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1. 发明授权

US06806594B2 Coil unit for linear motor 失效
标题翻译：线性电机线圈单元
公开(公告)号：US06806594B2
公开(公告)日：2004-10-19
申请号：US10078261
申请日：2002-02-20
申请人： Yasushi Koyanagawa , Hidehiko Mori , Tatsuro Kato , Masanobu Sugimine , Daisuke Shinohira
发明人： Yasushi Koyanagawa , Hidehiko Mori , Tatsuro Kato , Masanobu Sugimine , Daisuke Shinohira
IPC分类号： H02K4100
CPC分类号： H02K41/03 , H02K3/24
摘要： A coil in a coil unit for a linear motor is evenly cooled in the lengthwise direction to reduce an influence of heat on the outside from the coil unit. The coil unit includes the plate-shape coil extending in a traveling direction of the linear motor, a shell for internally storing the coil while maintaining a predetermined gap to the coil, and leading a refrigerant through the gap to cool the coil, a main flow passage formed inside the shell while extending in a lengthwise direction X of the coil, and leading the refrigerant supplied from the outside into itself, and a plurality of branch flow passages formed at a predetermined interval in the lengthwise direction X on the main flow passage for leading out the refrigerant led into the main flow passage in a widthwise direction Y of the coil. The refrigerant led out from the branch flow passages after having flown through the main flow passage flows into the gap between the shell and the coil, and cools the coil along the widthwise direction Y.
摘要翻译：用于线性电动机的线圈单元中的线圈在长度方向上被均匀地冷却，以减少来自线圈单元的热量对外部的影响。线圈单元包括沿线性电动机的行进方向延伸的板状线圈，用于内部存储线圈的壳体，同时保持与线圈的预定间隙，并且引导制冷剂通过间隙冷却线圈，主流形成在壳体内的通道，同时沿着线圈的长度方向X延伸，并且将从外部供给的制冷剂引导到其自身中;以及多个分支流道，其在主流路上沿长度方向X以预定间隔形成，引出在线圈的宽度方向Y上流入主流路的制冷剂。在流过主流路之后从分支流路引出的制冷剂流入壳体和线圈之间的间隙，并沿着宽度方向Y冷却线圈。

2. 发明授权

US07387530B2 Waterproof terminal block unit with insulating plate 失效
标题翻译：防水接线端子单元，带绝缘板
公开(公告)号：US07387530B2
公开(公告)日：2008-06-17
申请号：US10576072
申请日：2004-10-15
申请人： Daisuke Shinohira , Dotaru Usui , Hidehiko Mori , Yasushi Koyanagawa
发明人： Daisuke Shinohira , Dotaru Usui , Hidehiko Mori , Yasushi Koyanagawa
IPC分类号： H01R13/52
CPC分类号： H01R13/5202 , H01R9/24 , H01R13/5216 , H01R13/748 , H02K5/225
摘要： A terminal table unit includes: a terminal table (10) having a metal terminal (12) at its lower surface for connecting a lead wire (60); an insulation plate (20) adhered to the lower surface of the terminal table and having a hole (20-1) at a portion corresponding to the portion containing a metal terminal and its surrounding region; and a metal plate (30) having an upper surface adhered to the lower surface of the insulation plate and having a through hole (30-2) reaching from the upper surface to the lower surface. Through the through hole (30-2), the lead wire is brought out to the lower surface of the metal plate. The terminal unit has a contact surface between the insulation plate containing the hole (20-1) and the terminal table, a contact surface between the insulation plate and the metal plate, and the through hole (30-2) which are filled with adhesive and unified by a bolt (40).
摘要翻译：端子台单元包括：端子台（10），在其下表面具有金属端子（12），用于连接引线（60）; 绝缘板（20），其粘附到端子台的下表面，并且在与包含金属端子及其周围区域的部分对应的部分处具有孔（20-1）; 以及金属板（30），其具有粘附到绝缘板的下表面的上表面，并且具有从上表面到下表面到达的通孔（30-2）。通过通孔（30-2），导线被引出到金属板的下表面。端子单元具有包含孔（20-1）的绝缘板和端子台之间的接触表面，绝缘板和金属板之间的接触表面以及填充有粘合剂的通孔（30-2）并用螺栓（40）统一。

