11456562
申请日：2006-07-10
申请人： Yee-Chung Fu
发明人： Yee-Chung Fu
IPC分类号： C23F1/00 , B44C1/22
CPC分类号： G02B26/0841
摘要： A process for constructing a micro-electro-mechanical system (MEMS) device includes etching the topside of a silicon wafer to form a first support layer having asymmetric pads. The backside of the silicon wafer is etched to form a top layer with a mirror, beam structures extending from the mirror, and rotating comb teeth extending from the beam structures. Before or after the backside of the silicon wafer is etched, the topside of the silicon wafer is bonded to a glass wafer that forms a second support layer. Prior to bonding the silicon wafer to the glass wafer, the glass wafer may be etched to form a recess and/or a cavity that accommodates mobile elements in the silicon wafer. Due to the asymmetry of the pads in the first support layer below the rotating comb teeth in the top layer, oscillation can be initiated.
摘要翻译：构造微电子机械系统（MEMS）装置的方法包括蚀刻硅晶片的顶面以形成具有不对称垫的第一支撑层。蚀刻硅晶片的背面以形成具有反射镜的顶层，从反射镜延伸的束结构以及从梁结构延伸的旋转梳齿。在蚀刻硅晶片的背面之前或之后，硅晶片的顶侧结合到形成第二支撑层的玻璃晶片上。在将硅晶片接合到玻璃晶片之前，玻璃晶片可以被蚀刻以形成容纳硅晶片中的移动元件的凹部和/或空腔。由于顶层中的旋转梳齿下方的第一支撑层中的焊盘的不对称性，可以启动振荡。

5. 发明授权

US07301689B2 MEMS mirror with parallel springs and arched support for beams 有权
标题翻译：具有平行弹簧和弓形支撑的MEMS镜
公开(公告)号：US07301689B2
公开(公告)日：2007-11-27
申请号：US11263795
申请日：2005-10-31
申请人： Yee-Chung Fu
发明人： Yee-Chung Fu
IPC分类号： G02B26/00 , G02B26/08
CPC分类号： G02B26/0841
摘要： A micro-electro-mechanical system (MEMS) mirror device includes (1) a mirror, (2) a first group of spring elements coupled to one half of the mirror, (3) a first beam coupled to the first group of spring elements, (4) a first spring coupled to the first beam, and (5) a first stationary pad coupled to the first spring. The device further includes (6) a second group of spring elements coupled in parallel to another half of the mirror, (7) a second beam coupled to the second group of spring elements, (8) a second spring coupled to the second beam, (9) and a second stationary pad coupled to the second spring. The device further includes a third beam that rigidly interconnects the first and the second beams so they rotate the mirror in unison.
摘要翻译：微电子机械系统（MEMS）镜装置包括（1）反射镜，（2）耦合到反射镜的一半的第一组弹簧元件，（3）耦合到第一组弹簧元件的第一光束，（4）耦合到所述第一梁的第一弹簧，以及（5）联接到所述第一弹簧的第一固定垫。该装置还包括（6）平行于反射镜的另一半耦合的第二组弹簧元件，（7）耦合到第二组弹簧元件的第二光束，（8）耦合到第二光束的第二弹簧，（9）和耦合到第二弹簧的第二固定垫。该装置还包括第三梁，其将第一和第二梁刚性互连，使得它们一致地旋转反射镜。

6. 发明授权

US07252394B1 Laser projection display and illumination device with MEMS scanning mirror for indoor and outdoor applications 有权
标题翻译：激光投影显示和照明装置，采用MEMS扫描镜，适用于室内和室外应用
公开(公告)号：US07252394B1
公开(公告)日：2007-08-07
申请号：US10723400
申请日：2004-03-10
申请人： Yee-Chung Fu
发明人： Yee-Chung Fu
IPC分类号： G03B21/14
CPC分类号： G03B21/28 , G02B26/101 , H04N9/3129 , Y10S362/812
摘要： A projection display system includes a light source emitting a light beam, and a reflecting mirror system for scanning the light beam over an image to illuminate the image. The light source can be solid state such as a laser diode. The reflecting mirror system can be one or more MEMS scanning mirrors that rotate to raster scan the light beam over the image. The image can be an advertisement located on a wall, a screen, a sign, or a billboard. The image can also be a semi-transparent image that is projected onto a medium to produce a larger image.
摘要翻译：投影显示系统包括发射光束的光源和用于在图像上扫描光束以照亮图像的反射镜系统。光源可以是诸如激光二极管的固态。反射镜系统可以是一个或多个MEMS扫描镜，其旋转以光栅扫描图像上的光束。图像可以是位于墙壁，屏幕，标牌或广告牌上的广告。图像也可以是投影到介质上以产生更大图像的半透明图像。

