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    • 2. 发明授权
    • Liquid ejecting head alignment apparatus and liquid ejecting head alignment method
    • 液体喷射头对准装置和液体喷射头对准方法
    • US07602490B2
    • 2009-10-13
    • US11851999
    • 2007-09-07
    • Yasuo InaokaMotonori OkumuraMutsuhiko OtaKazutoshi GotoIsao YanagisawaTakuma Okamuro
    • Yasuo InaokaMotonori OkumuraMutsuhiko OtaKazutoshi GotoIsao YanagisawaTakuma Okamuro
    • G01B11/00
    • G01B11/272B41J2/161B41J2/1623B41J2002/14362
    • The invention provides a liquid ejecting head alignment apparatus that is used for positional determination and adhesion of nozzle plates and a fixation member, each of the nozzle plates having nozzle openings through which each of a plurality of liquid ejecting heads ejects liquid and further having alignment marks for positional alignment, the fixation member holding the nozzle-plate side of the plurality of liquid ejecting heads. The liquid ejecting head alignment apparatus according to the invention includes: a mask made of a transparent material, the mask having reference marks each of which is aligned with the corresponding alignment mark; a spacer jig that is provided between the fixation member and the mask in such a manner that the reference marks and the alignment marks are opposed to each other with a space being left therebetween, one surface of the spacer jig being in contact with the fixation member; and a bifocal microscope having an optical axis and two optical systems that shares the optical axis, the optical axis being oriented from a face of the mask that is opposite to the spacer jig side thereof toward the alignment mark via the reference mark and the space, one of the optical systems being capable of focusing on the reference mark, and the other thereof being capable of focusing on the alignment mark.
    • 本发明提供一种液体喷射头对准装置,其用于喷嘴板和固定部件的位置确定和粘附,每个喷嘴板具有喷嘴开口,多个喷液头中的每一个喷射口喷射液体并且还具有对准标记 用于位置对准,固定构件保持多个液体喷射头的喷嘴板侧。 根据本发明的液体喷射头对准装置包括:由透明材料制成的掩模,所述掩模具有与对应的对准标记对准的参考标记; 间隔夹具,其设置在所述固定构件和所述掩模之间,使得所述基准标记和所述对准标记在其间留有空间的情况下彼此相对,所述间隔夹具的一个表面与所述固定构件接触 ; 以及具有光轴和共享光轴的两个光学系统的双焦显微镜,所述光轴通过所述基准标记和所述空间朝向所述对准标记从所述掩模的与所述间隔物夹具侧相反的面取向, 光学系统中的一个能够聚焦在参考标记上,另一个能够聚焦在对准标记上。
    • 3. 发明申请
    • APPARATUS AND METHOD FOR ALIGNING LIQUID-JET HEAD
    • 用于对准喷射头的装置和方法
    • US20080094441A1
    • 2008-04-24
    • US11874693
    • 2007-10-18
    • Takuma OKAMUROMotonori OkumuraMutsuhiko OtaKazutoshi GotoIsao YanagisawaYasuo Inaoka
    • Takuma OKAMUROMotonori OkumuraMutsuhiko OtaKazutoshi GotoIsao YanagisawaYasuo Inaoka
    • B41J29/393
    • B41J2/19B41J25/304B41J2002/14362
    • Provided is an alignment apparatus for a liquid-jet head which includes a nozzle plate, a fixation member, a transparent mask, chucks, and an alignment mechanism. The nozzle plate includes a nozzle orifice for injecting a liquid for the liquid-jet head, and a first and a second alignment marks to be used in an aligning operation. Each of the alignment marks is formed in each of two end portions in the longitudinal direction of the nozzle plate. The fixation member holds the nozzle-plate side of each of a plurality of liquid-jet heads. The fixation member and the nozzle plate are positioned relative to each other and joined together by use of the alignment apparatus for the liquid-jet head. The transparent mask includes a first and a second reference marks with which the first and the second alignment marks are to be aligned respectively. The chucks are brought into contact respectively with two end surfaces in the longitudinal direction of each liquid-jet head, and thus hold the liquid-jet head. The alignment mechanism is configured to move the liquid-jet head by use of the chucks linearly within a plane that is parallel to the nozzle plate, and to move the liquid-jet head rotationally about an axis orthogonal to the plane.
