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    • 4. 发明授权
    • Carrier transportation management system and method for internal buffer process tools
    • 载波运输管理系统和内部缓冲处理工具的方法
    • US07505828B2
    • 2009-03-17
    • US11457645
    • 2006-07-14
    • Ren-Hour ChenKuo-Hua WangChien-Hsiung Chen
    • Ren-Hour ChenKuo-Hua WangChien-Hsiung Chen
    • G06F19/00
    • H01L21/67276
    • System and method for carrier transportation management in a wafer fabrication facility (“fab”) are described. In one embodiment, the fab comprises a process tool having an internal buffer for storing a plurality of carriers each containing a wafer lot and a load port for loading wafer lots into and out of the internal buffer and the method comprises determining a relative priority between a first wafer lot, which has been processed by the process tool and is stored in the internal buffer, and a second wafer lot, which is to be transported to the process tool for processing thereby; and, responsive to a notification from the process tool that the load port is available, unloading the first wafer lot from the internal buffer via the load port if the first wafer lot has been determined to have a higher priority than the second wafer lot, and transporting the second wafer lot to the process tool and loading the second wafer lot into the internal buffer via the load port if the second wafer lot has been determined to have a higher priority than the first wafer lot.
    • 描述了晶片制造设备(“fab”)中的载体运输管理的系统和方法。 在一个实施例中,晶圆厂包括具有内部缓冲器的处理工具,所述内部缓冲器用于存储多个载体,每个载体包含晶片批次和负载端口,用于将晶片批次载入和流出内部缓冲器,并且该方法包括确定 第一晶片块,其被处理工具处理并存储在内部缓冲器中;以及第二晶片批次,其将被运送到处理工具以进行处理; 并且响应于所述加工工具的通知所述加载端口可用,如果已经确定所述第一晶片批次具有比所述第二晶圆批次更高的优先级,则通过所述负载端口从所述内部缓冲器卸载所述第一晶片批次;以及 如果第二晶片批次被确定为具有比第一晶片批次更高的优先级,则将第二晶片批次运送到处理工具并将第二晶片批次装载到内部缓冲器中。