7. 发明授权

US07046421B1 MEMS scanning mirror with trenched surface and I-beam like cross-section for reducing inertia and deformation 有权
标题翻译：具有沟槽表面和I型梁的MEMS扫描镜，用于减小惯性和变形
公开(公告)号：US07046421B1
公开(公告)日：2006-05-16
申请号：US10778742
申请日：2004-02-13
申请人： Yee-Chung Fu
发明人： Yee-Chung Fu
IPC分类号： G02B26/00
CPC分类号： G02B26/0841
摘要： A micro-electro-mechanical system (MEMS) device includes a mirror having a top surface with trenches, a beam connected to the mirror, rotational comb teeth connected to the beam, and one or more springs connecting the beam to a bonding pad. The mirror can have a bottom surface for reflecting light. The mirror can include a top flange and a bottom flange joined by a web, wherein the top and the bottom flanges form the top and the bottom surfaces, respectively. The rotational comb teeth can have a tapered shape. Stationary comb teeth can be interdigitated with the rotational comb teeth either in-plane or out-of-plane. Steady or oscillating voltage difference between the rotational and the stationary comb teeth can be used to oscillate or tune the mirror.
摘要翻译：微电子机械系统（MEMS）装置包括具有沟槽的顶表面的反射镜，连接到反射镜的光束，连接到光束的旋转梳齿，以及将光束连接到接合焊盘的一个或多个弹簧。镜子可以具有用于反射光的底面。镜子可以包括顶部凸缘和由腹板连接的底部凸缘，其中顶部和底部凸缘分别形成顶部和底部表面。旋转梳齿可具有锥形形状。固定梳齿可以与旋转梳齿在平面内或平面外相互交错。旋转和固定梳齿之间的稳定或振荡电压差可用于振荡或调谐镜子。

8. 发明授权

US07009755B2 MEMS mirror with drive rotation amplification of mirror rotation angle 有权
标题翻译： MEMS镜与驱动旋转放大反光镜旋转角度
公开(公告)号：US07009755B2
公开(公告)日：2006-03-07
申请号：US11201672
申请日：2005-08-10
申请人： Yee-Chung Fu
发明人： Yee-Chung Fu
IPC分类号： G02B26/00 , G02B26/02
CPC分类号： G02B26/0841
摘要： A micro-electro-mechanical system (MEMS) mirror device includes a mirror coupled to an actuator by a first torsional hinge along a rotational axis. The actuator has a body and a group of rotational teeth extending from the body. An anchor is coupled another end of the actuator by a second torsional hinge along the rotational axis.
摘要翻译：微机电系统（MEMS）镜装置包括通过沿旋转轴线的第一扭转铰链联接到致动器的反射镜。致动器具有从主体延伸的主体和一组旋转齿。锚固体通过沿着旋转轴线的第二扭转铰链联接致动器的另一端。

9. 发明授权

US06985279B1 MEMS mirror with drive rotation amplification of mirror rotation angle 有权
标题翻译： MEMS镜与驱动旋转放大反光镜旋转角度
公开(公告)号：US06985279B1
公开(公告)日：2006-01-10
申请号：US10910384
申请日：2004-08-02
申请人： Yee-Chung Fu
发明人： Yee-Chung Fu
IPC分类号： G02B7/182
CPC分类号： G02B26/0841
摘要： A micro-electro-mechanical system (MEMS) mirror device includes a mirror coupled to a rotating frame by a first torsional hinge along a rotational axis. The rotating frame has a body that defines a frame opening, and a group of rotational teeth extending from the body. A first bonding pad is located in the frame opening and coupled to the rotating frame by a second torsional hinge along the rotational axis. A second bonding pad is coupled to the rotating frame by a third torsional hinge along the rotational axis.
摘要翻译：微机电系统（MEMS）镜装置包括通过第一扭转铰链沿着旋转轴线耦合到旋转框架的反射镜。旋转框架具有限定框架开口的主体和从主体延伸的一组旋转齿。第一接合垫位于框架开口中，并通过沿着旋转轴线的第二扭转铰链与旋转框架连接。第二接合焊盘通过沿着旋转轴线的第三扭转铰链联接到旋转框架。

10. 发明申请

US20050045727A1 MEMS scanning mirror with distributed hinges and multiple support attachments 有权
标题翻译：具有分布式铰链和多个支撑附件的MEMS扫描镜
公开(公告)号：US20050045727A1
公开(公告)日：2005-03-03
申请号：US10683962
申请日：2003-10-10
申请人： Yee-Chung Fu
发明人： Yee-Chung Fu
IPC分类号： G02B26/08 , G06K7/10 , G02B26/00 , G06K7/14
CPC分类号： G06K7/10653 , G02B26/0841
摘要： A MEMS scanning mirror device includes a scanning mirror, rotational comb teeth, stationary comb teeth, distributed serpentine springs, and anchors. The scanning mirror and the rotational comb teeth are driven by electrostatic force from stationary in-plane and/or out-of-plane teeth. The mirror is attached to the rotational comb structure by multiple support attachments. Multiple serpentine springs serve as the flexible hinges that link the movable structure to the stationary support structure.
摘要翻译： MEMS扫描镜装置包括扫描镜，旋转梳齿，固定梳齿，分布蛇形弹簧和锚。扫描镜和旋转梳齿由固定的平面内和/或平面外的齿的静电力驱动。镜子通过多个支撑附件附接到旋转梳结构。多个蛇形弹簧用作将可移动结构连接到固定支撑结构的柔性铰链。

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