3. 发明申请

US20070155200A1 Waterproof terminal block unit 失效
标题翻译：防水端子台单元
公开(公告)号：US20070155200A1
公开(公告)日：2007-07-05
申请号：US10576072
申请日：2004-10-15
申请人： Daisuke Shinohira , Dotaru Usui , Hidehiko Mori , Yasushi Koyanagawa
发明人： Daisuke Shinohira , Dotaru Usui , Hidehiko Mori , Yasushi Koyanagawa
IPC分类号： H05K1/00
CPC分类号： H01R13/5202 , H01R9/24 , H01R13/5216 , H01R13/748 , H02K5/225
摘要： A terminal table unit includes: a terminal table (10) having a metal terminal (12) at its lower surface for connecting a lead wire (60); an insulation plate (20) adhered to the lower surface of the terminal table and having a hole (20-1) at a portion corresponding to the portion containing a metal terminal and its surrounding region; and a metal plate (30) having an upper surface adhered to the lower surface of the insulation plate and having a through hole (30-2) reaching from the upper surface to the lower surface. Through the through hole (30-2), the lead wire is brought out to the lower surface of the metal plate. The terminal unit has a contact surface between the insulation plate containing the hole (20-1) and the terminal table, a contact surface between the insulation plate and the metal plate, and the through hole (30-2) which are filled with adhesive and unified by a bolt (40).
摘要翻译：端子台单元包括：端子台（10），在其下表面具有金属端子（12），用于连接引线（60）; 绝缘板（20），其粘附到端子台的下表面，并且在与包含金属端子及其周围区域的部分对应的部分处具有孔（20-1）; 以及金属板（30），其具有粘附到绝缘板的下表面的上表面，并且具有从上表面到下表面到达的通孔（30-2）。通过通孔（30-2），导线被引出到金属板的下表面。端子单元具有包含孔（20-1）的绝缘板和端子台之间的接触表面，绝缘板和金属板之间的接触表面以及填充有粘合剂的通孔（30-2）并用螺栓（40）统一。

4. 发明授权

US06644584B2 Single coil of coil unit for linear motor, method and device for winding and forming the same, and method for forming and fabricating coil unit 失效
标题翻译：用于直线电动机的线圈单元的单线圈，用于卷绕和形成线圈的方法和装置以及用于形成和制造线圈单元的方法
公开(公告)号：US06644584B2
公开(公告)日：2003-11-11
申请号：US10083686
申请日：2002-02-27
申请人： Hidehiko Mori , Yasushi Koyanagawa , Yoshiyuki Tomita
发明人： Hidehiko Mori , Yasushi Koyanagawa , Yoshiyuki Tomita
IPC分类号： B21F304
CPC分类号： H01F41/086
摘要： A rectangular single coil of a coil unit for a linear motor is fabracated by winding a single conductive wire. A winding former having locks for a conductive wire at positions corresponding to vertices of the rectangular single coil is rotated by 180 degrees about an X-axis, by 180 degrees about a Y-axis, alternately by first and second rotating mechanisms. Thereby, a single conductive wire fed out in the direction of a Z-axis from a conductive wire feeding out machine is wound while locked to the locks of the winding former in succession.
摘要翻译：用于线性电动机的线圈单元的矩形单线圈通过缠绕单根导线而形成。在对应于矩形单线圈的顶点的位置处具有用于导线的锁的卷绕器，绕X轴旋转180度，绕Y轴旋转180度，交替地由第一和第二旋转机构旋转。由此，从导线送出机器向Z轴方向排出的单根导线被连续缠绕在卷绕机的锁上。

5. 发明授权

US06661128B2 Two-phase excitation linear motor 失效
标题翻译：两相励磁线性电机
公开(公告)号：US06661128B2
公开(公告)日：2003-12-09
申请号：US10067969
申请日：2002-02-08
申请人： Hidehiko Mori , Yasushi Koyanagawa
发明人： Hidehiko Mori , Yasushi Koyanagawa
IPC分类号： H02K4100
CPC分类号： H02K41/03 , H02K3/47
摘要： A two-phase excitation linear motor is provided, having a compact size and a large thrust force simultaneously. Each of two single coils is formed to have an almost rectangular ring-like shape where two sides opposing to each other function as a pair of effective conductors, and the other opposing two sides function as a pair of connecting conductors for connecting between the effective conductors. The connecting conductors are offset at an almost right angle. The two single coils are integrated such that the one effective conductor of the pair of effective conductors of the one single coil is interposed between the pair of effective conductors of the other single coil while the single coils are being combined such that the offset directions of the connecting conductors of the individual single coils are opposite to each other in a direction perpendicular to a traveling direction.
摘要翻译：提供两相励磁线性电动机，同时具有紧凑的尺寸和大的推力。两个单个线圈中的每一个形成为具有几乎矩形的环状形状，其中彼此相对的两侧作为一对有效导体起作用，另一个相对的两侧用作用于连接有效导体之间的一对连接导体。连接导体以几乎直角偏移。两个单个线圈被集成为使得一个单个线圈的一对有效导体中的一个有效导体插入在另一个单个线圈的一对有效导体之间，同时单个线圈被组合，使得该单个线圈的偏移方向各个单个线圈的连接导体在垂直于行进方向的方向上彼此相反。

