会员体验
专利管家(专利管理)
工作空间(专利管理)
风险监控(情报监控)
数据分析(专利分析)
侵权分析(诉讼无效)
联系我们
交流群
官方交流:
QQ群: 891211   
微信请扫码    >>>
现在联系顾问~
热词
    • 3. 发明授权
    • Sputtering target
    • 溅射目标
    • US5320729A
    • 1994-06-14
    • US914469
    • 1992-07-17
    • Yasunori NarizukaMasakazu IshinoAkihiro KenmotsuYoshitaka ChibaAkitoshi Hiraki
    • Yasunori NarizukaMasakazu IshinoAkihiro KenmotsuYoshitaka ChibaAkitoshi Hiraki
    • C23C14/34
    • H01J37/3426H01J37/3491
    • Disclosed herein is a sputtering target with which a high resistivity thin film consisting of chromium, silicon and oxygen can be produced economically and stably for a long time. Also disclosed is a process for producing the sputtering target by selecting the grain size of a chromium (Cr) powder and a silicon dioxide (SiO.sub.2) powder, drying the powders sufficiently by heating, then mixing the dried powders to obtain a mixed powder containing generally from 20 to 80% by weight of chromium, most preferably from 50 to 80% by weight of chromium, the remainder being silicon dioxide, packing the mixed powder in a die, and sintering the packed powder by hot pressing or the like, to produce a desired sputtering target which has a two phase mixed structure. The sputtering target can be used for manufacture of thin film resistors and electric circuits.
    • 本文公开了一种溅射靶,其可以经济地且稳定地长时间生产由铬,硅和氧组成的高电阻率薄膜。 还公开了通过选择铬(Cr)粉末和二氧化硅(SiO 2)粉末的晶粒尺寸来制造溅射靶的方法,通过加热将粉末充分干燥,然后混合干燥粉末,得到通常含有的混合粉末 20至80重量%的铬,最优选为50至80重量%的铬,其余为二氧化硅,将混合粉末包装在模具中,并通过热压等烧结填充的粉末,以产生 具有两相混合结构的期望的溅射靶。 溅射靶可用于薄膜电阻和电路的制造。