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    • 4. 发明授权
    • Photoelectric conversion device, electro-optic device, and electronic device
    • 光电转换装置,电光装置和电子装置
    • US07999265B2
    • 2011-08-16
    • US12635358
    • 2009-12-10
    • Tsukasa Eguchi
    • Tsukasa Eguchi
    • H01L29/15
    • H01L27/14603H01L27/14634H01L27/14665
    • The photoelectric conversion device includes: a photoelectric conversion element in which a first electrode, a photoelectric conversion layer, and a second electrode are stacked in this order; and a thin film transistor (TFT) connected to the first electrode of the photoelectric conversion element via a contact hole, wherein the photoelectric conversion layer including a first photoelectric conversion layer disposed at a location which does not overlap with the contact hole and a second photoelectric conversion layer disposed at a location which overlaps with the contact hole, the first photoelectric conversion layer and the second photoelectric conversion layer are separated from each other by a separation groove, and the second electrode is selectively formed on the first photoelectric conversion layer, and the photoelectric conversion element is formed by the first electrode, the first photoelectric conversion layer, and the second electrode.
    • 光电转换装置包括:依次层叠第一电极,光电转换层和第二电极的光电转换元件; 以及薄膜晶体管(TFT),其经由接触孔与所述光电转换元件的第一电极连接,其中所述光电转换层包括设置在与所述接触孔不重叠的位置处的第一光电转换层和第二光电转换层 转换层设置在与接触孔重叠的位置处,第一光电转换层和第二光电转换层通过分隔槽彼此分离,并且第二电极选择性地形成在第一光电转换层上,并且 光电转换元件由第一电极,第一光电转换层和第二电极形成。
    • 5. 发明授权
    • Electrooptic device, substrate therefor, method for making the electrooptic device, and electronic apparatus
    • 电光装置,其基板,制造电光装置的方法和电子装置
    • US07456922B2
    • 2008-11-25
    • US11462227
    • 2006-08-03
    • Tsukasa Eguchi
    • Tsukasa Eguchi
    • G02F1/1333
    • G02F1/136227G02F1/133345H01L27/3248H01L27/3258H01L51/5271
    • An electrooptic device includes a substrate and plurality of pixel units. Each pixel unit includes a pixel electrode; an active element; a conductive layer below the pixel electrode connecting the active element to the pixel electrode; a resin film between the active element and the pixel electrode and between the conductive layer and the pixel electrode, having a small hole overlapping part of the conductive layer; a first insulating film between the resin film and the conductive layer and between the resin film and the active element, overlapping the conductive layer and the active element and having a first hole inside the small hole having a diameter equal to or smaller than the bottom of the small hole; and a second insulating film between the resin film and the pixel electrode, having a second hole continuous to the first hole forming a contact hole together with the first hole.
    • 电光装置包括基板和多个像素单元。 每个像素单元包括像素电极; 活跃元素; 将有源元件连接到像素电极的像素电极下方的导电层; 所述有源元件与所述像素电极之间以及所述导电层与所述像素电极之间具有与所述导电层重叠的小孔的树脂膜; 所述树脂膜和所述导电层之间以及所述树脂膜和所述有源元件之间的第一绝缘膜与所述导电层和所述有源元件重叠,并且在所述小孔内具有直径等于或小于所述有源元件的直径的底部的第一孔 小洞; 以及在树脂膜和像素电极之间的第二绝缘膜,具有与第一孔连续的第二孔,与第一孔一起形成接触孔。
    • 7. 发明申请
    • ELECTROOPTIC DEVICE, SUBSTRATE THEREFOR, METHOD FOR MAKING THE ELECTROOPTIC DEVICE, AND ELECTRONIC APPARATUS
    • 电动装置,其基板,制造电动装置的方法和电子装置
    • US20070058099A1
    • 2007-03-15
    • US11462227
    • 2006-08-03
    • Tsukasa Eguchi
    • Tsukasa Eguchi
    • G02F1/136
    • G02F1/136227G02F1/133345H01L27/3248H01L27/3258H01L51/5271
    • An electrooptic device includes a substrate and a pluralty of pixel units. Each pixel unit includes a pixel electrode; an active element for active control of the pixel electrode; a conductive layer that is disposed below the pixel electrode and that connects the active element to the pixel electrode; an organic resin film that provides interlayer insulation between the active element and the pixel electrode and between the conductive layer and the pixel electrode, the organic resin film having a small hole that overlaps part of the conductive layer in a plan view; a first inorganic insulating film disposed between the organic resin film and the conductive layer and between the organic resin film and the active element such that the first inorganic insulating film overlaps the conductive layer and the active element in a plan view, the first inorganic insulating film having a first hole inside the small hole in a plan view, the first hole having a diameter equal to or smaller than the bottom of the small hole; and a second inorganic insulating film disposed between the organic resin film and the pixel electrode, the second inorganic insulating film having a second hole that is continuous to the first hole and that forms a contact hole together with the first hole. The pixel electrode is formed in a continuous manner from inside the contact hole to outside the contact hole such that the pixel electrode is electrically connected to the conductive layer exposed inside the first hole.
