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    • 7. 发明申请
    • SEMICONDUCTOR DEVICE AND METHOD FOR FABRICATION THEREOF
    • 半导体器件及其制造方法
    • US20090267081A1
    • 2009-10-29
    • US12067407
    • 2006-09-12
    • Takashi Udagawa
    • Takashi Udagawa
    • H01L29/12H01L21/20
    • H01L29/1608H01L21/02381H01L21/02433H01L21/02458H01L21/02502H01L21/0254H01L21/0262H01L29/045H01L29/2003H01L29/66462H01L29/7787H01L33/007H01L33/16Y10S438/933
    • A semiconductor device includes a substrate formed of a single crystal. a silicon carbide layer disposed on a surface of the single crystal substrate and an intermediate layer disposed on a surface of the silicon carbide layer and formed of a Group III nitride semiconductor, wherein the silicon carbide layer is formed of a cubic crystal stoichiometrically containing silicon copiously and the surface thereof has a (3×3) reconstruction structure. The semiconductor device is fabricated by a method including a first step of blowing a hydrocarbon gas on the surface of the substrate, thereby inducing adsorption of hydrocarbon thereon, a second step of heating the substrate having adsorbed the hydrocarbon to a temperature exceeding a temperature used for the adsorption of the hydrocarbon while irradiating the surface of the substrate with electrons and consequently giving rise to a silicon carbide layer formed of a cubic crystal stoichiometrically containing silicon copiously and provided with a surface having a (3×3) reconstruction structure and a third step of supplying a gaseous raw material containing nitrogen and a gaseous raw material containing a Group III element to the surface of the silicon carbide layer and consequently giving rise to the intermediate layer formed of the Group III nitride semiconductor.
    • 半导体器件包括由单晶形成的衬底。 设置在单晶衬底的表面上的碳化硅层和设置在碳化硅层的表面上并由III族氮化物半导体形成的中间层,其中碳化硅层由含有大量化学计量的硅的立方晶体形成 其表面具有(3×3)重构结构。 该半导体器件通过包括在基底表面吹入烃气体从而诱导其上的烃吸附的第一步骤的方法制造,第二步是将吸附有烃的基底加热到超过用于 在用电子照射衬底表面的同时吸附碳氢化合物,并且因此产生由具有(3×3)重构结构的表面形成的具有化学计量含硅的立方晶体的碳化硅层,并且提供第三步骤 将含有氮的气态原料和含有III族元素的气态原料输送到碳化硅层的表面,由此产生由III族氮化物半导体形成的中间层。
    • 9. 发明授权
    • Multicolor light-emitting lamp and light source
    • 多色发光灯和光源
    • US07479731B2
    • 2009-01-20
    • US10486985
    • 2002-08-16
    • Takashi Udagawa
    • Takashi Udagawa
    • H01J1/62H01J63/04
    • H01L33/30H01L25/0753H01L2224/48091H01L2224/48464H01L2224/73265H01L2924/00014
    • The present invention provides a technique for fabricating a multicolor light-emitting lamp by using a blue LED having a structure capable of avoiding cumbersome bonding. In particular, the present invention provides a technique for fabricating a multicolor light-emitting lamp by using a hetero-junction type GaP-base LED capable of emitting high intensity green light in combination. Also, for example, in fabricating a multicolor light-emitting lamp from the blue LED and the yellow LED, the present invention provides a technique for fabricating a multicolor light-emitting lamp from a blue LED requiring no cumbersome bonding and a hetero-junction type GaAs1-ZPZ-base yellow LED of emitting light having high light emission intensity.
    • 本发明提供一种通过使用具有能够避免麻烦的结合的结构的蓝色LED来制造多色发光灯的技术。 特别地,本发明提供了一种通过组合使用能够发射高强度绿光的异质结型GaP基LED来制造多色发光灯的技术。 此外,例如,在从蓝色LED和黄色LED制造多色发光灯的同时,本发明提供了一种从不需要繁琐的接合的蓝色LED制造多色发光灯和异质结型的技术 具有高发光强度的发光的GaAs1-ZPZ基黄色LED。