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    • 4. 发明授权
    • Method of pattern etching a silicon-containing hard mask
    • 图案蚀刻含硅硬掩模的方法
    • US07504338B2
    • 2009-03-17
    • US11502163
    • 2006-08-09
    • Yan DuMeihua ShenShashank Deshmukh
    • Yan DuMeihua ShenShashank Deshmukh
    • H01L21/311H01L21/302
    • H01J37/32174H01J37/321H01L21/31116H01L21/32139
    • Disclosed herein is a method of pattern etching a layer of a silicon-containing dielectric material. The method employs a plasma source gas including CF4 to CHF3, where the volumetric ratio of CF4 to CHF3 is within the range of about 2:3 to about 3:1; more typically, about 1:1 to about 2:1. Etching is performed at a process chamber pressure within the range of about 4 mTorr to about 60 mTorr. The method provides a selectivity for etching a silicon-containing dielectric layer relative to photoresist of 1.5:1 or better. The method also provides an etch profile sidewall angle ranging from 88° to 92° between said etched silicon-containing dielectric layer and an underlying horizontal layer. in the semiconductor structure. The method provides a smooth sidewall when used in combination with certain photoresists which are sensitive to 193 nm radiation.
    • 本文公开了一种图案蚀刻含硅介电材料层的方法。 该方法采用包含CF4至CHF3的等离子体源气体,其中CF 4与CHF 3的体积比在约2:3至约3:1的范围内; 更通常为约1:1至约2:1。 在约4mTorr至约60mTorr的范围内的处理室压力下进行蚀刻。 该方法提供了相对于光致抗蚀剂蚀刻含硅电介质层的选择性为1.5:1或更好。 该方法还提供了在所述被蚀刻的含硅介电层和下面的水平层之间从88°至92°的蚀刻轮廓侧壁角。 在半导体结构中。 当与某些对193nm辐射敏感的光致抗蚀剂组合使用时,该方法提供了平滑的侧壁。
    • 5. 发明申请
    • Method of pattern etching a silicon-containing hard mask
    • 图案蚀刻含硅硬掩模的方法
    • US20070010099A1
    • 2007-01-11
    • US11502163
    • 2006-08-09
    • Yan DuMeihua ShenShashank Deshmukh
    • Yan DuMeihua ShenShashank Deshmukh
    • H01L21/461H01L21/302
    • H01J37/32174H01J37/321H01L21/31116H01L21/32139
    • Disclosed herein is a method of pattern etching a layer of a silicon-containing dielectric material. The method employs a plasma source gas including CF4 to CHF3, where the volumetric ratio of CF4 to CHF3 is within the range of about 2:3 to about 3:1; more typically, about 1:1 to about 2:1. Etching is performed at a process chamber pressure within the range of about 4 mTorr to about 60 mTorr. The method provides a selectivity for etching a silicon-containing dielectric layer relative to photoresist of 1.5:1 or better. The method also provides an etch profile sidewall angle ranging from 88° to 92° between said etched silicon-containing dielectric layer and an underlying horizontal layer in the semiconductor structure. The method provides a smooth sidewall when used in combination with certain photoresists which are sensitive to 193 nm radiation.
    • 本文公开了一种图案蚀刻含硅介电材料层的方法。 该方法采用等离子体源气体,其包括CF 4和CHF 3 3的体积比,其中CF 4的体积比与CHF 3 < SUB>在约2:3至约3:1的范围内; 更通常为约1:1至约2:1。 在约4mTorr至约60mTorr的范围内的处理室压力下进行蚀刻。 该方法提供了相对于光致抗蚀剂蚀刻含硅电介质层的选择性为1.5:1或更好。 该方法还提供了在所述蚀刻的含硅介电层和半导体结构中的下面的水平层之间从88°至92°的范围内的蚀刻轮廓侧壁角。 当与某些对193nm辐射敏感的光致抗蚀剂组合使用时,该方法提供了平滑的侧壁。