6. 发明授权

US06646536B2 Single coil of coil unit for linear motor and winding former thereof 失效
标题翻译：用于直线电动机及其绕线架的线圈单元单线圈
公开(公告)号：US06646536B2
公开(公告)日：2003-11-11
申请号：US10105951
申请日：2002-03-26
申请人： Hidehiko Mori , Yasushi Koyanagawa
发明人： Hidehiko Mori , Yasushi Koyanagawa
IPC分类号： H01F2728
CPC分类号： H02K15/0457 , H02K41/03
摘要： A single coil for constituting a compact coil unit for a linear motor is provided. A single coil of a coil unit for a linear motor includes a pair of effective conductors for contributing to generating a thrust force for a moving body of a linear motor, and connecting conductors for connecting between the effective conductors. The connecting conductors are offset from a coil plane which includes the pair of effective conductors, and extend in parallel with the coil plane, and simultaneously a transverse section of the connecting conductors has an approximately trapezoidal shape including parallel sides which are approximately perpendicular to the coil plane, and a tilted side which is opposed to the coil plane, and is tilted toward a direction opposite to the direction of the offset in the extending state.
摘要翻译：提供用于构成用于线性电动机的紧凑型线圈单元的单个线圈。用于线性电动机的线圈单元的单个线圈包括一对有效导体，用于产生用于线性电动机的移动体的推力，以及用于连接有效导体之间的连接导体。连接导体从包括一对有效导体的线圈平面偏移，并且与线圈平面平行延伸，并且连接导体的横截面同时具有大致梯形形状，包括大致垂直于线圈的平行侧面平面和与线圈平面相对的倾斜侧，并且在与延伸状态的偏移方向相反的方向上倾斜。

7. 发明授权

US07082674B2 Method for winding a single coil of a coil unit for a linear motor 失效
标题翻译：用于缠绕用于线性电动机的线圈单元的单个线圈的方法
公开(公告)号：US07082674B2
公开(公告)日：2006-08-01
申请号：US10678134
申请日：2003-10-06
申请人： Hidehiko Mori , Yasushi Koyanagawa , Yoshiyuki Tomita
发明人： Hidehiko Mori , Yasushi Koyanagawa , Yoshiyuki Tomita
IPC分类号： H01F7/06
CPC分类号： H01F41/086 , Y10T29/4902 , Y10T29/49069 , Y10T29/49071 , Y10T29/49073
摘要： A rectangular single coil of a coil unit for a linear motor is fabracated by winding a single conductive wire. A winding former having locks for a conductive wire at positions corresponding to vertices of the rectangular single coil is rotated by 180 degrees about an X-axis, by 180 degrees about a Y-axis, alternately by first and second rotating mechanisms. Thereby, a single conductive wire fed out in the direction of a Z-axis from a conductive wire feeding out machine is wound while locked to the locks of the winding former in succession.
摘要翻译：用于线性电动机的线圈单元的矩形单线圈通过缠绕单根导线而形成。在对应于矩形单线圈的顶点的位置处具有用于导线的锁的卷绕器，绕X轴旋转180度，绕Y轴旋转180度，交替地由第一和第二旋转机构旋转。由此，从导线送出机器向Z轴方向排出的单根导线被连续缠绕在卷绕机的锁上。

8. 发明授权

US06564110B1 Position controlling apparatus capable of reducing the effect of disturbance 失效
标题翻译：能够降低扰动效果的位置控制装置
公开(公告)号：US06564110B1
公开(公告)日：2003-05-13
申请号：US09588530
申请日：2000-06-07
申请人： Kenichi Makino , Yoshiyuki Tomita , Hidehiko Mori
发明人： Kenichi Makino , Yoshiyuki Tomita , Hidehiko Mori
IPC分类号： G05B1918
CPC分类号： G05B19/313 , G05B13/0265 , G05B2219/41368 , G05B2219/41385
摘要： A discrete Kalman filter 12 and a disturbance estimating unit 13 are added to a feedback loop for feeding back a detected value of position from a position detector 6. The Kalman filter estimates position and velocity of an object to be controlled, thereafter outputting an estimated value of position and an estimated value of velocity. The disturbance estimating unit estimates from a command value of current and the estimated value of velocity the disturbance that is added to a load 5. The estimated value of position is fed back to a position controller 1, and the estimated value of velocity is fed back to a velocity controller 2. Further, a difference between a target value of current outputted from the velocity controller and the estimated value of disturbance is output as the command value of current.
摘要翻译：将离散卡尔曼滤波器12和干扰估计单元13添加到用于从位置检测器6反馈检测到的位置值的反馈回路。卡尔曼滤波器估计要控制的对象的位置和速度，然后输出估计值的位置和速度的估计值。干扰估计单元从电流的指令值和速度的估计值估计加到负载5上的干扰。将估计的位置值反馈到位置控制器1，并且将估计的速度值反馈另外，输出从速度控制器输出的电流的目标值与估计的干扰值之间的差作为电流的指令值输出。