    • 本发明提供一种液体喷射头对准装置,其包括喷嘴板,固定构件,透明掩模,卡盘和对准机构。 喷嘴板包括用于喷射用于喷液头的液体的喷嘴孔,以及用于对准操作的第一和第二对准标记。 每个对准标记形成在喷嘴板的纵向方向上的两个端部中的每一个中。 固定构件保持多个液体喷射头中的每一个的喷嘴板侧。 固定构件和喷嘴板相对于彼此定位并通过使用用于喷液头的对准装置连接在一起。 透明掩模包括分别与第一和第二对准标记对准的第一和第二参考标记。 夹头分别与每个喷液头的纵向方向上的两个端面接触,从而保持液体喷射头。 对准机构构造成通过在与喷嘴板平行的平面内线性地使卡盘移动喷液头,并使喷液头围绕与该平面正交的轴旋转移动。
    • 7. 发明授权
    • Method of manufacturing liquid-jet head and liquid-jet head
    • 制造喷液头和喷液头的方法
    • US07571525B2
    • 2009-08-11
    • US11392668
    • 2006-03-30
    • Akira MatsuzawaMutsuhiko Ota
    • Akira MatsuzawaMutsuhiko Ota
    • H01L41/22H04R17/00B21D53/76G11B5/127B41J2/045
    • B41J2/14233B41J2/161B41J2/1629B41J2002/14241B41J2002/14491Y10T29/42Y10T29/49401
    • Included are the steps of: forming piezoelectric elements on a surface of a passage-forming substrate with a vibration plate in between, and forming a penetrating portion by removing an area in the vibration plate, which area will serve as a communicating portion; forming lead electrodes and sealing up the penetrating portion with an interconnect layer; joining a reservoir forming plate to a surface of a passage-forming substrate; forming liquid passages by wet-etching; forming protection films on inner surfaces of the liquid passages; detaching and removing a protection film on an interconnect layer; and causing a reservoir portion and a communicating portion to communicate with each other by removing a corresponding part of the interconnect layer, and in accordance with the manufacturing method, while the liquid passages are being formed, the communicating portion is formed in a way that an edge of an opening of the vibration plate is located outside an edge of an opening which is close to the penetrating portion, and in a way that at least the edge of the opening of the penetrating portion is thus configured of only any one of the vibration plate and the interconnect layer.
    • 包括以下步骤:在通道形成基板的表面上形成压电元件,其间具有振动板,并且通过去除振动板中的区域形成穿透部分,该区域将用作连通部分; 形成引线电极并用互连层密封穿透部分; 将储层形成板连接到通道形成基板的表面; 通过湿法蚀刻形成液体通道; 在液体通道的内表面上形成保护膜; 在互连层上分离和去除保护膜; 并且通过除去互连层的对应部分而使储存部和连通部彼此连通,并且根据制造方法,在形成液体通道的同时,形成连通部, 振动板的开口的边缘位于靠近穿透部分的开口的边缘的外侧,并且以至少穿透部分的开口的边缘仅由振动的任何一个构成 板和互连层。
    • 8. 发明授权
    • Liquid ejecting head and liquid ejecting apparatus
    • 液体喷头和液体喷射装置
    • US08061813B2
    • 2011-11-22
    • US11854359
    • 2007-09-12
    • Akira MatsuzawaMutsuhiko OtaTetsushi TakahashiYasuyuki Matsumoto
    • Akira MatsuzawaMutsuhiko OtaTetsushi TakahashiYasuyuki Matsumoto
    • B41J2/05
    • B41J2/14233B41J2/045B41J2202/11
    • A liquid ejecting head that includes a fluid channel formation substrate and pressure generation units. The fluid channel formation substrate is made of a silicon single crystal substrate having a crystal face orientation of. The fluid channel formation substrate has a plurality of separate flow channels that include at least pressure generation chambers demarcated by partition walls, each of the pressure generation chambers being in communication with a nozzle opening that ejects liquid drops. The fluid channel formation substrate further has a communication portion that is in communication with each of the separate flow channels. The pressure generation units are provided so as to correspond to the pressure generation chambers and generate a pressure change in the pressure generation chambers so as to cause ejection of liquid drops.
    • 一种液体喷射头,其包括流体通道形成基板和压力产生单元。 流体通道形成基板由具有晶面取向的硅单晶基板制成。 流体通道形成基板具有多个单独的流动通道,至少包括通过分隔壁划分的压力产生室,每个压力产生室与喷射液滴的喷嘴开口连通。 流体通道形成基板还具有与每个分离的流动通道连通的通信部分。 压力发生单元设置成对应于压力产生室,并且在压力产生室中产生压力变化,从而引起液滴喷射。