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    • 5. 发明授权
    • Exposure apparatus and device fabrication method
    • 曝光装置和装置制造方法
    • US08625074B2
    • 2014-01-07
    • US12577336
    • 2009-10-12
    • Takahiro Matsumoto
    • Takahiro Matsumoto
    • G03B27/52G01B11/14G03F9/00
    • G03F9/7023G03B27/42G03B27/54G03F9/7026G03F9/7076
    • The present invention provides an exposure apparatus including a projection optical system configured to project a pattern of a reticle located on an object plane onto a substrate located on an image plane, a phase shift type mark mounted on a stage which holds the substrate, an image sensor which is set at one of a position of the object plane and a position optically conjugate to the object plane, and is configured to capture an image of the mark via the projection optical system, and a controller configured to control the stage based on an interval between edge images, formed by a pair of edge portions, in the image of the mark captured by the image sensor.
    • 本发明提供一种曝光装置,包括:投影光学系统,被配置为将位于物体平面上的标线片的图案投影到位于图像平面上的基板上;相移型标记,安装在保持基板的台上;图像 传感器,其设置在物体平面的位置和与物体平面光学共轭的位置之一处,并且被配置为经由投影光学系统捕获标记的图像;以及控制器,被配置为基于 由图像传感器捕获的标记的图像中由一对边缘部分形成的边缘图像之间的间隔。
    • 6. 发明授权
    • Photocathode apparatus using photoelectric effect of surface plasmon resonance photons
    • 光电阴极设备采用光电效应的表面等离子体共振光子
    • US08481937B2
    • 2013-07-09
    • US12465734
    • 2009-05-14
    • Takahiro Matsumoto
    • Takahiro Matsumoto
    • H01L25/00
    • H01J40/06
    • A photocathode apparatus is constructed by a transparent body adapted to receive incident light, and a metal cover layer formed on a surface of the transparent body. The incident light reaches an incident/reflective surface of the metal cover layer through the surface of the transparent body to excite surface plasmon resonance light in the incident/reflective surface of the metal cover layer, thus emitting photoelectrons from a photoelectric surface of the metal cover layer opposite to the incident/reflective surface thereof by the photoelectric effect of one of the surface plasmon resonance photons and its second harmonic generation wave.
    • 光电阴极装置由适于接收入射光的透明体和形成在透明体的表面上的金属覆盖层构成。 入射光通过透明体的表面到达金属覆盖层的入射/反射表面,以激发金属覆盖层的入射/反射表面中的表面等离子体共振光,从而从金属覆盖层的光电表面发射光电子 通过其中一个表面等离子体共振光子及其二次谐波产生波的光电效应与入射/反射表面相对的层。