9. 发明申请

US20050187653A1 Substrate transfer device 有权
标题翻译：基板转印装置
公开(公告)号：US20050187653A1
公开(公告)日：2005-08-25
申请号：US11110845
申请日：2005-04-21
申请人： Hidehiko Mori , Yoshiyuki Tomita , Kazutoshi Sakaki
发明人： Hidehiko Mori , Yoshiyuki Tomita , Kazutoshi Sakaki
IPC分类号： G12B5/00 , B65G49/07 , F15B15/14 , H01L21/027 , H01L21/677 , H01L21/68 , G06F7/00
CPC分类号： H01L21/67742 , H01L21/67745 , H01L21/67748 , H01L21/67751 , Y10S414/136 , Y10S414/139
摘要： The present invention provides a vacuum stage device that moves a substrate to be processed in a vacuum environment. In a substrate transfer device in accordance with the present invention, a wafer mounted to a wafer platen is moved in a vacuum processing chamber. This substrate transfer device includes a first driving mechanism for moving the wafer platen in a Y1 direction, and a second driving mechanism that is provided in the vacuum processing chamber and linearly reciprocates the wafer platen in X1 and X2 directions at a high speed.
摘要翻译：本发明提供一种在真空环境中移动待处理基板的真空级装置。在根据本发明的衬底转移装置中，将安装到晶片压板的晶片在真空处理室中移动。该基板转印装置包括用于沿Y 1方向移动晶片压板的第一驱动机构和设置在真空处理室中的第二驱动机构，并且以高速度在X 1和X 2方向上使晶片压板线性地往复运动。

10. 发明授权

US06584367B1 Stage position control method and stage position control apparatus capable of improving positioning precision 失效
标题翻译：能够提高定位精度的舞台位置控制方法和舞台位置控制装置
公开(公告)号：US06584367B1
公开(公告)日：2003-06-24
申请号：US09608068
申请日：2000-06-30
申请人： Kenichi Makino , Yoshiyuki Tomita , Hidehiko Mori
发明人： Kenichi Makino , Yoshiyuki Tomita , Hidehiko Mori
IPC分类号： G05B100
CPC分类号： G05B19/195 , G05B2219/41195 , G05B2219/41368 , G05B2219/42033 , G05B2219/49258
摘要： A Y stage is capable of translational driving in the Y-axial direction, by independently controllable Y1 linear motor and Y2 linear motor. The amount of movement of the Y stage is detected by a Y1 linear encoder and Y2 linear encoder, and fed back to a Y control system and &thgr; control system. The Y control system outputs a translational thrust command value, by receiving the average value of each positional detecting value measured by the Y1 linear encoder and Y2 linear encoder as the stage translational direction position feedback value. The &thgr; control system receives the difference between each position detecting value as a stage yawing direction position feedback value, and outputs a yawing direction thrust command value. A non-interference block outputs Y1 linear motor thrust command value and Y2 linear motor thrust command value, by the use of the translational thrust command value and the thrust command value. Thus, the movement of the Y stage can be divided into translational direction movement and yawing direction movement, and independently controlled and compensated.
摘要翻译： Y级能够通过独立可控的Y1直线电机和Y2直线电机在Y轴方向上进行平移驱动。 Y级的移动量由Y1线性编码器和Y2线性编码器检测，并反馈到Y控制系统和θ控制系统。 Y控制系统通过接收由Y1线性编码器和Y2线性编码器测量的每个位置检测值的平均值作为平台平移方向位置反馈值来输出平移推力指令值。 θ控制系统接收每个位置检测值之间的差作为舞台横摆方向位置反馈值，并输出偏航方向推力指令值。无干扰块通过使用平移推力指令值和推力指令值输出Y1线性电机推力指令值和Y2线性电机推力指令值。因此，Y阶段的运动可以分为平移方向运动和偏航方向运动，并进行独立的控制和补偿。

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