    • 电光装置包括基板和多个像素单元。 每个像素单元包括像素电极; 用于主动控制像素电极的有源元件; 导电层,其设置在所述像素电极下方,并且将所述有源元件连接到所述像素电极; 在有源元件和像素电极之间以及导电层和像素电极之间提供层间绝缘的有机树脂膜,在平面图中具有与导电层的一部分重叠的小孔的有机树脂膜; 第一无机绝缘膜,设置在有机树脂膜和导电层之间,并且在有机树脂膜和有源元件之间,使得第一无机绝缘膜在平面图中与导电层和有源元件重叠,第一无机绝缘膜 在平面图中,在小孔内部具有第一孔,第一孔的直径等于或小于小孔的底部; 以及设置在所述有机树脂膜和所述像素电极之间的第二无机绝缘膜,所述第二无机绝缘膜具有与所述第一孔连续并与所述第一孔一起形成接触孔的第二孔。 像素电极从接触孔的内部到接触孔的外部以连续的方式形成,使得像素电极电连接到暴露在第一孔内的导电层。
    • 8. 发明授权
    • Electro-optical device and semiconductor device
    • 电光器件和半导体器件
    • US06909487B2
    • 2005-06-21
    • US10442049
    • 2003-05-21
    • Tsukasa Eguchi
    • Tsukasa Eguchi
    • G02F1/1343G02F1/1345G02F1/1362G02F1/1368H01L21/768H01L23/52H01L23/522H01L27/146H01L29/04H01L31/105H01L31/107H05B33/00
    • G02F1/13458G02F1/1345H01L27/14643H01L31/1055H01L31/107
    • In order to provide an electro-optical device and a semiconductor device each having a connecting portion with a structure capable of reducing or preventing reliability from deteriorating and allowing circuits to be highly integrated, a connecting portion a first conductive layer formed on a first insulating film, a second insulating film formed to cover the first conductive layer, a second conductive layer formed on the second insulating film and a contact hole penetrating the second insulating film and the first insulating film. Wiring lines are electrically connected to each other because the first conductive layer contacts the second conductive layer on the side surface of the contact hole. Further, an etching stop layer that has a tolerance against etching of the first insulating film is disposed on a region corresponding to at least the bottom surface of the contact hole.
    • 为了提供一种电光装置和半导体装置,每个电子装置和半导体装置具有能够降低或防止可靠性劣化并使电路高度集成的结构的连接部分,连接部分形成在第一绝缘膜上的第一导电层 形成为覆盖第一导电层的第二绝缘膜,形成在第二绝缘膜上的第二导电层和贯穿第二绝缘膜和第一绝缘膜的接触孔。 由于第一导电层与接触孔的侧表面上的第二导电层接触,所以接线彼此电连接。 此外,在与至少接触孔的底面相对应的区域上设置具有对第一绝缘膜的蚀刻耐受性的蚀刻停止层。